• KSII Transactions on Internet and Information Systems (TIIS)
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• 제15권10호
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• pp.3554-3570
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• 2021

With the rapid development of the Chinese water project, the safety monitoring of dams is urgently needed. Many drawbacks exist in dams, such as high monitoring costs, a limited equipment service life, long-term monitoring difficulties. MEMS sensors have the advantages of low cost, high precision, easy installation, and simplicity, so they have broad application prospects in engineering measurements. This paper designs intelligent monitoring based on the collaborative measurement of dual MEMS sensors. The system first determines the endpoint coordinates of the sensor array by the coordinate transformation relationship in the monitoring system and then obtains the dam settlement according to the endpoint coordinates. Next, this paper proposes a dual-MEMS sensor collaborative measurement algorithm that builds a mathematical model of the dual-sensor measurement. The monitoring system realizes mutual compensation between sensor measurement data by calculating the motion constraint matrix between the two sensors. Compared with the single-sensor measurement, the dual-sensor measurement algorithm is more accurate and can improve the reliability of long-term monitoring data. Finally, the experimental results show that the dam subsidence monitoring system proposed in this paper fully meets the engineering monitoring accuracy needs, and the dual-sensor collaborative measurement system is more stable than the single-sensor monitoring system.

• 한국컴퓨터정보학회논문지
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• 제25권5호
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• pp.73-79
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• 2020

한반도에서 점차 증가하는 지진으로 지진을 빠르고 정확하게 감지하기 위한 연구가 활발하게 이루어지고 있다. 기상청에서 운영하는 기존 관측소는 설치와 운영에 많은 비용이 요구되어 오늘날 저가의 센서를 사용하여 지진을 감지하기 위한 연구가 이루어지고 있다. 논문에서는 스마트폰에 설치된 저가의 MEMS 가속도 센서를 활용하여 지진 관측자료 생성 및 지진 감지 체계를 구축할 수 있는지에 대해 평가한다. 가속도 센서 분석을 위하여 국내의 여러 위치에 설치하여 가속도 데이터를 수집하였으며, PSD 계산을 통하여 각 센서의 바닥 잡음 수준을 파악한다. 분석 결과를 바탕으로 기존 MEMS 가속도 센서의 바닥 잡음 수준과 지진 감지를 위한 노이즈 모델과 비교하여 MEMS 센서가 감지할 수 있는 지진의 규모를 파악한다. 다양한 종류의 건물에 부착된 280 여 개의 가속도 센서 중 200 개의 센서로부터 데이터를 지난 수 개월 간 수집 하였으며 PSD 계산을 통하여 설치된 스마트폰의 MEMS 가속도 센서는 10Km 이내에서 발생하는 규모 3.5 이상의 지진을 관측 할 수 있음을 파악하였다. 지난 몇 개월간의 운영 기간 동안, 스마트폰 가속도 센서는 2019년, 12월 30일 밀양에서 발생한 규모 3.5의 지진을 기록하였으며 지진 감지 기법 중 하나인 STA/LTA 기법에 의해서 지진이 감지됨을 확인할 수 있었다. 제안하는 MEMS 가속도 센서를 사용한 지진 감지 체계는 점차 증가하는 지진을 더욱 빠르고 정확하게 감지할 수 있을 것으로 기대한다.

• 센서학회지
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• 제19권4호
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• pp.259-270
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• 2010

MEMS(micro electro mechanical systems) is a technology for the manufacture hyperfine structure, as a micro-sensor and a driving device, by a variety of materials such as silicon and polymer. Many study for utilizing the MEMS applications have been performed in variety of fields, such as light devices, high frequency equipments, bio-technology, energy applications and other applications. Especially, the field of Bio-MEMS related with bio-technology is very attractive, because it have the potential technology for the miniaturization of the medical diagnosis system. Bio-MEMS, the compound word formed from the words 'Bio-technology' and 'MEMS', is hyperfine devices to analyze biological signals in vitro or in vivo. It is extending the range of its application area, by combination with nano-technology(NT), Information Technology(IT). The LOC(lab-on-a-chip) in Bio-MEMS, the comprehensive measurement system combined with Micro fluidic systems, bio-sensors and bio-materials, is the representative technology for the miniaturization of the medical diagnosis system. Therefore, many researchers around the world are performing research on this area. In this paper, the application, development and market trends of Bio-MEMS are investigated.

• 센서학회지
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• 제24권5호
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• pp.281-286
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• 2015

The importance of air quality monitoring is rapidly increasing. Even though state-of-the-art air quality monitoring technologies such as mass spectrometry, gas chromatography, and optical measurement enable high-fidelity measurement of air pollutants, they cannot be widely used for portable or personalized platforms because of their high cost and complexity. Recently, personalized and localized environmental monitoring, rather than global and averaged environmental monitoring, has drawn greater attention with the advancement of mobile telecommunication technologies. Here, micro- and nano-technologies enable highly integrated and ultra-compact sensors to meet the needs of personalized environmental monitoring. In this paper, several examples of MEMS-based gas sensors for compact and personalized air quality monitoring are explained. Additionally, the principles and usage of functional nanomaterials are discussed for highly sensitive and selective gas sensors.

• Journal of Mechanical Science and Technology
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• 제20권4호
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• pp.554-560
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• 2006

This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include: (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2000년도 Proceedings of 5th International Joint Symposium on Microeletronics and Packaging
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• pp.29-33
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• 2000

MEMS, Micro Electro-Mechanical Systems, present one of the greatest advanced packaging challenges of the next decade. Historically hybrid technology, generally thick film, provided sensors and actuators while integrated circuit technologies provided the microelectronics for interpretation and control of the sensor input and actuator output. Brought together in MEMS these technical fields create new opportunities for miniaturization and performance. Integrated circuit processing technologies combined with hybrid design systems yield innovative sensors and actuators for a variety of applications from single crystal silicon wafers. MEMS packages, far more simple in principle than today's electronic packages, provide only physical protection to the devices they house. However, they cannot interfere with the function of the devices and often must actually facilitate the performance of the device. For example, a pressure transducer may need to be open to atmospheric pressure on one side of the detector yet protected from contamination and blockage. Similarly, an optical device requires protection from contamination without optical attenuation or distortion being introduced. Despite impediments such as package standardization and complexity, MEMS markets expect to double by 2003 to more than ＄9 billion, largely driven by micro-fluidic applications in the medical arena. Like the semiconductor industry before it. MEMS present many diverse demands on the advanced packaging engineering community. With focused effort, particularly on standards and packaging process efficiency. MEMS may offer the greatest opportunity for technical advancement as well as profitability in advanced packaging in the first decade of the 21st century! This paper explores MEMS packaging opportunities and reviews specific technical challenges to be met.

• 센서학회지
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• 제17권6호
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• pp.406-413
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• 2008

We have been implemented simple statistical pattern recognition methods for harmful gases classification using gas sensors array fabricated by MEMS (Micro Electro Mechanical System) technology. The performance of pattern recognition method as a gas classifier is highly dependent on the choice of pre-processing techniques for sensor and sensors array signals and optimal classification algorithms among the various classification techniques. We carried out pre-processing for each sensor's signal as well as sensors array signals to extract features for each gas. We adapted simple statistical pattern recognition algorithms, which were PCA (Principal Component Analysis) for visualization of patterns clustering and MLR (Multi-Linear Regression) for real-time system implementation, to classify harmful gases. Experimental results of adapted pattern recognition methods with pre-processing techniques have been shown good clustering performance and expected easy implementation for real-time sensing system.

• 제어로봇시스템학회논문지
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• 제13권2호
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• pp.133-139
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• 2007

An unmanned ground vehicle can perform its mission automatically without human control in unknown environment. To move up to a destination in various surrounding situation, navigational information is indispensible. In order to be adopted for an unmanned vehicle, the navigation box is small, light weight and low power consumption. This paper suggests navigation system using a low grade MEMS IMU for supplying position, velocity, and attitude of an unmanned ground vehicle. This system consists of low cost and light weight MEMS sensors and a GPS receiver to meet unmanned vehicle requirements. The sensors are basically integrated by loosely coupled method using Kalman filter and internal algorithms are divided into initial alignment, sensor error compensation, and complex navigation algorithm. The performance of the designed navigation system has been analyzed by real time field test and compared to commercial tactical grade GPS/INS system.

• 한국항공우주학회지
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• 제36권10호
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• pp.1017-1025
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• 2008

본 연구에서는 무인항공기의 대기속도 및 압력고도를 측정하는 공력자료시스템(ADS)을 개발하였다. ADS는 비행제어시스템에 항공기 속도와 고도를 제공함으로써 실속속도 이하에서의 비행을 막고 고도유지 비행을 가능하게 하는 시스템이다. 무인항공기의 속도와 고도를 정확하게 측정하는 것은 비행성능을 확인하고 항공기의 안전성을 보장하기 위한 중요한 부분이다. 본 논문에서 개발된 ADS는 MEMS 압력센서, 저역통과필터, 마이크로 컨트롤러 그리고 피토튜브로 구성되어 있다. 온도보정과 압력보정을 통해 ADS 데이터의 오차를 줄였으며 비행시험에서 GPS 데이터와 ADS 데이터를 비교하였다.

• 반도체디스플레이기술학회지
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• 제22권3호
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• pp.62-66
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• 2023

With the advancement in technology and rapid increase in the demand for microelectromechanical systems (MEMS) based inertial measurement units (IMUs), high-volume production and test system remain a major challenge for the MEMS industry. To compete with the challenging market of Industry 4.0, here we developed an automatic test system to evaluate the performance of the ovenized IMU sensors as well as analyze the data. The automatic test system was developed by interfacing a commercial MEMS IMU (BMI 088) using LabVIEW. The BMI 088 was tested experimentally for long-term bias stability, ON/OFF bias repeatability, and root mean square (rms) noise. Furthermore, the data was analyzed through the developed test system. The results show that the automatic test system has improved the test time and reduced human effort. The developed automatic test system is a significant approach to MEMS research and development (R&D) to increase and improve the mass production of IMUs.