• KIEE International Transactions on Electrophysics and Applications
• /
• v.4C no.5
• /
• pp.241-246
• /
• 2004

In this paper, we present a novel integrated cell processor to handle individual embryos. Its functions are composed of transporting, isolation, orientation, and immobilization of cells. These functions are essential for biomanipulation of single cells, and have been typically carried out by a proficient operator. The purpose of this study is the automation of these functions for safe and effective cell manipulation using a MEMS based cell processor. This device is realized with a relatively simple design and fabrication process. Experimental results indicate that it can act as an efficient substitute for essential but very tiresome and repetitive manual work while contributing significantly to the improvement of speed and success rate of operation by facilitating cell manipulation. The cell viability test for the device is studied through the distribution of mitochondria in mice embryos and cultivation of cells for 86h.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2009.10a
• /
• pp.387-390
• /
• 2009

This study was designed to fabricate the micro-electro-mechanical systems (MEMS) parts such as micro spur gears using hot extrusion of gas atomized Al-78Zn powders. For this purpose, it is important to develop new methods to fabricate micro-dies and choose suitable extrusion conditions for a micro-forming. Micro-dies with Ni were fabricated by LIGA technology. LIGA technology was capable to produce micro-extrusion dies with close tolerances, thick bearing length and adequate surface quality. Superplastic Al-78Zn powders have the great advantage in achieving deformation under low stresses and exhibiting good micro formability with average strain rates ranging from $10^{-3}$ to $10^{-2}\;s^{-1}$ and constant temperatures ranging from 503 to 563K. Al-78Zn powders were compacted into a cylindrical shape (${\Phi}3{\times}h10$) under compressive force of 10kN and, subsequently, the compacted powders were extruded at 563k in a hot furnace. Micro-extrusion has succeeded in forming micro-gear shafts.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2012.08a
• /
• pp.361-361
• /
• 2012

PZT (Pb(Zr,Ti)O3) thin films have been used widely in the MEMS application, due to their inherent ferroelectric and piezoelectric properties. Such ferroelectricity induces much higher dielectric constants compared to those of the nonperovskite materials. In this work, the PZT thin films were deposited onto Indium-Tin-oxide (ITO) substrates through the spin-coating of PZT sols. The deposited PZT thin films were characterized in terms of the electrical and optical properties with special emphases on conductivity and optical constants. The detailed analysis techniques incorporate the dc-based current-voltage characteristics for the electrical properties, spectroscopic ellipsometry for optical characterization, atomic force microscopy for surface morphology, X-ray Photoelectron Spectroscopy for chemical bonding, Energy-dispersive X-ray Spectrometry for chemical analyses and X-ray diffraction for crystallinity. The ferroelectric phenomena were confirmed using capacitance-voltage measurements. The integrated physical/chemical features are attempted towards energy-oriented applications applicable to next-generation high-efficiency power generation systems.

• ETRI Journal
• /
• v.38 no.4
• /
• pp.685-694
• /
• 2016

A surface micromachined piezoresistive pressure sensor with a novel internal substrate vacuum cavity was developed. The proposed internal substrate vacuum cavity is formed by selectively etching the silicon substrate under the sensing diaphragm. For the proposed cavity, a new fabrication process including a cavity side-wall formation, dry isotropic cavity etching, and cavity vacuum sealing was developed that is fully CMOS-compatible, low in cost, and reliable. The sensitivity of the fabricated pressure sensors is 2.80 mV/V/bar and 3.46 mV/V/bar for a rectangular and circular diaphragm, respectively, and the linearity is 0.39% and 0.16% for these two diaphragms. The temperature coefficient of the resistances of the polysilicon piezoresistor is 0.003% to 0.005% per degree of Celsius according to the sensor design. The temperature coefficient of the offset voltage at 1 atm is 0.0019 mV and 0.0051 mV per degree of Celsius for a rectangular and circular diaphragm, respectively. The measurement results demonstrate the feasibility of the proposed pressure sensor as a highly sensitive circuit-integrated pressure sensor.

• JSTS:Journal of Semiconductor Technology and Science
• /
• v.5 no.1
• /
• pp.58-66
• /
• 2005

Inertial-grade vertical-type and lateral-type differential resonant accelerometers (DRXLs) are designed, fabricated using one process and tested for navigational applications. The accelerometers consist of an out-of-plane (for z-axis) accelerometer and in-plane (for x, y-axes) accelerometers. The sensing principle of the accelerometer is based on gap-sensitive electrostatic stiffness changing effect. It says that the natural frequency of the accelerometer can be changed according to an electrostatic force on the proof mass of the accelerometer. The out-of-plane resonant accelerometer shows bias stability of $2.5{\mu}g$, sensitivity of 70 Hz/g and bandwidth of 100 Hz at resonant frequency of 12 kHz. The in-plane resonant accelerometer shows bias stability of $5.2{\mu}g$, sensitivity of 128 Hz/g and bandwidth of 110 Hz at resonant frequency of 23.4 kHz. The measured performances of two accelerometers are suitable for an application of inertial navigation.

• Journal of Institute of Convergence Technology
• /
• v.1 no.2
• /
• pp.6-15
• /
• 2011

This paper reports the design and fabrication of a micro-electro-mechanical-system(MEMS)-based electrostatic angular microactuator for a dual-stage servo. The proposed actuator employs a novel electrode pattern named "skewed electrode array(SEA)" scheme. It is shown that SEA has better linearity than a parallel plate type actuator and stronger force than a comb-drive based actuator. The moving and the fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, an electrostatic FE analysis was carried out and an empirical force model was established for SEA. A new assembly method which will allow the active electrodes to be located beneath the slider was developed. The active electrodes are connected by inner and outer rings lifted on the base substrate, and the inner and outer rings are connected to platform on which the slider locates. Electrostatic force between active electrodes and platform can be used for exiting out of plane modes, so this provides the possibility of the flying height control. A microactuator that can position the pico-slider over ${\pm}0.5{\mu}m$ using under 20 volts for a 2 kHz fine-tracking servo was designed and fabricated using SoG process.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2003.10a
• /
• pp.97-100
• /
• 2003

Globally, the various machine components, as in electronics and communications, are demanded to being high-performance and micro-scale with abrupt development of the fields of computers, mobile communications. As this current tendency, production of the parts that must have high accuracy, so called milli-structure, are accomplished by the method of top-down, differently as in the techniques of MEMS, NANO. But, in the case of milli-structure, production procedure is highly costs, difficult and demands more accurate dimension than the conservative forming, processing technique. In this paper, forming analysis of the micro-former as the milli-structure are performed and then calculate the punch force etc. This information calculated is applied to decide the forming capacity of micro-former and design the process of forming stage, dimension of dies in another forming bodies. And, for the better precise forming analysis, elasto-plastic analysis is to be performed, then the consideration about effect of elastic recovery when punch and die are unloaded, have to be discussed in change of dimensions.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.27 no.1
• /
• pp.39-45
• /
• 2003

As the size of a combustor decreases to a MEMS scale, heat loss increases and becomes a dominant effect on the performance of the devices. Existing models, however, are not adequate to predict the heat transfer and combustion processes in such small scales. In the present study, a semi-empirical model to calculate heat loss from a micro combustor is described. The model derives heat transfer coefficients that best fits the heat loss characteristics of a micro combustor that is represented by transient pressure record after combustion is completed. From conservation of energy equation applied to the burned gas inside the combustor, a relationship between pressure and heat transfer is reduced. Two models for heat transfer coefficients were tested; a constant and first order polynomial of temperature with its coefficients determined from fitting with measurements. The model was tested on a problem of cooling process of burnt gas in a micro combustor and comparison with measurements showed good agreements. The heat transfer coefficients were used for combustion calculation in a micro vessel. The results showed the dependence of flame speed on the scale of the chamber through enhanced heat loss.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.9 no.5
• /
• pp.105-111
• /
• 2000

Micronization of sensor is a trend of the silicon sensor development with regard to a piezoresistive silicon pressure sensor, the size of the pressure sensor diaphragm have become smaller year by year, and a microaccelerometer with a size less than 200~300${\mu}{\textrm}{m}$ has been realized. Over the past four or five years, numerical modeling of microsensors and microstructures has gradually been developed as a field of microelectromechanical system(MEMS) design process. In this paper, we study some of the micromachining processes of single crystal silicon(SCS) for the microaccelerometer, and their subsequent processes which might affect thermal and mechanical loads. The finite element method(FEM) has been a standard numerical modeling technique extensively utilized in structural engineering discipline for component design of microaccelerometer. Temperature rise sufficiently low at the suspended beams. Instead, larger temperature gradient can be seen at the bottom of paddle part. The center of paddle part becomes about 5~2$0^{\circ}C$ higher than the corner of paddle and suspended beam edges.

• Journal of Sensor Science and Technology
• /
• v.22 no.3
• /
• pp.191-196
• /
• 2013

A particulate matter sensor fabricated by MEMS process is proposed. It is developed to accommodate Euro6 on-board diagnostics regulation for diesel automobile. In the regulation, emission of diesel particulate matter is restricted to 9 mg/km. Particulate matter sensor is designed to use induced charges by charged particulate matter. To increase sensitivity of the sensor, groove is formed on sensor surface because wider surface area generates more induced charges. Sensitivity of the sensor is measured 10.6 mV/(mg/km) and the sensor shows good linearity up to 15.7 mg/km. Also its minimum detectable range is about 0.25 mg/km. It is suitable to detect failure of a diesel particulate filter which should filter particulate matter more than 9 mg/km. For removing accumulated particulate matter on the sensor which can disturb normal operation, platinum heater is designed on the backside of the sensor. The developed sensor can sense very low amount of particulate matter from exhaust gas in real-time with good linearity.