• Title/Summary/Keyword: MEMS 센서

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Design of ICT based Protected Horticulture for Recovering Natural Disaster (ICT기반 시설원예 재해 경감장치 설계)

  • Lee, Meong-Hun;Yoe, Hyun
    • Asia-pacific Journal of Multimedia Services Convergent with Art, Humanities, and Sociology
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    • v.6 no.10
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    • pp.373-382
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    • 2016
  • Under the Agricultural technology is influenced from climate that is requisite of seasonal. So this system will cover the problems and develop the agricultural industry as well. So far, the agricultural industry is developing however, it has the points of the weakness because of natural disasters such as wind risk and heavy snow. This paper designs system to change vinyl on the greenhouse. This is a preliminary study for the real-time feedback control of greenhouse. The study developed a wireless IoT sensor system based on authentic technology capacities, to integrate with the protected horticulture Management System. These system was used to evaluate the levels of the snow cover and wind through IoT devices. The existing greenhouse uses the warm water to clear snow or to change methods. This system will recover by changing the vinyl which is covered outside of the greenhouse. The points of the system is changing vinyl to spin pipe. It is contained extra vinyl. The effects of this system are minimized labor protected crops from natural disasters. For this purpose, the study first developed a wireless IoT sensor unit that integrates an MEMS device and wireless communication module. Also, the study developed an operating program that enables real-time response measurement. It will help operational and maintenance greenhouse as a result.

Improved Vapor Recognition in Electronic Nose (E-Nose) System by Using the Time-Profile of Sensor Array Response (센서 응답의 Time-Profile 을 이용한 전자 후각 (E-Nose) 시스템의 Vapor 인식 성능 향상)

  • Yoon Seok, Yang
    • Journal of Biomedical Engineering Research
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    • v.25 no.5
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    • pp.329-334
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    • 2004
  • The electronic nose (E-nose) recently finds its applications in medical diagnosis, specifically on detection of diabetes, pulmonary or gastrointestinal problem, or infections by examining odors in the breath or tissues with its odor characterizing ability. The odor recognition performance of E-nose can be improved by manipulating the sensor array responses of vapors in time-profile forms. The different chemical interactions between the sensor materials and the volatile organic compounds (VOC's) leave unique marks in the signal profiles giving more information than collection of the conventional piecemal features, i.e., maximum sensitivity, signal slopes, rising time. In this study, to use them in vapor recognition task conveniently, a novel time-profile method was proposed, which is adopted from digital image pattern matching. The degrees of matching between 8 different vapors were evaluated by using the proposed method. The test vapors are measured by the silicon-based gas sensor array with 16 CB-polymer composites installed in membrane structure. The results by the proposed method showed clear discrimination of vapor species than by the conventional method.

Development of hyperspectral image-based detection module for internal defect inspection of 3D-IC semiconductor module (3D-IC 반도체 모듈의 내부결함 검사를 위한 초분광 영상기반 검출모듈 개발)

  • Hong, Suk-Ju;Lee, Ah-Yeong;Kim, Ghiseok
    • Proceedings of the Korean Society for Agricultural Machinery Conference
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    • 2017.04a
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    • pp.146-146
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    • 2017
  • 현대의 스마트폰 및 태블릿pc등을 가능하게 만든 집적 기술 중의 하나는 3차원 집적 회로(3D-IC)와 같은 패키징 기술이다. 이러한 첨단 3차원 집적 기술은 메모리집적을 통한 대용량 메모리 모듈 개발뿐만 아니라, 메모리와 프로세서의 집적, high-end FPGA, Back side imaging (BSI) 센서 모듈, MEMS 센서와 ASIC 집적, High Bright (HB) LED 모듈 등에 적용되고 있다. 3D-IC의 3차원 모듈 제작 시에는 기존에 발생하지 않았던 여러 가지 파괴 모드들이 발생하고 있는데 Thermal/Photonic Emission 장비 등 기존의 2차원 결함분리 (Fault Isolation) 기술로는 첨단의 3차원 적층 제품들에서 발생하는 불량을 비파괴적으로 혹은 3차원적으로 분리하는 것이 불가능하므로, 비파괴 3차원 결함 분리 기술은 향후 선행 제품 적기 개발에 매우 필수적인 기술이다. 본 연구는 3D-IC 반도체의 비파괴적 내부결함 검사를 위하여 가시광선-근적외선 대역(351nm~1770nm)의 InGaAs (Indium Galium Arsenide) 계열 영상검출기 (imaging detector)를 사용하여 분광 시스템 광학 설계를 통한 초분광 영상 기반 검출 모듈을 제작하였다. 제작된 초분광 영상 기반 검출 모듈을 이용하여 구리 회로 위에 실리콘 웨이퍼가 3단 적층 된 반도체 더미 샘플의 초분광 영상을 촬영하였으며, 촬영된 초분광 영상에 대하여 Chemometrics model 기반의 분석기술을 적용하여 실리콘 웨이퍼 내부의 집적 구조에 대한 검사가 가능함을 확인하였다.

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A study on pre-bonding of Si wafer direct bonding at HF pre-treatment (HF 전처리시 Si기판 직접접합의 초기접합에 관한 연구)

  • Chung, Gwiy-Sang;Kang, Kyung-Doo
    • Journal of Sensor Science and Technology
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    • v.9 no.2
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    • pp.134-140
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    • 2000
  • Si wafer direct bonding(SDB) technology is very attractive for both Si-on-insulator(SOI) electronic devices and MEMS applications. This paper presents on pre-bonding according to HF pre-treatment conditions in Si wafer direct bonding. The characteristics of bonded sample were measured under different bonding conditions of HF concentration and applied pressure. The bonding strength was evaluated by tensile strength method. A bond characteristic on the interface was analyzed by using FT-IR, and surface roughness according to HF concentration was analyzed by AFM. Si-F bonds on Si surface after HF pre-treatment are replaced by Si-OH during a DI water rinse. Consequently, hydrophobic wafer was bonded by hydrogen bonding of Si-OH$\cdots$(HOH$\cdots$HOH$\cdots$HOH)$\cdots$OH-Si. The pre-bonding strength depends on the HF pre-treatment condition before pre-bonding. (Min : $2.4kgf/cm^2{\sim}$Max : $14.9kgf/cm^2$)

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Fabrication and Evaluation of the SnO2 Based Gas Sensor for CO and NOx Detection (SnO2를 이용한 CO 및 NOx 가스 감지 센서 제작 및 특성 연구)

  • Kim, Man Jae;Lee, Yu-Jin;Ahn, Hyo-Jin;Lee, Sang Hoon
    • Transactions of the Korean Society of Automotive Engineers
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    • v.23 no.5
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    • pp.515-523
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    • 2015
  • In this paper, we fabricated and evaluated the gas sensor for the detection of CO gas and $NO_X$ gas among the vehicle exhaust emission gasses. The $SnO_2$ (tin dioxide) layer is used as the detection material, and the thin-film type and the nano-fiber type layers are deposited with various thicknesses using sputtering method and electro spinning method, respectively. The experiments are performed in the chamber where the gas concentration is controlled with mass flow controller. The fabricated devices are applied to the CO and $NO_X$ gas, where the device with the thinner $SnO_2$ layer shows better sensitivity. The nano-fiber has the larger surface area, and the shorter response time and recovery time are obtained. From the experimental results, both types of gas sensors successfully detect CO and $NO_X$ gases, which can be applied to measure those gases from the vehicle emissions.

Performance Comparison of Thermal Imagers with Uncooled and Cooled Detectors For Fire Fighting Application (비냉각형 적외선 센서를 이용한 열상시스템과 냉각형 적외선 센서를 이용한 열상시스템의 화재 진압 시 성능 비교)

  • Kim, Byung-Hyuk;Jung, Han;Kim, Young-Ho
    • Journal of Institute of Control, Robotics and Systems
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    • v.13 no.2
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    • pp.128-132
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    • 2007
  • Thermal Imaging systems are reported to be crucial for fire fighting and beginning to be used by fire fighters. The performance of thermal imaging system is determined by both the radiation of infrared from the target and the attenuation of infrared signal in the optical path by the absorption, scattering, diffraction and reflection. In the scene of fire, water drops with various sizes such as vaporized water, wafer mist from sprinkler, and wafer to suppress the fire reside with various gas generated by burning. To measure the transmission of infrared radiation in the scene of fire, fire simulating system and thermal imagers with cooled detector which detects $3{\sim}5{\mu}m$ infrared and uncooled detector fabricated by the MEMS technology which detects $8{\sim}12{\mu}m$ infrared. are made. With thermal imagers and Ire simulating system, the change of thermal image with respect to the change of visibility controlled with the burned fas was measured. It was found that the transmission of infrared was not reduced by the burned gas, which could be explained by the long wavelength of infrared ray compared with visible ray. However, the transmission of infrared ray was largely reduced by the combination of burned gas and water mist supplied by sprinkler. This is contrary to the results of calculated transmission through the pure water mist and shows that the transmission of infrared ray is mostly affected by the compounds of water mist and burned gas. In this case, it was found that the uncooled detector which detects $8{\sim}12{\mu}m$ infrared ray is better than cooled detector which detects $3{\sim}5{\mu}m$ infrared ray for fire fighting.

A Physical Cochlear Model for Transducer Performance Evaluation of Implantable Hearing Aid with Round Window Driver (정원창 구동기의 진동체 성능 평가를 위한 내이 물리모델)

  • Shin, Dong Ho;Lim, Hyung Gyu;Jung, Eui Sung;Seong, Ki Woong;Lee, Jyung Hyun;Cho, Jin Ho
    • Journal of Sensor Science and Technology
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    • v.22 no.2
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    • pp.150-155
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    • 2013
  • Recently, various hearing aids are developed to overcome hearing loss. There are available hearing aids, such as air conduction hearing aid, implantable middle ear hearing aid and so on. But air conduction hearing aid is inconvenience caused by howling, and ossicle chain driving type implantable middle ear hearing aid has some week point due to problem of possible nercobiosis of coupling spot along incus long process. In recent years, in order to improve these shortcomings round window (RW) driving hearing aid has been paying attention. In this paper, the physical cochlear model is proposed for a performance evaluation of the RW driving hearing aids of a transducer. In order to verify an experiment proposed on a performance of physical cochlear model, the transducer which has ossicles characteristics is used. By measuring and comparing the frequency characteristics of transducer with ossicles and human temporal bone, performance of physical cochlear model was verified. As from the result of experiment, it is expected that an implemented cochlear model is useful for evaluating characteristics of RW transducer.

Fabrication of Nickel Oxide Film Microbolometer Using Amorphous Silicon Sacrificial Layer (비정질 실리콘 희생층을 이용한 니켈산화막 볼로미터 제작)

  • Kim, Ji-Hyun;Bang, Jin-Bae;Lee, Jung-Hee;Lee, Yong Soo
    • Journal of Sensor Science and Technology
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    • v.24 no.6
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    • pp.379-384
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    • 2015
  • An infrared image sensor is a core device in a thermal imaging system. The fabrication method of a focal plane array (FPA) is a key technology for a high resolution infrared image sensor. Each pixels in the FPA have $Si_3N_4/SiO_2$ membranes including legs to deposit bolometric materials and electrodes on Si readout circuits (ROIC). Instead of polyimide used to form a sacrificial layer, the feasibility of an amorphous silicon (${\alpha}-Si$) was verified experimentally in a $8{\times}8$ micro-bolometer array with a $50{\mu}m$ pitch. The elimination of the polyimide sacrificial layer hardened by a following plasma assisted deposition process is sometimes far from perfect, and thus requires longer plasma ashing times leading to the deformation of the membrane and leg. Since the amorphous Si could be removed in $XeF_2$ gas at room temperature, however, the fabricated micro-bolomertic structure was not damaged seriously. A radio frequency (RF) sputtered nickel oxide film was grown on a $Si_3N_4/SiO_2$ membrane fabricated using a low stress silicon nitride (LSSiN) technology with a LPCVD system. The deformation of the membrane was effectively reduced by a combining the ${\alpha}-Si$ and LSSiN process for a nickel oxide micro-bolometer.

Performance Evaluation of Smart Accelerometers for Structural Health Monitoring (구조 건전성 감시를 위한 스마트 가속도계의 성능 평가)

  • Yi, Jin-Hak;O, Hye-Sun;Yun, Chung-Bang
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.26 no.4A
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    • pp.605-609
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    • 2006
  • In this study, two kinds of smart accelerometers are investigated for the application of smart sensors to the structural health monitoring of infrastructures. Smart optical Fiber Bragg Grating (FBG) type and Micro-Electo-Mechanical System (MEMS) type accelerometers are selected for this study and the high sensitive ICP type accelerometer is used for the reference sensor. Small size shaking table tests were performed with 3-story shear building model using random input ground motions. The output only modal identification was carried out using stochastic subspace identification and the performances of sensors are compared in modal domain indirectly. The modal sensitivity method was applied to update the story stiffness of numerical model and the updated results were verified using the additional experiments for the same structure with additional mass.

Development and Application of Three-axis Motion Rate Table for Efficient Calibration of Accelerometer and Gyroscope (효율적인 각/가속도 센서 오차 보상을 위한 3 축 각도 측정 장치의 개발 및 활용)

  • Kwak, Hwan-Joo;Hwang, Jung-Moon;Kim, Jung-Han;Park, Gwi-Tae
    • Journal of Institute of Control, Robotics and Systems
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    • v.18 no.7
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    • pp.632-637
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    • 2012
  • This paper introduces a simple and efficient calibration method for three-axis accelerometers and three-axis gyroscopes using three-axis motion rate table. Usually, the performance of low cost MEMS-based inertial sensors is affected by scale and bias errors significantly. The calibration of these errors is a bothersome problem, but the previous calibration methods cannot propose simple and efficient method to calibrate the errors of three-axis inertial sensors. This paper introduces a new simple and efficient method for the calibration of accelerometer and gyroscope. By using a three-axis motion rate table, this method can calibrate the accelerometer and gyroscope simultaneously and simply. Experimental results confirm the performance of the proposed method.