• Korean Journal of Materials Research
• /
• v.24 no.10
• /
• pp.532-537
• /
• 2014

In this study, highly sensitive hydrogen micro gas sensors of the multi-layer and micro-heater type were designed and fabricated using the micro electro mechanical system (MEMS) process and palladium catalytic metal. The dimensions of the fabricated hydrogen gas sensor were about $5mm{\times}4mm$ and the sensing layer of palladium metal was deposited in the middle of the device. The sensing palladium films were modified to be nano-honeycomb and nano-hemisphere structures using an anodic aluminum oxide (AAO) template and nano-sized polystyrene beads, respectively. The sensitivities (Rs), which are the ratio of the relative resistance were significantly improved and reached levels of 0.783% and 1.045 % with 2,000 ppm H2 at $70^{\circ}C$ for nano-honeycomb and nano-hemisphere structured Pd films, respectively, on the other hand, the sensitivity was 0.638% for the plain Pd thin film. The improvement of sensitivities for the nano-honeycomb and nano-hemisphere structured Pd films with respect to the plain Pd-thin film was thought to be due to the nanoporous surface topographies of AAO and nano-sized polystyrene beads.

• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.55 no.11
• /
• pp.544-547
• /
• 2006

In this paper, we present a temperature-controlled system for MEMS electrical resistance heaters without a temperature sensor. To rapidly control the heater temperature, the microheater system developed consists of a power supply, power amplifier, digital ${\underline{P}}roportional-{\underline{I}}ntegral-{\underline{D}}ifferential$ (PID) controller, and a quarter bridge circuit with the microheater and three resistors are nominally balanced. The microheaters are calibrated inside a convection oven to obtain the temperature coefficient with a linear or quadratic fit. A voltage amplifier applies the supply voltage proportional to the control signal from the PID controller. Small changes in heater resistance generate a finite voltage across the quarter bridge circuit, which is fed back to the PID controller to compare with the set-point and to generate the control signal. Two MEMS microheaters are used for evaluating the developed control system - a NiCr serpentine microheater for a preconcentrator and a Nickel microheater for ${\underline{P}}olymerase\;{\underline{C}}hain\;{\underline{R}}eaction$ (PCR) chip.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.1537-1540
• /
• 2003

MEMS technology with micro scale is complete system utilized as the sensor. micro electro device. The metallization of MEMS is very important to transfer the power operating the sensor and signal induced from sensor part. But in the MEMS structures local stress concentration and deformation is often happened by geometrical shape and different constraint on the metallization. Therefore. this paper studies the effect of supporting type and thickness ratio about thin film thickness of the substrate thickness for the residual stress variation caused by thermal load in the multi-layer thin film. Specimens were made from materials such as Al, Au and Cu and uniform thermal load was applied, repeatedly. The residual stress was measured by FEA and nano-indentation using AFM. Generally, the specimen made of Al induced the large residual stress and the 1st layer made of Al reduced the residual stress about half percent than 2nd layer. Specimen made of Cu and Au being the lower thermal expansion coefficient induce the minimum residual stress. Similarly the lowest indentation length was measured in the Au_Cu specimen by nano-indentation.

• Journal of Korean Association for Spatial Structures
• /
• v.18 no.3
• /
• pp.67-74
• /
• 2018

Recently, measuring instruments for SHM of structures has been developed. In general, the wireless transmission of sensor signals, compared to its wired counterpart, is preferable due to the absence of triboelectric noise and elimination of the requirement of a cumbersome cable. However, in extreme environments, the sensor may be less sensitive to temperature changes and to the distance between the sensor and data logger. This may compromise on the performance of the sensor and instrumentation. Therefore, in this paper, free vibration experiments were conducted using wireless MEMS sensors at an actual site. Measurement was assessed in time and frequency domain by changing the temperature variation at($-8^{\circ}C$, $-12^{\circ}C$ and $-16^{\circ}C$) and the communication distance (20m, 40m, 60m, 80m).

• Journal of KIISE:Computing Practices and Letters
• /
• v.13 no.7
• /
• pp.433-441
• /
• 2007

The bio-Sensors, which are sensing the vital signs of human bodies, are largely used by the medical equipment. Recently, the sensor network technology, which composes of the sensor interface for small-seize hardware, processor, the wireless communication module and battery in small sized hardware, has been extended to the area of bio-senor network systems due to the advances of the MEMS technology. In this paper we have suggested a design and implementation of a health care information system(called u-EMS) using a bio-sensor network technology that is a combination of the bio-sensor and the sensor network technology. In proposed system, we have used the following vital body sensors such as EKG sensor, the blood pressure sensor, the heart rate sensor, the pulse oximeter sensor and the glucose sensor. We have collected various vital sign data through the sensor network module and processed the data to implement a health care measurement system. Such measured data can be displayed by the wireless terminal(PDA, Cell phone) and the digital-frame display device. Finally, we have conducted a series of tests which considered both patient's vital sign and context-awared information in order to improve the effectiveness of the u-EMS.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
• /
• v.19 no.1
• /
• pp.61-70
• /
• 2008

This paper presents the flexible MEMS transmitter based on flexible printed circuit board or FPCB, which can be transformed to arbitrary shape. The FPCB is suitable to fabricate light weight and small size modules with the help of its thin thickness. Moreover a module based on FPCB can be attached on the arbitrary curved surface due to its flexible enough to be lolled up like paper. In this paper, the flexible MEMS transmitter integrated on FPCB for a short-distance sensor network which is based on orthogonal frequency division multiplexing(OFDM) communication system is proposed. The active device of the proposed flexible MEMS transmitter is fabricated on InGaP/GaAs HBT process which has been used for power amplifier design to take advantages of high linear and high efficient characteristics. Moreover, the passive devices such as the filter and signal lines are integrated and fabricated on the FPCB board. The performance of the fabricated flexible MEMS transmitter is analyzed with EVM characteristics of the output signal.

• Journal of Sensor Science and Technology
• /
• v.14 no.2
• /
• pp.69-77
• /
• 2005

The electronic nose (e-nose) has been used in food industry and quality controls in plastic packaging. Recently it finds its applications in medical diagnosis, specifically on detection of diabetes, pulmonary or gastrointestinal problem, or infections by examining odors in the breath or tissues with its odor characterizing ability. Moreover, the use of portable e-nose enables the on-site measurements and analysis of vapors without extra gas-sampling units. This is expected to widen the application of the e-nose in various fields including point-of-care-test or e-health. In this study, a PDA-based portable e-nose was developed using micro-machined gas sensor array and miniaturized electronic interfaces. The rich capacities of the PDA in its computing power and various interfaces are expected to provide the rapid and application specific development of the diagnostic devices, and easy connection to other facilities through information technology (IT) infra. For performance verification of the developed portable e-nose system, Six different vapors were measured using the system. Seven different carbon-black polymer composites were used for the sensor array. The results showed the reproducibility of the measured data and the distinguishable patterns between the vapor species. Additionally, the application of two typical pattern recognition algorithms verified the possibility of the automatic vapor recognition from the portable measurements. These validated the portable e-nose based on PDA developed in this study.

• Proceedings of the Korean Information Science Society Conference
• /
• 2005.11a
• /
• pp.451-453
• /
• 2005

유비쿼터스 센서네트워크는 저 전력 무선통신, 초소형 마이크로프로세서, Ad-Hoc네트워크, MEMS등 다양한 종류의 센서들과 임베디드 시스템의 기술 발전을 기반으로 모든 사물에 컴퓨팅 능력 및 무선통신 능력을 부여하여 "언제", "어디서나" "어느 것"과도 사물들끼리의 통신이 가능한 환경을 구현하는 것이다. 이러한 무선센서네트워크의 응용 분야는 산업 전반에서 일상생활에 이르기 까지 수많은 분야에 응용되어지며, 군사용. 교통, 환경 감시, 의료분야, 홈 네트워크, 빌딩 제어 등 다양한 분야에 응용될 수 있다. 이에 본 논문에서는 무선 센서네트워크 노드인 MicaZ와 자기센서를 이용하여 자기장을 감지하고, 얻어진 데이터를 MS-SQL 데이터베이스에 저장하고 저장된 데이터를 이용하여 자성체의 이동경로 추적 및 위치제어에 관하여 연구하였다.

• 한국방재학회:학술대회논문집
• /
• 2010.02a
• /
• pp.77.1-77.1
• /
• 2010

본 연구에서는 가속도기반 무선센서노드와 MEMS 가속도계 센서를 이용하여 철도교량의 구조건전성모니터링 기법들의 성능을 검토하였다. 이를 위해 다음과 같은 세 단계의 연구가 수행되었다. 첫째, 저가형 가속도기반 무선센서노드를 설계하였다. 둘째, 철도교량의 구조건전성모니터링을 위한 진동특성 및 건전성평가기법을 선정하였다. 마지막으로, 모형 강판형교에 대한 진동실험을 통해 개발된 가속도기반 무선센서노드의 성능을 평가하고 일련의 손상 시나리오를 대상으로 건전성평가 기법의 성능을 검토하였다. 시간영역 기법인 AR 모델과 주파수영역 기법인 파워스펙트럼 상관계수가 강판형교 구조손상 모니터링에 높은 정확도를 보였다.

• Proceedings of the Korean Information Science Society Conference
• /
• 2004.10c
• /
• pp.238-240
• /
• 2004

인간과 컴퓨터와 사물이 유기적으로 연계되어 다양하고 편리한 새로운 서비스를 제공해 주는 유비쿼터스 컴퓨팅 환경에서, 외부 환경의 감지와 제어 기능을 수행하는 센서 네트워크 기술이 최근 활발히 연구가 되고 있다. 이러한 센서 네트워크 기술은 저전력 저가격의 무선 통신 기술, 초소형 마이크로 프로세서 기술, 자동구성 이 가능한 ad-hoc 네트워크 기술, MEMS기술, 다양한 종류의 센서들과 이들의 표준화 노력, 그리고 임베디드 시스템 기술등의 발전으로 실현이 가능한 기술로서 평가되고 있다. 본 논문에서는 무선 센서 노드인 MICA2[1]와 자기장센서 HMC1002[2]를 이용하여 자기장의 변동을 감지하여 자성체의 위치를 파악하는 시스템의 설계 및 구현을 다룬다.