• Journal of Sensor Science and Technology
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• v.27 no.3
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• pp.170-174
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• 2018

In this paper, the $TiO_2$/glucose oxidase (GOD) mixture has synthesized through simple and low-cost fabrication methods. The physical properties of the mixture were proved using an FT-IR/NIR spectrometer, an X-Ray diffractometer, and a Raman spectrometer. GOD maintained its bioactivity during all fabrication process. The current characteristics of the glucose biosensor were proportional to the glucose concentration and effective surface area of square pyramid on a silicon substrate. The maximum current change was measured in a pH 7.0 buffer solution. The simple and low-cost fabrication process and surface treatment can be used widely in previous research for improvements in effective surface area.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.1704-1705
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• 2011

MEMS(Micro Electro Mechanical Systems) 기술과 니켈 전기도금공정을 이용하여 수십 내지 수백개의 탐침을 갖는 일체형 탐침 패드(Probe Pad)를 제작하였다. PI(Polyimide) Film은 일본 UBE사의 $50{\mu}m$ 두께를 갖는 유피렉스를 사용하였다. 일체형 탐침 패드는 Polyimide Film에 Cu를 증착 후 사진식각공정을 통하여 PR Mold 형성한 후 전류가 흐르는 Cu 라인(line) 배선을 형성하기 위해 Cu를 식각하였으며 형성된 Cu Line 위에 니켈 전해도금공정을 실시하여 니켈 배선을 형성하였다. Ni 배선 위에 니켈 범프를 형성하기 위하여 PR Strip을 실시한 후 다시 PR Mold를 형성하였다. PR Mold 형성 후 다시 니켈 전해도 금을 실시하여 니켈 범프(bump)를 형성하였다. 제작된 탐침패드의 니켈배선의 폭은 $18.0{\mu}m$이고 피치(Pitch)는 $35{\mu}m$이며, 니켈 범프의 두께(Thickness)는 $10.0{\mu}m$로 제작되었다. 본 연구에서 제작된 탐침패드를 더욱 더 고집적화(Fine Pitch)하여 일체형 탐침 패드를 제작하게 되면 이를 사용하는 프로브유니트의 제작에 있어서 비용 절감 및 생산성(Throughput)을 크게 향상 시킬 수 있을 것이다.

• Journal of Sensor Science and Technology
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• v.17 no.4
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• pp.250-255
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• 2008

A vanadium pentoxide ($V_2O_5$)-based bolometric infrared (IR) sensor has been designed and fabricated using micro electro mechanical systems (MEMS) technology for glucose detection and its resistive characteristics has been illustrated. The proposed bolometric infrared sensor is composed of the vanadium pentoxide array that shows superior temperature coefficient of resistance (TCR) and standard silicon micromachining compatibility. In order to achieve the best performance, deposited $V_2O_5$ thin film is optimized by adequate rapid thermal annealing (RTA) process. Annealed vanadium oxide thin film has demonstrated a linear characteristic and relatively high TCR value (${-4}%/^{\circ}C$). The resistance of vanadium oxide is changed by IR intensity based on glucose concentration.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.2
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• pp.125-131
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• 2000

A high resolution Laser Doppler Vibrometer(LDV) developed using electronic fringe counting method. The fringe pattern signal obtained via analog signal processing is divided into two. One was converted to a TTL signal with a ZCD(zero-crossing detector) and then counted to calculate the displacement due to the vibration. The other was directed to the A/D converter to get a high resolution of about $\lambda/320$ with the phase comparison method. The data obtained with the A/D converter was used in the displacement calculation and the result was displayed on a LCD pane. In this study, a Laser Doppler Vibrometer with measurement range of $0.32\mum~129\mum$ and displacement resolution of 2nm, about $\lambda/320$ , was developed. And this LDV can be used to measure the dynamic of microsize devices such as MEMS(Micro Electro-Mechanical Systems) and to diagnose high capacity electric equipment such as circuit breakers and transformers, of which resonant frequencies are changed when they are damaged.

• Journal of the Korea Institute of Military Science and Technology
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• v.12 no.1
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• pp.106-113
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• 2009

This paper presents a surface acoustic wave(SAW) micro-electro-mechanical-systems(MEMS) interdigital transducer (IDT) gyroscope with 80MHz central frequency on a $128^{\circ}\;YX\;LiNbO_3$, which is consisted of a two-port SAW resonator, metallic dots and dual delay lines for the sensor and reference oscillators. Reason for using two delay line oscillators is to extract the gyroscope effect by comparing the resonant frequencies between two oscillators and to compensate the temperature effect. Based on the coupling of modes(COM) simulation, an 80MHz two ports SAW resonator and dual delay line were fabricated and characterized by the network analyzer. Obtained sensitivity was $109Hz/deg{\cdot}s^{-1}$ in the angular rate range of $0{\sim}1000deg/s$. Good Linearity and superior directivity were observed.

• Journal of Sensor Science and Technology
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• v.32 no.6
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• pp.470-474
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• 2023

In this study, a diaphragm-type pressure sensor was developed using multi-layer(four-layer) graphene produced at 1 nm thickness by thermally transferring single-layer graphene produced by chemical vapor deposition (CVD) to a 6" silicon wafer. By measuring the gauge factor, we investigated whether it was possible to produce a pressure sensor of consistent quality. As a result of the measurement, the pressure sensor using multilayer graphene showed linearity and had a gauge factor of about 17.5. The gauge factor of the multilayer graphene-based pressure sensor produced through this study is lower than that of doped silicon, but is more sensitive than a general metal sensor, showing that it can be sufficiently used as a commercialized sensor.

• Spatial Information Research
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• v.19 no.5
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• pp.87-96
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• 2011

Recently mobile users can access to internet using smart phone at any place and any time, through which they can search and share information. In addition, as the sensors with high-tech functions become cheaper and miniaturized along with the development of MEMS (micro-electo mechanical systems) technology, the extent to utilize smart phone is increasing. Smart phone is equipped with various sensors such as high-resolution camera, GPS, gyroscope and magnetic sensor, which is an appropriate system configuration for remote monitoring research using camera. The remote monitoring system requires camera for video and internet network to send video, for which it has a limitation that it is influenced by the monitoring location. This study is aimed to design and develop the monitoring app. which can be remotely monitored using smart phone technology. The developed monitoring app was designed to take images of ROI (region of interest) within the specified time and to automatically send the images to the server. The developed app. is also possible to be remotely controlled by SMS (short message service). The monitoring proposed in this study can take high-resolution images using CMOS built in the smart phone and send the images and information to the server automatically at any place and any time using 3G and Wi-Fi networks.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.15 no.12
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• pp.2563-2567
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• 2011

Advances in smart sensors, embedded systems, low-power design, ad-hoc networks and MEMS have allowed the development of low-cost small sensor nodes with computation and wireless communication capabilities that can form distributed wireless sensor networks. Time information and time synchronization are fundamental building blocks in wireless sensor networks since many sensor network applications need time information for object tracking, consistent state updates, duplicate detection and temporal order delivery. Various time synchronization protocols have been proposed for sensor networks because of the characteristics of sensor networks which have limited computing power and resources. However, none of these protocols have been designed with time representation scheme in mind. Global time format such as UTC TOD (Universal Time Coordinated, Time Of Day) is very useful in sensor network applications. In this paper we propose network time protocol extension for global time presentation in wireless sensor networks.

• Journal of Korean Association for Spatial Structures
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• v.19 no.1
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• pp.117-126
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• 2019

Micro-Electro-Mechanical Systems (MEMS) sensors have been widely used in Structural Health Monitoring due to their convenience and lower costs in comparison to conventional sensors. Triggered measurements are relevant in events such as earthquakes because unlike continuous measurements, they only record the structural response once an event happens. This is more cost effective and it makes the data more manageable because only the required measurements from the event are recorded. The most common method of triggering is amplitude triggering. However, lower input amplitudes (less than 0.1g) cannot be triggered by using this method. In this paper, sound triggering was introduced to allow triggered measurements for lower input amplitude values. The performance of the sound triggering and amplitude triggering were compared by a series of shaking-table tests. It was seen that sound-triggering method has a wider frequency (0.5~10Hz) and amplitude (0.01~1.0g) range of measurements. In addition, the sound triggering method performs better than the amplitude triggering method at lower amplitudes. The performance of the amplitude triggering, in terms of the triggering being simultaneous improves at higher input amplitudes.

• Korean Chemical Engineering Research
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• v.44 no.5
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• pp.513-519
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• 2006

We developed two kinds of the microchip for application to electrophoresis based on both glass and quartz employing the MEMS fabrications. The poly-Si layer deposited onto the bonding interface apart from channel regions can play a role as the optical slit cutting off the stray light in order to concentrate the UV ray, from which it is possible to improve the signal-to-noise (S/N) ratio of the detection on a chip. In the glass chip, the deposited poly-Si layer had an important function of the etch mask and provided the bonding surface properly enabling the anodic bonding. The glass wafer including more impurities than quartz one results in the higher surface roughness of the channel wall, which affects subsequently on the microflow behavior of the sample solutions. In order to solve this problem, we prepared here the mixed etchant consisting HF and $NH_4F$ solutions, by which the surface roughness was reduced. Both the shape and the dimension of each channel were observed, and the electroosmotic flow velocities were measured as 0.5 mm/s for quartz and 0.36 mm/s for glass channel by implementing the microchip electrophoresis. Applying the optical slit with poly-Si layer provides that the S/N ratio of the peak is increased as ca. 2 times for quartz chip and ca. 3 times for glass chip. The maximum UV absorbance is also enhanced with ca. 1.6 and 1.7 times, respectively.