• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.4
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• pp.261-268
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• 1999

Laser-induced thermochemical etching has been recognized as a new powerful method for processing a variety of materials, including metals, semiconductors, ceramics, insulators and polymers. This study presents characteristics of direct etching for Si substrate using focused argon ion laser beam in aqueous KOH and $CCl_2F_2$ gas. In order to determine process conditions, we first theoretically investigated the temperature characteristics induced by a CW laser beam with a gaussian intensity distribution on a silicon surface. Major process parameters are laser beam power, beam scan speed and reaction material. We have achieved a very high etch rate up to $434.7\mum/sec$ and a high aspect ratio of about 6. Potential applications of this laser beam etching include prototyping of micro-structures of MEMS(micro electro mechanical systems), repair of devices, and isolation of opto-electric devices.

• Journal of Information Processing Systems
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• v.1 no.1 s.1
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• pp.49-54
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• 2005

With the recent advances in Micro Electro Mechanical System (MEMS) technology, low cost and low power consumption wireless micro sensor nodes have become available. However, energy-efficient routing is one of the most important key technologies in wireless sensor networks as sensor nodes are highly energy-constrained. Therefore, many researchers have proposed routing protocols for sensor networks, especially cluster-based routing protocols, which have many advantages such as reduced control messages, bandwidth re-usability, and improved power control. Some protocols use information on the locations of sensor nodes to construct clusters efficiently. However, it is rare that all sensor nodes know their positions. In this article, we propose another cluster-based routing protocol for sensor networks. This protocol does not use information concerning the locations of sensor nodes, but uses the remaining energy of sensor networks and the desirable number of cluster heads according to the circumstances of the sensor networks. From performance simulation, we found that the proposed protocol shows better performance than the low-energy adaptive clustering hierarchy (LEACH).

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.6 no.11
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• pp.2901-2919
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• 2012

Recent research in MEMS (Micro-Electro-Mechanical Systems) and wireless communication has enabled tracking of continuous objects, including fires, nuclear explosions and bio-chemical material diffusions. This paper proposes an energy-efficient scheme that detects and tracks different dynamic shapes of a continuous object (i.e., the inner and outer boundaries of a continuous object). EBCO (Efficient Boundary detection and tracking of Continuous Objects in WSNs) exploits the sensing capabilities of sensor nodes by automatically adjusting the sensing range to be either a boundary sensor node or not, instead of communicating to its neighboring sensor nodes because radio communication consumes more energy than adjusting the sensing range. The proposed scheme not only increases the tracking accuracy by choosing the bordering boundary sensor nodes on the phenomenon edge, but it also minimizes the power consumption by having little communication among sensor nodes. The simulation result shows that our proposed scheme minimizes the energy consumption and achieves more precise tracking results than existing approaches.

• Smart Structures and Systems
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• v.6 no.5_6
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• pp.641-659
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• 2010

Structural Health Monitoring (SHM) gradually becomes a technique for ensuring the health and safety of civil infrastructures and is also an important approach for the research of the damage accumulation and disaster evolving characteristics of civil infrastructures. It is attracting prodigious research interests and the active development interests of scientists and engineers because a great number of civil infrastructures are planned and built every year in mainland China. In a SHM system the sheer number of accompanying wires, fiber optic cables, and other physical transmission medium is usually prohibitive, particularly for such structures as offshore platforms and long-span structures. Fortunately, with recent advances in technologies in sensing, wireless communication, and micro electro mechanical systems (MEMS), wireless sensor technique has been developing rapidly and is being used gradually in the SHM of civil engineering structures. In this paper, some recent advances in the research, development, and implementation of wireless sensors for the SHM of civil infrastructures in mainland China, especially in Dalian University of Technology (DUT) and Harbin Institute of Technology (HIT), are introduced. Firstly, a kind of wireless digital acceleration sensors for structural global monitoring is designed and validated in an offshore structure model. Secondly, wireless inclination sensor systems based on Frequency-hopping techniques are developed and applied successfully to swing monitoring of large-scale hook structures. Thirdly, wireless acquisition systems integrating with different sensing materials, such as Polyvinylidene Fluoride(PVDF), strain gauge, piezoresistive stress/strain sensors fabricated by using the nickel powder-filled cement-based composite, are proposed for structural local monitoring, and validating the characteristics of the above materials. Finally, solutions to the key problem of finite energy for wireless sensors networks are discussed, with future works also being introduced, for example, the wireless sensor networks powered by corrosion signal for corrosion monitoring and rapid diagnosis for large structures.

• Journal of Advanced Navigation Technology
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• v.25 no.1
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• pp.68-77
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• 2021

In this paper, a GPS/MEMS IMU integrated navigation receiver module capable of operating in a high dynamic environment is designed and fabricated, and the results is confirmed. The designed module is composed of RF receiver unit, inertial measurement unit, signal processing unit, correlator, and navigation S/W. The RF receiver performs the functions of low noise amplification, frequency conversion, filtering, and automatic gain control. The inertial measurement unit collects measurement data from a MEMS class IMU applied with a 3-axis gyroscope, accelerometer, and geomagnetic sensor. In addition, it provides an interface to transmit to the navigation S/W. The signal processing unit and the correlator is implemented with FPGA logic to perform filtering and corrrelation value calculation. Navigation S/W is implemented using the internal CPU of the FPGA. The size of the manufactured module is 95.0×85.0×.12.5mm, the weight is 110g, and the navigation accuracy performance within the specification is confirmed in an environment of 1200m/s and acceleration of 10g.

• KIEE International Transactions on Electrophysics and Applications
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• v.5C no.6
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• pp.264-269
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• 2005

The electrostatic comb drive actuator is one of the main building blocks in the field of micro electro-mechanical systems (MEMS). Most of the comb actuators presented previously have fingers that are rectangular in shape which produce a stable, constant force output during actuation. The use of sawtooth fixed fingers in a comb drive, which were presumed to produce an increasing force output with displacement due to the increased number of regions where fringing force, the driving force of comb actuators, appear. The dimensions of the sawtooth were derived from finite element analysis (FEA) of simplified finger models with sawtooth type fingers of various dimension and were compared to the rectangular finger model that showed that the sawtooth type fingers have $7\~9$ times stronger driving force. Finally, comb drive actuators with sawtooth type and rectangular fingers were fabricated and although the gap was bigger, the comb actuator with sawtooth type fingers showed about 1.7 times greater electrostatic force than the one with rectangular fingers at equal driving voltages. In conclusion, using the proposed sawtooth type comb fingers in a comb drive makes it possible to increase its displacement or reduce the driving voltage.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.9
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• pp.104-109
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• 2021

Tactile sensors and integrated circuits that detect external stimuli have been developed for use in various industries. Most tactile sensors have been developed using the MEMS(micro electro-mechanical systems) process in which metal electrodes and strain sensors are applied to a silicon substrate. However, tactile sensors made of highly brittle silicon lack flexibility and are prone to damage by external forces. Flexible tactile sensors based on polydimethylsiloxane and using a multi-walled carbon nano-tube mixture as a pressure-sensitive material are currently being developed as an alternative to overcome these limitations. In this study, a manufacturing process of pressure-sensitive materials with low initial electrical resistance is developed and applied to the fabrication of flexible tactile sensors. In addition, flexible tactile sensors are developed with pressure-sensitive materials dispensed on a substrate with flexible mechanical properties. Finally, a study is conducted on the change in electrical resistance of pressure-sensitive materials according to the modulus of elasticity of the substrate.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.27 no.1
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• pp.61-69
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• 2014

In this paper, we have researched semiconductor optical filters to solve the problem of the high failure rate that are recognize bad of financial account, jam of financial account and the ATM service interruption due to failure of accurate location information among the operation of the ATM (automatic teller machine) systems. A semiconductor optical filters that have high resolution and less diffuse, high transmittance are able to detect the information of financial account surface accurately. Therefore, it is a stable filter that is able to minimize the incidence of disability. In this paper, we drew the determinants by element for implement an excellent semiconductor optical filters. Based on this, we had to be able to implement the semiconductor optical filter that is able to be mounted on the actual ATM system through future studies.

• IEMEK Journal of Embedded Systems and Applications
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• v.17 no.4
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• pp.239-247
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• 2022

The existing studies on the localization in the GNSS (Global Navigation Satellite System) denied environment usually exploit low-cost MEMS IMU (Micro Electro Mechanical Systems Inertial Measurement Unit) sensors to replace the GNSS signals. However, the navigation system still requires GNSS signals for the normal environment. This paper presents an integrated GNSS/INS (Inertial Navigation System) navigation system which combines GNSS and multiple IMU sensors using extended Kalman filter in partially GNSS-denied environments. The position and velocity of the INS and GNSS are used as the inputs to the integrated navigation system. The Mahalanobis distance is used for novelty detection to detect the outlier of GNSS measurements. When the abnormality is detected in GNSS signals, GNSS data is excluded from the fusion process. The performance of the proposed method is evaluated using MATLAB/Simulink. The simulation results show that the proposed algorithm can achieve a higher degree of positioning accuracy in the partially GNSS-denied environment.

• Journal of the Korean earth science society
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• v.34 no.6
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• pp.588-601
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• 2013

In geophysics and geophysical exploration fields, we can use information about inclination and azimuth in various ways. These include borehole deviation logging for inversion process, real-time data acquisition system, geophysical monitoring system, and so on. This type of information is also necessarily used in the directional drilling of shale gas fields. We thus need to develop a subminiature, low-powered, multi-functional inclination and azimuth measurement system for geophysical exploration fields. In this paper, to develop real-time measurement system, we adopt the high performance low power Micro Control Unit (made with state-of-the-art Complementary Metal Oxide Semiconductor technology) and newly released Micro Electro Mechanical Systems Attitude Heading Reference System sensors. We present test results on the development of a multifunctional real-time inclination and azimuth measurement system. The developed system has an ultra-slim body so as to be installed in 42mm sonde. Also, this system allows us to acquire data in real-time and to easily expand its application by synchronizing with a depth encoder or Differential Global Positioning System.