• The Journal of Korean Institute of Information Technology
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• v.16 no.11
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• pp.43-49
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• 2018

Computer simulation was performed using the SIMION program to develop an electron gun for MCP cleaning. The target, MCP, is located 180mm from the source of the electron gun, and the diameter of the MCP is approximately 20mm. Therefore, we tried to find the condition that the beam diameter of electrons reaching the MCP is to be 20mm using four variables such as E, ${\phi}$, d1, d2, where the E is the energy of the electron reaching the MCP, the ${\phi}$ is the diameter of the extractor, and the d1 and the d2 are the distance from the electron source to the end of the extractor tube, and to the wall of chamber, respectively. As a result of simulation, we figuried out that the E and the d2 have little effect on the beam diameter. On the other hand, we also found that the beam diameters were very sensitive to the d1 and varied relatively large with respect to the ${\phi}$, and the d1 was the secondary order function of the ${\phi}$. Therefore we found that this function will allow us to design electron guns that are suitable for the purposes of this study.