• Title/Summary/Keyword: MAMH(Magnetic Assisted Machining Head)

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A Study on the Ultra-Precision Polishing Technique for the Upper Surface of the Micro-Channel Structure (미세채널 구조물 상부의 초정밀 연마 기술 연구)

  • 강정일;이윤호;안병운;윤종학
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2003.10a
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    • pp.313-317
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    • 2003
  • Micro-Channel ultra-precision polishing is a new technology used in magnetic field-assisted relishing. In this paper, an electromagnet or the i18 of test system was designed and manufactured. A size of magnetic abrasive is used on 25~75${\mu}{\textrm}{m}$ and for the polish a micro-channel upper part. A surface of channel which is not even is manufactured using magnetic abrasive finishing at upper surface of micro-channel. As a result, the surface roughness rose by 80% after upper surface of micro- channel was polished up 8 minutes by polishing.

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