• Journal of the Optical Society of Korea
• /
• v.17 no.4
• /
• pp.317-322
• /
• 2013

We have proposed and demonstrated a low numerical aperture technique to measure the depth of through silicon vias (TSVs) using white-light scanning interferometry. The high aspect ratio hole like TSV's was considered to be impossible to measure using conventional optical methods due to low visibility at the bottom of the hole. We assumed that the limitation of the measurement was caused by reflection attenuation in TSVs. A novel interference theory which takes the structural reflection attenuation into consideration was proposed and simulated. As a result, we figured out that the low visibility in the interference signal was caused by the unbalanced light intensity between the object and the reference mirror. Unbalanced light can be balanced using an aperture at the illumination optics. As a result of simulation and experiment, we figured out that the interference signal can be enhanced using the proposed technique. With the proposed optics, the depth of TSVs having an aspect ratio of 11.2 was measured in 5 seconds. The proposed method is expected to be an alternative method for 3-D inspection of TSVs.

• Particle and aerosol research
• /
• v.13 no.2
• /
• pp.53-63
• /
• 2017

As semiconductor process was highly integrated, particle contamination became a major issue. Because particle contamination is related with process yields directly, particles with a diameter larger than half pitch of gate should be controlled. PBMS (Particle beam mass spectrometry) is one of powerful nano particle measurement device. It can measure 5~500 nm particles at ~ 100 mtorr condition in real time by in-situ method. However its usage is restricted to research filed only, due to its big device volume and high price. Therefore aperture changeable aerodynamic lenses (ACALs) which can control particle focusing characteristics by changing its aperture diameter was proposed in this study. Unlike conventional aerodynamic lenses which changes particle focusing efficiency when operating condition is changed, ACALs can maintain particle focusing efficiency. Therefore, it can be used for a multi-monitoring system that connects one PBMS and several process chambers, which greatly improves the commercialization possibility of the PBMS. ACALs was designed based on Stokes number and evaluated by numerical method. Numerical analysis results showed aperture diameter changeable aerodynamic lenses can focus 5 to 100 nm standard particles at 0.1 to 10 torr upstream pressure.

• Korean Journal of Optics and Photonics
• /
• v.34 no.6
• /
• pp.248-260
• /
• 2023

A 0.5-numerical-aperture (NA) refractive-reflective objective, composed of a low-NA refractive and a reflective focal reducer, is designed. A 0.25-NA Lister objective is used for the refractive. A two-spherical-mirror system, corrected for spherical aberration, coma, and astigmatism is used for the reflective focal reducer. In spite of high NA, the refractive-reflective objective has an 18-mm working distance and improved imaging performance, compared to the 0.25-NA Lister objective.

• Journal of the Optical Society of Korea
• /
• v.18 no.5
• /
• pp.531-537
• /
• 2014

Through-silicon vias (TSVs) are fine, deep holes fabricated for connecting vertically stacked wafers during three-dimensional packaging of semiconductors. Measurement of the TSV geometry is very important because TSVs that are not manufactured as designed can cause many problems, and measuring the critical dimension (CD) of TSVs becomes more and more important, along with depth measurement. Applying white-light scanning interferometry to TSV measurement, especially the bottom CD measurement, is difficult due to the attenuation of light around the edge of the bottom of the hole when using a low numerical aperture. In this paper we propose and demonstrate four bottom CD measurement methods for TSVs: the cross section method, profile analysis method, tomographic image analysis method, and the two-dimensional Gaussian fitting method. To verify and demonstrate these methods, a practical TSV sample with a high aspect ratio of 11.2 is prepared and tested. The results from the proposed measurement methods using white-light scanning interferometry are compared to results from scanning electron microscope (SEM) measurements. The accuracy is highest for the cross section method, with an error of 3.5%, while a relative repeatability of 3.2% is achieved by the two-dimensional Gaussian fitting method.

• ETRI Journal
• /
• v.27 no.3
• /
• pp.250-256
• /
• 2005

A novel planar polarization-agile microstrip subarray is proposed and its performance assessed by a thorough numerical investigation. The subarray consists of five square patches with a central element, directly coupled to a pair of microstrip feed lines by a cross-shaped aperture, which spreads the power outwards to the other patches through a network of suitable connections. By properly exciting the antenna at its input ports, any kind of polarization of the radiated field can be accomplished with fairly low cross-polarization levels. Moreover, since only two feed lines are required to drive the whole subarray, polarization agility is simply and attractively achieved by a single phase-shift circuit. The design concept is described and the results of the analyses and simulations performed by two completely independent full-wave approaches are presented and discussed.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.9 no.1
• /
• pp.23-28
• /
• 2008

Due to the modem MEMS technologies, the electron lenses that are used in the microcolumn can have much smaller optical aberrations compared with conventional electron lenses for the bulky electron columns. Since the electron lens system have great effect on the performance of the microcolumn, it is important to study the dependence of image quality on the configuration of the electronic imaging system, among which the source-lens part is most sensitive. In this work, we investigated the electron beam characteristics according to the shapes of extractor and limiting aperture that are elements of the source-lens part. By analyzing the data obtained, we proposed the optimum configuration of the electron lens system.

• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.46 no.7
• /
• pp.15-21
• /
• 2009

We proposed a fusion splicing method for low splicing loss between a single-mode fiber(SMF) and two different photonic crystal fibers(PCFs) such as a photonic bandgap fiber(PBGF) and highly nonlinear photonic crystal fiber(NL-PCF). The splicing loss between the SMF and PBGF is affected by air-hole collapse. Therefore, we optimized fusion splicer and reduced a splicing loss below 1.22 dB. We also inserted a Intra High Numerical Aperture(UHNA) fiber between the SMF and NL-PCF to achieve a splicing loss of below 2.59 dB.

• The Journal of the Acoustical Society of Korea
• /
• v.16 no.6
• /
• pp.12-18
• /
• 1997

Beamforming method has a limited spatial resolution because of finite aperture size, so that the estimated source distributions are smoothed within the resolution. Especially for low frequency noise such as mechanical noise, this limitation often diminishes the direct use of beamforming method. In this study, the relation between smoothed beamforming and radiation power distribution of plate has been addressed. By adjustment of aperture size of array, the smoothed beamforming power shows radiation power distribution of plate. Numerical simulations are carried for simply supported plate.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2002.05a
• /
• pp.378-380
• /
• 2002

There has been lower the tilt margin by the increase of coma aberration due to the reduction of wave-length and the increase of numerical aperture for high density recording. The RF signal degradation is increased as the decrease of tilt margin. To compensate the tilt margin, the optical pick-up actuator for high-speed CD/DVD re-writable system should be able to drive the radial-tilt motion. We announce that the 3-axis drive actuator for high-speed CD/DVD rewritable system. And what was more, the DC/AC sensitivities of this actuator are suitable fur the low-speed playability, the high-speed readability and the high-speed rewritability.

• Proceedings of the Optical Society of Korea Conference
• /
• 2003.07a
• /
• pp.14-15
• /
• 2003

Polymer optical fibers (POFs) are being considered as important high-speed communication media in the area of local area networks, datalinks and optical sensors. Large core diameter (500～1000 $\mu$m) and large numerical aperture (0.2~0.9) in a POF allow easy processing and connectorization, low cost high efficiency of beam coupling from LDs or LEDs, and complete immunity to EMI／EMR. There are many reports about 2.5 Gbps transmission the polymethylmethacrylate (PMMA) graded index (GI) POF over a distance of 100 m. (omitted)