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Strain-Relaxed SiGe Layer on Si Formed by PIII&D Technology

  • Han, Seung Hee;Kim, Kyunghun;Kim, Sung Min;Jang, Jinhyeok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.155.2-155.2
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    • 2013
  • Strain-relaxed SiGe layer on Si substrate has numerous potential applications for electronic and opto- electronic devices. SiGe layer must have a high degree of strain relaxation and a low dislocation density. Conventionally, strain-relaxed SiGe on Si has been manufactured using compositionally graded buffers, in which very thick SiGe buffers of several micrometers are grown on a Si substrate with Ge composition increasing from the Si substrate to the surface. In this study, a new plasma process, i.e., the combination of PIII&D and HiPIMS, was adopted to implant Ge ions into Si wafer for direct formation of SiGe layer on Si substrate. Due to the high peak power density applied the Ge sputtering target during HiPIMS operation, a large fraction of sputtered Ge atoms is ionized. If the negative high voltage pulse applied to the sample stage in PIII&D system is synchronized with the pulsed Ge plasma, the ion implantation of Ge ions can be successfully accomplished. The PIII&D system for Ge ion implantation on Si (100) substrate was equipped with 3'-magnetron sputtering guns with Ge and Si target, which were operated with a HiPIMS pulsed-DC power supply. The sample stage with Si substrate was pulse-biased using a separate hard-tube pulser. During the implantation operation, HiPIMS pulse and substrate's negative bias pulse were synchronized at the same frequency of 50 Hz. The pulse voltage applied to the Ge sputtering target was -1200 V and the pulse width was 80 usec. While operating the Ge sputtering gun in HiPIMS mode, a pulse bias of -50 kV was applied to the Si substrate. The pulse width was 50 usec with a 30 usec delay time with respect to the HiPIMS pulse. Ge ion implantation process was performed for 30 min. to achieve approximately 20 % of Ge concentration in Si substrate. Right after Ge ion implantation, ~50 nm thick Si capping layer was deposited to prevent oxidation during subsequent RTA process at $1000^{\circ}C$ in N2 environment. The Ge-implanted Si samples were analyzed using Auger electron spectroscopy, High-resolution X-ray diffractometer, Raman spectroscopy, and Transmission electron microscopy to investigate the depth distribution, the degree of strain relaxation, and the crystalline structure, respectively. The analysis results showed that a strain-relaxed SiGe layer of ~100 nm thickness could be effectively formed on Si substrate by direct Ge ion implantation using the newly-developed PIII&D process for non-gaseous elements.

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Biological Inspiration toward Artificial Photostystem

  • Park, Jimin;Lee, Jung-Ho;Park, Yong-Sun;Jin, Kyoungsuk;Nam, Ki Tae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.91-91
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    • 2013
  • Imagine a world where we could biomanufacture hybrid nanomaterials having atomic-scale resolution over functionality and architecture. Toward this vision, a fundamental challenge in materials science is how to design and synthesize protein-like material that can be fully self-assembled and exhibit information-specific process. In an ongoing effort to extend the fundamental understanding of protein structure to non-natural systems, we have designed a class of short peptides to fold like proteins and assemble into defined nanostructures. In this talk, I will talk about new strategies to drive the self-assembled structures designing sequence of peptide. I will also discuss about the specific interaction between proteins and inorganics that can be used for the development of new hybrid solar energy devices. Splitting water into hydrogen and oxygen is one of the promising pathways for solar to energy convertsion and storage system. The oxygen evolution reaction (OER) has been regarded as a major bottleneck in the overall water splitting process due to the slow transfer rate of four electrons and the high activation energy barrier for O-O bond formation. In nature, there is a water oxidation complex (WOC) in photosystem II (PSII) comprised of the earthabundant elements Mn and Ca. The WOC in photosystem II, in the form of a cubical CaMn4O5 cluster, efficiently catalyzes water oxidation under neutral conditions with extremely low overpotential (~160 mV) and a high TOF number. The cluster is stabilized by a surrounding redox-active peptide ligand, and undergo successive changes in oxidation state by PCET (proton-coupled electron transfer) reaction with the peptide ligand. It is fundamental challenge to achieve a level of structural complexity and functionality that rivals that seen in the cubane Mn4CaO5 cluster and surrounding peptide in nature. In this presentation, I will present a new strategy to mimic the natural photosystem. The approach is based on the atomically defined assembly based on the short redox-active peptide sequences. Additionally, I will show a newly identified manganese based compound that is very close to manganese clusters in photosystem II.

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A Study of DEM Generation in the Ganghwado Southern Intertidal Flat Using Waterline Method and InSAR (수륙경계선 방법과 위상간섭기법을 이용한 강화도 남단 갯벌의 DEM 생성 연구)

  • Lee, Yoon-Kyung;Ryu, Joo-Hyung;Hong, Sang-Hoon;Won, Joong-Sun;Yoo, Hong-Rhyong
    • Journal of Wetlands Research
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    • v.8 no.3
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    • pp.29-38
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    • 2006
  • Digital Elevation Model (DEM) of intertidal flat can be widely used not only for scientific fields, coastal management, fisheries, ocean safety, military, but also for understanding natural and artificial topographic changes of the tidal flat. In this study, we generated DEM of the Ganghwado southern intertidal flat, the largest tidal flat in the west coast of the Korean Peninsula, using waterline method and interferometric synthetic aperture radar (InSAR). Constructed DEM which applied waterline method to the Landsat-5 TM and Landsat-7 ETM+ images closely expresses overall topographic relief of tidal flat. We found that the accuracy was determined by the number of waterlines which reflect various tidal conditions. The application of InSAR to the ERS-1/2 and ENVISAT images showed that only ERS-1/2 tandem pairs successfully generated DEM in the part of northern Yeongjongdo, but construction of DEM in the other areas was difficult due to the low coherence caused by a lot of surface remnant waters. In the near future, Kompsat-2 will provide satellite images having multi-spectral and high spatial resolution within a relatively short period at different sea levels. Application of waterline method to these images will help us construct a high precision tidal flat DEM. Also, we should develop DEM generation method using single-pass microwave satellite images.

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[ $M\ddot{o}ssbauer$ ] Spectroscopy and Crystal Chemistry of Aenigmatite, $Na_4(Fe^{2+},Ti,Fe^{3+}){_{12}}(Fe^{3+},Si){_{12}}O_{40}$ (에이니그마타이트($Na_4(Fe^{2+},Ti,Fe^{3+}){_{12}}(Fe^{3+},Si){_{12}}O_{40}$)의 뫼스바우어 분광분석과 결정화학)

  • Choi, Jin-Beom
    • Journal of the Mineralogical Society of Korea
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    • v.20 no.4
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    • pp.367-376
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    • 2007
  • Aenigmatite, $Na_4(Fe^{2+},Ti,Fe^{3+}){_{12}}(Fe^{3+},Si){_{12}}O_{40}$, is a common constituent of sodium-rich alkaline igneous rocks and is classified a an open-branched single-chain silicate. $M\ddot{o}ssbauer$ spectroscopy of three natural aenigmatite specimens were done and the detailed crystal chemistry was obtained. Fitting of $M\ddot{o}ssbauer$ spectra led to the resolution of nine peaks. They consist of three doublets of $Fe^{2+}/oct$ and one merged peak at low velocity matching to two small peaks at high velocity which were assigned to $Fe^{3+}/tet\;and\;Fe^{2+}/oct$, respectively. Using the peak area for $Fe^{2+}\;and\;Fe^{3+}$ peaks, analytical data were recalculated. Precise assignment of $Fe^{2+}\;and\;Fe^{3+}$ ions in tetrahderal and octahedral sites revealed detailed crystal chemistry of aenigmatite. The existence of significant amounts of $Fe^{3+}/tet$ indicates that $Fe^{3+}$ has preference over $Al^{3+}$ for the tetrahedral sites. Crystal chemistry of aenigmatite (AEN1) yields the formula of $(Na_{3.97}Ca_{0.03})(Ca_{0.11}Mn_{0.59}Fe^{2+}{_{8.07}}Ti_{2.07}Mg_{0.70}Fe^{3+}{_{0.43}}Al_{0.04})(Fe^{3+}{_{0.56}}Al_{0.18}Si_{11.26})O_{40}$.

Mixed Mobile Education System using SIFT Algorithm (SIFT 알고리즘을 이용한 혼합형 모바일 교육 시스템)

  • Hong, Kwang-Jin;Jung, Kee-Chul;Han, Eun-Jung;Yang, Jong-Yeol
    • Journal of Korea Society of Industrial Information Systems
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    • v.13 no.2
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    • pp.69-79
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    • 2008
  • Due to popularization of the wireless Internet and mobile devices the infrastructure of the ubiquitous environment, where users can get information whatever they want anytime and anywhere, is created. Therefore, a variety of fields including the education studies methods for efficiency of information transmission using on-line and off-line contents. In this paper, we propose the Mixed Mobile Education system(MME) that improves educational efficiency using on-line and off-line contents on mobile devices. Because it is hard to input new data and cannot use similar off-line contents in systems used additional tags, the proposed system does not use additional tags but recognizes of-line contents as we extract feature points in the input image using the mobile camera. We use the Scale Invariant Feature Transform(SIFT) algorithm to extract feature points which are not affected by noise, color distortion, size and rotation in the input image captured by the low resolution camera. And we use the client-server architecture for solving the limited storage size of the mobile devices and for easily registration and modification of data. Experimental results show that compared with previous work, the proposed system has some advantages and disadvantages and that the proposed system has good efficiency on various environments.

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A Comparative Analysis for the Digitizing Accuracy by Satellite Images for Efficient Shoreline Extraction (효율적인 해안선 추출을 위한 위성영상별 디지타이징 정확도 비교 분석)

  • Kim, Dong-Hyun;Park, Ju-Sung;Jo, Myung-Hee
    • Journal of the Korean Association of Geographic Information Studies
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    • v.18 no.1
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    • pp.147-155
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    • 2015
  • The existing field survey and aerial photography involve the waste of manpower and economic loss in the coastline survey. To minimize these disadvantages, the digitization for efficient coastline extraction was conducted in this study using the points extracted from the standard coastline of the approximate highest high water and the diverse satellite images (KOMPSAT-3, SPOT-5, Landsat-8 and Quickbird-2), and the comparative accuracy analysis was conducted. The differences between the standard coastline points of the approximate highest high water and the coastline of each satellite were smallest for KOMPSAT-3, followed by Quickbird-2, SPOT-5 and Landsat-8. The significant probability from between the multipurpose applications satellite and Quickbird-2 (significant probability two-tailed) was statistically significant at 1% significance level. Therefore, high-resolution satellite images are required to efficiently extract the coastline, and KOMPSAT-3, from which images are easily acquired at a low cost, will enable the most efficient coastline extraction without external support.

Photochemical Reflectance Index (PRI) Mapping using Drone-based Hyperspectral Image for Evaluation of Crop Stress and its Application to Multispectral Imagery (작물 스트레스 평가를 위한 드론 초분광 영상 기반 광화학반사지수 산출 및 다중분광 영상에의 적용)

  • Na, Sang-il;Park, Chan-won;So, Kyu-ho;Ahn, Ho-yong;Lee, Kyung-do
    • Korean Journal of Remote Sensing
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    • v.35 no.5_1
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    • pp.637-647
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    • 2019
  • The detection of crop stress is an important issue for the accurate assessment of yield decline. The photochemical reflectance index (PRI) was developed as a remotely sensed indicator of light use efficiency (LUE). The PRI has been tested in crop stress detection and a number of studies demonstrated the feasibility of using it. However, only few studies have focused on the use of PRI from remote sensing imagery. The monitoring of PRI using drone and satellite is made difficult by the low spectral resolution image captures. In order to estimate PRI from multispectral sensor, we propose a band fusion method using adjacent bands. The method is applied to the drone-based hyperspectral and multispectral imagery and estimated PRI explain 79% of the original PRI. And time series analyses showed that two PRI data (drone-based and SRS sensor) had very similar temporal variations. From these results, PRI from multispectral imagery using band fusion can be used as a new method for evaluation of crop stress.

Interpretation and Analysis of Seismic Crosshole Data: Case History (탄성파 토모그래피 단면측정 데이터 분석 및 해석: 현장응용 사례)

  • Kim Jung-Yul;Kim Yoo-Sung;Hyun Hye-Ja
    • Geophysics and Geophysical Exploration
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    • v.1 no.1
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    • pp.31-42
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    • 1998
  • Recently crosshole seismic tomography has come to be widely used especially for the civil engineering, because it can provide more detail information than any other surface method, although the resolution of tomogram will be inevitably deteriorated to some extent due to the limited wavefield aperture on the nonuniqueness of traveltime inversion. In addition, our field sites often consist of a high-velocity bed rock overlain by low-velocity rock, sometimes with a contrast of more than 45 percent, and furthermore the bed rock is folded. The first arriving waves can be then the refracted ones that travel along the bed rock surface for some source/receiver distances. Thus, the desirable first arrivals can be easily misread that cause severe distortion of the resulting tomogram, if it is concerned with (straight ray) traveltime inversion procedure. In this case, comparision with synthetic data (forward modeling) is a valuable tool in the interpretation process. Besides, abundant information is contained in the crosshole data. For instance, examination of tube waves can be devoted to detecting discontinuities within the borehole such as breakouts, faults, fractures or shear zones as well as the end of the borehole. Specific frequency characteristics of marine silty mud will help discriminate from other soft rocks. The aim of this paper is to present several strategies to analyze and interpret the crosshole data in order to improve the ability at first to determine the spatial dimensions of interwell anomalies and furthermore to understand the underground structures. To this end, our field data are demonstrated. Possibility of misreading the first arrivals was illustrated. Tube waves were investigated in conjunction with the televiewer images. Use of shot- and receiver gathers was examined to benefit the detectabilities of discontinuities within the borehole.

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The Impact of Spatio-temporal Resolution of GEO-KOMPSAT-2A Rapid Scan Imagery on the Retrieval of Mesoscale Atmospheric Motion Vector (천리안위성 2A호 고속 관측 영상의 시·공간 해상도가 중규모 대기운동벡터 산출에 미치는 영향 분석)

  • Kim, Hee-Ae;Chung, Sung-Rae;Oh, Soo Min;Lee, Byung-Il;Shin, In-Chul
    • Korean Journal of Remote Sensing
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    • v.37 no.5_1
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    • pp.885-901
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    • 2021
  • This paper illustratesthe impact of the temporal gap between satellite images and targetsize in mesoscale atmospheric motion vector (AMV) algorithm. A test has been performed using GEO-KOMPSAT-2A (GK2A) rapid-scan data sets with a temporal gap varying between 2 and 10 minutes and a targetsize between 8×8 and 40×40. Resultsshow the variation of the number of AMVs produced, mean AMV speed, and validation scores as a function of temporal gap and target size. As a results, it was confirmed that the change in the number of vectors and the normalized root-mean squared vector difference (NRMSVD) became more pronounced when smaller targets are used. In addition, it was advantageous to use shorter temporal gap and smaller target size for the AMV calculation in the lower layer, where the average speed is low and the spatio-temporal scale of atmospheric phenomena is small. The temporal gap and the targetsize are closely related to the spatial and temporalscale of the atmospheric circulation to be observed with AMVs. Thus, selecting the target size and temporal gap for an optimum calculation of AMVsrequires considering them. This paper recommendsthat the optimized configuration to be used operationally for the near-real time analysis of mesoscale meteorological phenomena is 4-min temporal gap and 16×16 pixel target size, respectively.

Stillbirth rates and their association with swine leucocyte antigen class II haplotypes in Microminipigs

  • Imaeda, Noriaki;Ando, Asako;Matsubara, Tatsuya;Takasu, Masaki;Nishii, Naohito;Miyamoto, Asuka;Ohshima, Shino;Kametani, Yoshie;Suzuki, Shingo;Shiina, Takashi;Ono, Tetsushi;Kulski, Jerzy K.;Kitagawa, Hitoshi
    • Animal Bioscience
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    • v.34 no.11
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    • pp.1749-1756
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    • 2021
  • Objective: Microminipig (MMP) is a miniature pig with an extra small body size for experimental use. In the present study, the occurrence of stillbirths and their genetic association with swine leukocyte antigen (SLA) class II haplotypes were evaluated in a population of MMPs. Methods: The occurrences of stillbirth and genetic association with SLA class II haplotypes using 483 stillborn and 2,246 live piglets, and their parents were compared among the three groups of newborn piglet litters; an all stillborn (AS) group consisting of only stillborn piglet litters, a partial stillborn (PS) group consisting of stillborn and live piglet litters, and an all alive (AA) group consisting of only live piglet litters. Results: The incidence of stillborn piglets was 483/2,729 (17.7%). Distributions of litter sizes, numbers of stillborn piglets in a litter, parities, and gestation periods were distinct among the three groups. The frequencies of low resolution haplotype (Lr)-0.7 or Lr-0.23 were higher in the AS group than in the PS or AA groups. In sires, the frequency of Lr-0.7 associated with the AS group was significantly higher in the AS group than with the AA group. In dams, the frequency of Lr-0.23 was significantly higher in the AS group than in the PS or AA groups, whereas the frequency of Lr-0.7 was not significantly different. Conclusion: The incidence of stillborn piglets in MMPs appears to be higher than those in other pig breeds. Several traits related with stillbirths such as the number of stillborn piglets and parities of the AS group were different from those of the PS and AA groups. Specific SLA class II haplotypes were associated significantly with a high incidence of stillbirths and could be used as genetic markers to adopt breeding strategies to lower the rate of stillbirth in MMPs.