• Transactions on Electrical and Electronic Materials
• /
• v.3 no.3
• /
• pp.14-17
• /
• 2002

The HDP (High Density Plasma) CVD process consists of a simultaneous sputter etch and chemical vapor deposition. As CMOS process continues to scale down to sub- quarter micron technology, HDP process has been widely used fur the gap-fill of small geometry metal spacing in inter-metal dielectric process. However, HBP CVD system has some potential problems including plasma-induced damage. Plasma-induced gate oxide damage has been an increasingly important issue for integrated circuit process technology. In this paper, thin gate oxide charge damage caused by HDP deposition of inter-metal dielectric was studied. Multiple step HDP deposition process was demonstrated in this work to prevent plasma-induced damage by introducing an in-situ top SiH$_4$ unbiased liner deposition before conventional deposition.

• Journal of Korean Tunnelling and Underground Space Association
• /
• v.17 no.6
• /
• pp.665-674
• /
• 2015

A TSL (Thin Spray-on Liner) which consists of polymers has a higher initial strength, faster construction time and higher waterproofing performance than the conventional cementitious shotcrete. Main supporting mechanism of TSL is the adhesion and tensile strength which is distinct from the conventional shotcrete. Even though highly in demand due to its outstanding characteristics, TSL is not yet well-known support material. In this study, to evaluate contact behavior of TSL, numerical analysis was performed with comparing result from laboratory tests. From the analysis, cohesive behavior at the contact surface between TSL and rock can be evaluated by using combination of cohesive and the damage model. In addition, results show that the cohesive stiffness controled slope between force and displacement, the fracture energy controled level of force at the contact.

• Design & Manufacturing
• /
• v.14 no.3
• /
• pp.50-56
• /
• 2020

Ceramic tile is widely used as a floor or interior decoration of buildings. The main processes are raw material blending, molding, drying, firing, etc., and since dimensional and quality stability are very important, they are generally molded by a dry press method. In ceramic tile molds, there is a liner that can be easily replaced in case of wear. The liner is constantly abrasion due to a continuous pressing process during tile forming, and it is required to be replaced every certain period. Even in the liner, use a wear-resistant fitting material only in areas where wear is concentrated. However, there was a risk that the fitting material was applied to large-sized tile molding due to problems such as damage to the molding machine and decrease in productivity when detached during the actual tile molding process due to weak fitting strength with the liner. Therefore, in this study, thermal-structural analysis for fitting tolerance analysis and structural analysis for fitting force analysis were performed for the shrink fit process of the fitting material.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2014.10a
• /
• pp.451-454
• /
• 2014

• Geotechnical Engineering
• /
• v.22 no.12
• /
• pp.10-16
• /
• 2006

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.20 no.10
• /
• pp.1-8
• /
• 2021

Cylinder liners used in diesel engines of combat equipment are prone to cavitation due to wet cooling. The damage caused by erosion and corrosion due to cavitation has a fatal effect on the performance and lifespan of a diesel engine. Therefore, a study was conducted to improve the durability of cylinder liners. Two surface treatment techniques were proposed: nitriding and chrome plating. It was observed that the amount of erosion on the surface of nitride-treated cylinder liners was high because the surface-treated part eroded due to its weak impact resistance against the bubble explosion generated by cavitation. In contrast, the chrome-plated cylinder liner had a lower amount of erosion among the specimens subjected to the accelerated test. These results verified that the resistance of chrome-plated liners against cavitation is high. Therefore, it can withstand the impact of bubble explosion. If the chrome plating thickness is set with reference to the KS standard, an exceptional durability of abrasion, wear resistance, and corrosion resistance can be obtained. If the thickness is set between 120~250㎛, it is expected that the durability of the cylinder liner can be improved. Although a recovery method for corroded cylinder liners is suggested, the proposed method has an inherent risk of crack generation. Therefore, further research is required to solve this problem.

• Proceedings of the Korean Geotechical Society Conference
• /
• 2001.06a
• /
• pp.55-65
• /
• 2001

Geotextiles are usually constructed as a protective layer of geomembranes in liner systems for the solid waste landfill. A protective layer and geomembrane are susceptible to mechanical damage by coarse grains in the overlying drainage layer. In this study, therefore, the strain behavior of geotextile protective layers was investigated using three different types of devices for developing punctiform loads. The results of the study showed that the rates of strain was different depend upon device types for functiform loads. Also, It was found that the increases in strain was approximately linear in range 20 to 6$0^{\circ}C$ , and pp-filament non-woven geotextiles yielded a better efficiency than pp-staple fiber non-woven geotextiles.

• Proceedings of the KSR Conference
• /
• 2004.06a
• /
• pp.1142-1147
• /
• 2004

In this study, two damage detection techniques are applied to the railway tunnel liner based on the static deformation data. Models based on uniform reduction of stiffness and smeared crack concept are both employed, and the efficiency and relative advantage are compared with each other. Numerical analyses are performed on the idealized tunnel structure and the effect of white noise, common in most measurement data, is also investigated to better understand the suitability of the proposed models. As a result, model 1 based on uniform stiffness reduction method is shown to be relatively insensitive to the noise, while model 2 with the smeared crack concept is proven to be easily applied to the field situation since the effect of stiffness reduction is rather small. Finally, real deformation data of a rail tunnel in which health monitoring system is in operation are introduced to find the possible damage and it is shown that the prediction shows quite satisfactory result.

• Proceedings of the Korean Geotechical Society Conference
• /
• 2004.03b
• /
• pp.453-460
• /
• 2004

To prevent penetration of rainwater into the landfill site is the main purpose of the final cover in landfill sites. Conventional designs of landfill covers uses geotextiles such as geomembrane and GCL, and clay liners to lower the permeability of final covers of landfill sites. However, differential settlement and the variation of temperature in landfill sites cause the development of cracks or structural damage inside the final cover and it is also difficult to obtain clay - the main material of the compacted clay liner in Korea. Thus the former final cover system that suggests geomembrane and GCL or compacted clay liner has several limitations. Therefore, an alternative method is necessary and one of them is the application of SRSL(self-Recovering Sustainable Liner) material. SRSL is two different layers consist of individual materials that react with each other and form precipitates, and with this process lowers the permeability of the landfill final cover. SRSL generally is made up of two layers, so that when a internal crack occurs the reactants of the two layers migrate towards the crack and heal it by forming another liner. In this study the applicability of SRSL material for landfill final cover was examined by performing; (1) jar test to verify the formation of precipitate in the mixture of each reactants, (2) falling head test considering the field stress in order to confirm the decrease of permeability or prove that the hydraulic condctivity is lower than the regulations, (3) compression tests to judge weather if the strength satisfies the restricts for landfills, (4) freeze/thaw test to check the applicability of SRSL for domestic climate. In addition, the application of waste materials in the environmental and economical aspect was inspected, and finally the possibility of secondary contamination due to the waste materials was examined by performing elution tests.

• Journal of the Korean Geosynthetics Society
• /
• v.9 no.1
• /
• pp.39-46
• /
• 2010

Recently, the effective use of closed waste landfill nearby urban areas has been demanded, because of the lack of the usable land. However, the reuse of closed landfill is needed an adequate stabilization of liner system. But most of these places are consisted of steep slope and hence it is necessary to use the geosynthetics liners in there. Liner system of waste landfills is an important facility which prevents leachate outgoing from the landfills and also groundwater infiltrating from surroundings into the landfills. During the waste disposal stage, differential settlement and tensile stress of the geosynthetic materials could occur due to impact load of trucks and dozers, waste loads and weak foundation soils. In this study, the tensile strength and tracer test were performed to evaluate the stability of geomembrane liner systems. Based on the tensile strength test result of in-situ geomembrane sample, the yield tensile strength maintain the suitable strength by specification and current law. However, according to the tracer test, the damage of geomembrane liner was detected on sanitary landfill section.