• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 추계학술대회 논문요약집
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• pp.180-180
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• 2003

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.463-464
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 추계학술대회 논문집
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• pp.527-528
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.359-362
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• 2003

The aerostatic stage. which is used in semiconductor process, is demanded higher velocity and more precise accuracy for higher productivity and integrated performance. So, in the case of XY stage, H type structure, which is designed two co-linear axis of guide-way, driving force in one surface, has advantage of velocity and accuracy compared to conventional tacked type XY stage. To analyze characteristics of H type aerostatic stage, H type aerostatic surface XY stage is made, which is driven by linear motor and detected position with precise optical linear scale. And, analyze characteristics of motion error, effect of angular motion on positioning accuracy error and effect of simultaneous control on variation of velocity.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 추계학술대회논문집
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• pp.567-570
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• 2006

The purpose of this study is to develope a linear feeder for uniform transportation of grains and to present its design guide line. so, It is measured the displacement of the front and rear aspect of the feeder in time domain. And the measured time signal is represented to the plane coordinate. From this process, it is presented the motion of the feeder in a harmonic excited condition. Also, It is determined whether translation motion or rotation motion. From these course, it is defined the optimized dynamic motion for uniform transportation of grains. It is included a ratio of the displacement and the angle which the dynamic motion between the front and rear aspect of the feeder.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.692-695
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• 2000

This paper is concerned with Accuracy Design of LM Guide System in Machine Tools. Elastic deformation of bearing is calculated by Hertz contact theory and motion error of LM block is analyzed. A new algorithm using block stiffness is proposed fur the analysis of motion accuracy of the table. The best advantage of this algorithm is fast analysis speed because it isn't necessary iteration processes for satisfying equilibrium equation of the table. Motion errors of the table analyzed under artificial form error of rail theoretically and experimentally. Only one of two rails is bent by putting a thickness gauge into horizontal direction. This form error of rail is measured by gap sensor against the other rail. Then, motion errors of the table are predicted by proposed new algorithm theoretically and measured by laser interferometer. Measurements are carried out by changing the preload and thickness. The results show that the table motion errors are reduced from 1/2 to 1/60 times than form error of rail according to its height and width. And the effect of preloading is almost negligible.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.192-192
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• 2008

This paper represents a piezoelectric ultrasonic linear motor by traveling wave. The motor which is composed of two piezo ceramics, elastic body, and connecting tip is driven by the frictional force between the connecting tip and the linear motion guide. longitudinal and flexural vibrations are made by traveling wave which is generated when the ultrasonic electrical signals with 90 degree phase difference are applied to two ceramics. These vibrations contribute to elliptical motion by mixed mode between longitudinal and transverse mode. A linear movement can be easily obtained by using the elliptical motion. In this paper, the piezoelectric actuator has been intensively simulated by using ATILA to achieve an optimized elliptical motion of it. We could get the elliptical motion from actual experiment through the simulated result.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.1025-1028
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• 2002

In this paper, a micro-turning lathe is introduced for micro machining of aluminum rod. To give feed motion, stepwise motion[2] actuators are used instead of the conventional inchworm mechanism. These are consisted of two Piezoelectric ceramics; one is for feeding the slider, and the other is for clamping the slider in the guide way of the body. The guide is V-form. The linearity and positional accuracy of the actuators is good enough far high precision motion. Since the system is more compact than the conventional system using three Piezoelectric ceramics, it is applicable for the micro-machine or MEMS unit. To fabricate the lathe, a small spindle unit with ball bearings of diameter of 10 millimeter is built-up on the top the slider. The motion is feed backed with miniaturized linear encoder attached each axis slider. The diamond tool bite is used for cutting tool. The machining is tried to make small diameter rod. The possible diameter that can be machined in this machine is presented as well as chip formation, surface roughness, and machinability.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.445-448
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• 2004

Linear motor is very rapidly substituted for rotary motor and ball screw for precision positioning applications because of its characteristics such as high speed, no backlash and simplicities. A precision positioning system which is composed of linear motion(LM) guide and linear motor is widely used since it has easy controllable property but this system has low accuracy problem caused by friction of the LM guide. In this study, a scanning type XY stage is manufactured and some experiments is performed to improve the accuracy of the stage.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2001년도 추계학술대회논문집 I
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• pp.371-375
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• 2001

The concept of a new linear motor that uses piezo-stack actuator is demonstrated. The working principle is far different from the conventional inchworm motor. This motor is based on the self-moving cell concept. The linear motor has three cells and each cell is constructed with one piezo-stack actuator and a shell structure. A cell train is constructed by connecting these cells and the cell train is fitted into a guide way with a proper interference. The cell train moves along the guide way, by activating each cell in succession. The moving motion of the motor is tested. Since this linear motor uses piezo-stack actuator with unified clamping cell, it can produce fast speed, high resolution and large push force.