• Tribology and Lubricants
• /
• v.17 no.4
• /
• pp.283-289
• /
• 2001

The paper presents the stability characteristics of a rotor-bearing system supported by actively controlled hydrodynamic journal bearing. The proportional and derivative controls including coupled motion are adopted for the control algorithm to control the hydrodynamic journal bearing with a circumferentially groove. Also, the cavitation algorithm implementing the Jakobsson-Floberg-Olsson boundary condition is adopted to predict cavitation regions in the fluid film more accurately than a conventional analysis which uses the Reynolds condition. The stability characteristics of a rotor-bearing system supported by actively controlled hydrodynamic journal bearing are investigated for various control gains with the Routh-Hurwitz criteria using the linear dynamic coefficients which are obtained from the perturbation method. It is found that the speed at onset of the instability is increased for both proportional and derivative control of the bearing. It is also found that the proportional and derivative control of the coupled motion is more effective than that of the uncoupled motion.

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.14 no.9 s.90
• /
• pp.868-876
• /
• 2004

The linear motion(LM) guide using ball bearing has many advantages compared with conventional sliding guides. Therefore, LM guide using ball bearing has been widely used to increase the accuracy of the position of a system. This research investigates dynamic characteristics of LM guide through mainly linear analyses. Linear analysis is accomplished by Lagrange equation and the finite element method. And another trial that performs nonlinear analysis about one mode(bouncing mode) of LM guide from Hertzian contact theory is accomplished in the latter half of this research. Through nonlinear analysis we could observe the softening characteristic due to the Hertzian contact nonlinearity.

• Journal of the Korean Society for Precision Engineering
• /
• v.26 no.2
• /
• pp.109-117
• /
• 2009

This paper presents a linear air bearing stage with compensated motion errors by active control of preloads generated by magnetic actuators with combination of permanent and electromagnets. A 1-axis linear stage motorized with a linear motor with 240mm of travel range is built for verifying this design concept and tested its performances. The three motions of the table are controlled with four magnetic actuators driven by current amplifiers and a DSP based digital controller. Three motion errors were measured combined method with laser interferometer and two-probe method with $0.085{\mu}m$ of repeatability for straightness error. The measured motion errors were modeled as functions of the stage position, and compensation were carried out with feedforward control because the characteristics of the motion control with magnetic actuators are linear and independent for each degree-of-freedoms. As the results, the errors were reduced from $1.09{\mu}m$ to $0.11{\mu}m$ for the vertical motion, from 9.42 sec to 0.18 sec for the pitch motion and from 2.42 sec to 0.18 sec for roll motion.

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.19 no.11
• /
• pp.1184-1191
• /
• 2009

A bearingless linear motor(BLLM) which consists of two stators and a common mover is able to levitate and move its mover without any linear bearing or even additive windings. In the previous study, BLLM was actively controlled on the translation and pitch motion, while the roll motion is passively stable. In order to control the roll motion, this paper suggests adding active magnetic bearings(AMBs) at bottom of the mover in BLLM. The AMBs control the roll motion and also partially supports the weight of the mover. In this paper, magnetic forces generated by the AMBs are estimated by using an FEM model. Based on the analysis results, the bias current of the AMBs is determined and a PD controller is designed. Through an experimental levitation test, it was verified that roll motion is well controlled by AMB during levitation.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2010.05a
• /
• pp.475-476
• /
• 2010

• Journal of the Korean Society of Safety
• /
• v.24 no.4
• /
• pp.11-16
• /
• 2009

This research investigates contact angle of Linear Guide Way through a experimental result and theoretical analysis. Since last ten years, most of researchers who concerned with the precision machinery and semiconductor device production etc. so the researches about Linear Guide Way have been unnoticed. The precision machinery and semiconductor device production system has the principle which transfers the mechanical moving to accuracy position control. The Linear Guide Way system has the principle which transfers mechanical moving to accuracy position control is very important to improve performance of the precision machinery and semiconductor device production system. So, In this research, in order to improvement for producing Linear Guide Way, bearing loading analysis and contact angle change through Linear Guide Way theoretical analysis and bearing modeling. Through this study, we may expect that there will be more improvement for producing Linear Guide Way.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.29 no.7 s.238
• /
• pp.955-963
• /
• 2005

This research investigates dynamic characteristics of a linear motion (LM) guide through a experimental result and theoretical analysis. The stiffness in the LM guide is determined by the preloading due to the minus clearance between the ball bearing and the contact surface and it can be derived by Hertzian contact theory and the nonlinear motion of equation. The vibration analysis is performed using Lagrange equations and its result agrees with the experiment result. Using the sensitivity analysis on design parameters such as the contact angles of ball bearings and the eccentricity of mass center, the variation of the natural frequencies can be predicted.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.769-772
• /
• 2005

Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16 ${\mu}m$ and 1.96 arcsec to 0.02 ${\mu}m$ and 0.03 arcsec. Vertical linear motion accuracy, pitch and roll were also largely improved from 0.18 ${\mu}m$, 2.26 arcsec and 0.14 arcsec upto 0.03 ${\mu}m$, 0.07 arcsec and 0.02 arcsec. The compensated motion errors were within the range of measuring repeatability which was ${\pm}0.02\;{\mu}m$ in the linear motion and ${\pm}0.05$ arcsec in the angular motion. From these results, it is found that the motion error compensation method utilizing the active controlled capillaries are very effective to improve the five motion accuracies of the hydrostatic bearing tables.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
• /
• 2001.06a
• /
• pp.212-217
• /
• 2001

This paper presents the stability characteristics of a rotor-bearing system supported by actively controlled hydrodynamic journal bearing. The proportional and derivative controls including coupled motion are adopted for the control algorithm to control the hydrodynamic journal bearing with a circumferentially groove. Also, the cavitation algorithm implementing the Jakobsson-Floberg-Olsson boundary condition is adopted to predict cavitation regions in the fluid film more accurately than conventional analysis which uses the Reynolds condition. The stability characteristics are investigated with the Routh-Hurwitz criteria using the linear dynamic coefficients which are obtained from the perturbation method. The stability characteristics of the rotor-bearing system supported by active controlled hydrodynamic journal bearing are investigated for various control gain. It is found that the speed at onset of instability is increased for both proportional and derivative control of the bearing, and the proportional and derivative control of coupled motion is more effective than proportional and derivative control of uncoupled motion.

• Journal of Mechanical Science and Technology
• /
• v.20 no.1
• /
• pp.51-58
• /
• 2006

To compensate for the motion errors in hydrostatic tables, a method to actively control the clearance of a bearing corresponding to the amount of error using actively controlled capillaries is introduced in this paper. The design method for an actively controlled capillary that considers the output rate of a piezo actuator and the amount of error that must be corrected is described. The basic characteristics of such a system were tested, such as the maximum controllable range of the error, micro-step response, and available dynamic bandwidth when the capillary was installed in a hydrostatic table. The tests demonstrated that the maximum controllable range was $2.4\;{\mu}m$, the resolution was 27 nm, and the frequency bandwidth was 5.5 Hz. Simultaneous compensation of the linear and angular motion errors using two actively controlled capillaries was also performed for a hydrostatic table driven by a ballscrew and a DC servomotor. An iterative compensation method was applied to improve the compensation characteristics. Experimental results showed that the linear and angular motion errors were improved to $0.12{\mu}m$ and 0.20 arcsec, which were about $1/15^{th}$ and $1/6^{th}$ of the initial motion errors, respectively. These results confirmed that the proposed compensation method improves the motion accuracy of hydrostatic tables very effectively.