• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.65-69
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• 2002

In order to practicalize high precision centerless grinder for machining the ferrule, its feeding system is designed and tested. For satisfying the desired diametric tolerance and cylindricity of the ferrule, the feeding system is designed to have relatively high axial stiffness of 600 N/$\mu\textrm{m}$, high angular motion accuracy of 0.5 arcsec/mm in yaw direction and minimum resolution of 0.05 $\mu\textrm{m}$. A prototype of feeding system is built up with hydrostatic guideway and ballscrew. A linear scale with 0.05 $\mu\textrm{m}$ of resolution is used for position feedback. Experimental results show that the feeding system has the infinity of axial stiffness within the range of 1000 N and 0.3 arcsec/mm of yawing error. Also the feeding system shows obvious step response against 0.05 $\mu\textrm{m}$/step command without the lost motion or backlash. Although the vertical stiffness is reduced to 440 N/$\mu\textrm{m}$ by the elastic deformation of rail, it is good enough to use for machining the ferrule. From above, it is confirmed that the feeding system is applicable to centerless grinder for machining the ferrule.

• Tribology and Lubricants
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• 제36권1호
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• pp.39-46
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• 2020

Air stages are usually applied to precision engineering in sectors such as the semiconductor industry owing to their excellent performance and extremely low friction. Since the productivity of a semiconductor depends on the acceleration and deceleration performance of the air stage, many attempts have been made to improve the speed of the stage. Even during sudden start or stop sequences, the stage should maintain an air film to avoid direct contact between pad and the rail. The purpose of this study is to quantitatively predict the dynamic behavior of the air stage when acceleration and deceleration occur. The air stage is composed of two parts; the stage and the guide-way. The stage transports objects to the guideway, which is supported by an externally pressurized gas bearing. In this study, we use COMSOL Multiphysics to calculate the pressure of the air film between the stage and the guide-way and solve the two-degree-of-freedom equations of motion of the stage. Based on the specified velocity conditions such as the acceleration time and the maximum velocity of stage, we calculate the eccentricity and tilting angle of the stage. The result shows that the stiffness and damping of the gas bearing have non-linear characteristics. Hence, we should consider the operating conditions in the design process of an air stage system because the dynamic behavior of the stage becomes unstable depending on the maximum velocity and the acceleration time.