• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.401-402
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• 2007

The preparation and characteristics of ITO anode films grown using a linear facing target sputtering (FTS) technique for use in organic light emitting diodes (OLED) and flexible OLED is described. The electrical, optical, and work function of the ITO anode, which was prepared by linear FTS at room temperature, were comparable to those of commercial ITO anode films. In particular, linear FTS-grown ITO films shows very smooth surface without defects such as pin hole and cracks due to low substrate temperature. Furthermore OLED with the linear FTS-grown ITO anode film shows comparable electrical and optical properties to those of OLED with the commercial crystalline-ITO anode film. This suggested that linear FTS is promising thin film technology for preparing high quality anode film in OLEDs and flexible OLEDs.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.818-821
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• 2004

With a rapid development in the area of micro and ultra precision technology, the micro surface machining of small size parts are explosively increased. Especially, to improve efficiency of various beams in lens and reflector, non-rotational symmetric form and several mm level heights changeable surface can be machined at a time. These geometric complex 3D surface cannot be machined by general short stroke FTS. The long stroke FTS if firmly needed to move directly several mm and have nm level positioning accuracy for the complex surface form. The long stroke FTS used linear motors to drive moving unit long and fine, aero static bearings to decrease friction and moving errors in guide way, optical linear scale with nm level resolution to measure position of FTS. Furthermore, to increase the performance of acceleration of FTS, the light material, such as AL is used for the structure and the high stiffness box type structure is selected. In this paper, the genetic algorithm approach is described to determine a set of design parameters for auto tuning. The authors have attempted to model the design problem with the objective of minimizing the error, such as variable pattern change. This method can give the better alternative than existing other method.