• 제목/요약/키워드: Line patterned surface

검색결과 30건 처리시간 0.042초

선택적 표면처리와 딥코팅 방법을 이용한 고해상도 금속 패턴 형성연구 (Patterning of high resolution metal electrodes using selective surface treatment and dip casting for printed electronics)

  • 김영훈;엄유현;박성규;오민석;강정원;한정인
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2009년도 제40회 하계학술대회
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    • pp.1340_1341
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    • 2009
  • In this report, high-resolution metal electrode patterning is demonstrated by using selective surface treatment and dip casting for low-cost printed electronic applications. On hydrophobic octadecyltrichlorosilane treated $SiO_2$ surface, deep UV irradiation was performed through a patterned quartz photomask to selectively control the surface energy of the $SiO_2$ layer. The deep UV irradiated region becomes hydrophilic and by dipping into Ag nano-ink, Ag patterns were formed on the surface. Using this patterning technique, line patterns and dot arrays having less than $10{\mu}m$ pitch were fabricated.

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Polymer Inkjet Printing: Construction of Three-Dimensional Structures at Micro-Scale by Repeated Lamination

  • Yun, Yeon-Hee;Kim, Jae-Dong;Lee, Byung-Kook;Cho, Yong-Woo;Lee, Hee-Young
    • Macromolecular Research
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    • 제17권3호
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    • pp.197-202
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    • 2009
  • Solution-based, direct-write patterning by an automated, computer-controlled, inkjet technique is of particular interest in a wide variety of industrial fields. We report the construction of three-dimensional (3D), micro-patterned structures by polymer inkjet printing. A piezoelectric, drop-on-demand (DOD) inkjet printing system and a common polymer, PVA (poly(vinyl alcohol)), were explored for 3D construction. After a systematic preliminary study with different solvent systems, a mixture of water and DMSO was chosen as an appropriate solvent for PVA inks. The use of water as a single solvent resulted in frequent PVA clogging when the nozzles were undisturbed. Among the tested polymer ink compositions, the PVA inks in a water/DMSO mixture (4/1 v/v) with concentrations of 3 to 5 g/dL proved to be appropriate for piezoelectric DOD inkjet printing because they were well within the proper viscosity and surface tension range. When a dot was printed, the so-called 'coffee-ring effect' was significant, but its appearance was not prominent in line printing. The optimal polymer inkjet printing process was repeated slice after slice up to 200 times, which produced a well-defined, 3 D micro-patterned surface. The overall results implied that piezoelectric DOD polymer inkjet printing could be a powerful, solid-freeform, fabrication technology to create a controlled 3D architecture.

스크린 프린팅 방법에 의해 게이트-에미터간 자체정렬된 3극 구조의 CNT FEA 제조 (Fabrication of CNT FEA Self-aligned between Gate and Emitter using Screen Printing Method)

  • 권상직
    • 한국전기전자재료학회논문지
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    • 제19권4호
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    • pp.367-372
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    • 2006
  • A carbon nanotube field emission display(CNT FED) panel with a 2 inch diagonal size was fabricated using a screen printing of a prepared photo-sensitive CNT paste and vacuum in-line sealing technology. After a surface treatment of the patterned CNT, only the carbon nanotube tips are uniformly exposed on the surface. The diameter of the exposed CNTs are usually about 20 nm. Using the photo-sensitive CNT paste, we have developed a triode type CNT FEA with a self-aligned gate-emitter structure. The turn on voltage was around 100 V which corresponds to according the turn on field of about $40V/{\mu}m$. By the creation of a self-aligned gate-emitter structure, it is expected that the screen printed photo-sensitive CNT paste is promising as a good candidate for the large size field emission display.

불화 함유 다이아몬드 상 탄소 스탬프를 사용하는 UV 나노 임프린트 리소그래피 (UV-Nanoimprint Lithography Using Fluorine Doped Diamond-Like Carbon Stamp)

  • 정준호;알툰알리;나종주;최대근;김기돈;최준혁;이응숙
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2006년도 춘계학술대회 논문집
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    • pp.109-112
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    • 2006
  • A fluorine-doped diamond-like carbon (F-DLC) stamp which has high contact angle, high UV-transmittance and sufficient hardness, was fabricated using the following direct etching method: F-DLC is deposited on a quartz substrate using DC and RF magnetron sputtering, PMMA is spin coated and patterned using e-beam lithography and finally, $O_2$ plasma etching is performed to transfer the line patterns having 100 nm line width, 100 nm line space and 70 nm line depth on F-DLC. The optimum fluorine concentration was determined after performing several pre-experiments. The stamp was applied successfully to UV-NIL without being coated with an anti-adhesion layer.

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UV 나노임프린트 리소그래피를 위한 불화 함유 다이아몬드 상 탄소 스탬프의 제작 (Fabrication of Fluorine Doped Diamond-Like Carbon Stamp for UV-Nanoimprint Lithography)

  • 알툰 알리;정준호;나종주;최대근;김기돈;이응숙
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2006년도 춘계학술대회 논문집
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    • pp.145-146
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    • 2006
  • A fluorine-doped diamond-like carbon (F-DLC) stamp which has high contact angle, high UV-transmittance and sufficient hardness, was fabricated using the following direct etching method: F-DLC is deposited on a quartz substrate using DC and RF magnetron sputtering, PMMA is spin coated and patterned using e-beam lithography and finally, O2 plasma etching is performed to transfer the line patterns having 100 nm line width, 100 nm line space and 70 nm line depth on F-DLC. The optimum fluorine concentration was determined after performing several pre-experiments. The stamp was applied successfully to UV-NIL without being coated with an anti-adhesion layer.

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Thermal imprint를 이용한 고밀도 line패턴 형성방법 (High density line patterns fabricated by thermal imprint)

  • 이상문;곽정복;이환수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.270-270
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    • 2008
  • We present details of experimental results in the fabrication of high density line patterns, using imprint technique that can provide a simple and comparatively cost-effective manufacturing means. Barrier array structures for display or interconnects for semiconductor applications were the aims of this study. For pattern fabrication, a polymer layer (Ajinomoto GX-13 dielectric film) with a thickness of 38um that can act as either an insulating or a dielectric layer was laminated on a substrate. Fine tracks were then formed using a patterned stamp under isostatic pressure. The line width was ranged between 10 to 60 mm. A self-assembled monolayer (SAM) of fluorinated alkylchlorosilane [$CF_3(CF_2)5(CH_2)2SiCl_3$] as an anti-sticking layer was coated on the surface of the stamp prior to thermal imprint to improve the de-molding characteristic.

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Characterization of Triode-type CNT-FED Fabricated using Photo-sensitive CNT Paste

  • Kwon, Sang-Jik;Chung, Hak-June;Lee, Sang-Heon;Choi, Hyung-Wook;Shin, Young-Hwa;Lee, Dal-Ho;Lee, Jong-Duk
    • Journal of Information Display
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    • 제5권4호
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    • pp.18-22
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    • 2004
  • A carbon nanotube field emission display (CNT FED) panel with a 2 inch diagonal size was fabricated through screen printing of a prepared photo-sensitive CNT paste and vacuum in-line sealing technology. After surface treatment of the patterned CNT, only the carbon nanotube tips are uniformly exposed on the surface. The diameter of the exposed CNTs are usually about 20nm. The sealing temperature of the panel is around 390 $^{\circ}C$ and the vacuum level is obtained with $1.4{\times}10^{-5}$torr at the sealing. The field emission properties of the diode type CNT FED panel are characterized. Currently, we are in the process of developing a triode type CNT FED with a self-aligned gate-emitter structure.

탄소 나노튜브가 코팅된 은 메탈-메쉬 전극의 특성 (Characteristics of Silver Metal-mesh Electrodes Coated by Carbon Nanotubes)

  • 김부종;박종설;황영진;박진석
    • 반도체디스플레이기술학회지
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    • 제14권1호
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    • pp.55-59
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    • 2015
  • This study demonstrates hybrid-type transparent electrodes for touch screen panels. The hybrid-type electrodes were fabricated by coating carbon nanotubes (CNTs) on metal meshes. To form the metal-meshes, thin films of silver (Ag) were deposited on glass substrates using the sputtering method and then patterned via photolithography to obtain mesh structures whose line width was $10{\mu}m$ and line-to-line spacing was $300{\mu}m$. CNTs were coated on Ag-meshes by using two different methods, such as spray coating and electrophoretic deposition (EPD). For the samples of a Ag-meshes and CNTs-coated Ag-meshes, their surface morphologies, electrical sheet resistances, and visible-range transmittances and reflectances were characterized and compared. The experimental results indicated that the reflectance of Ag-mesh electrodes was substantially reduced by coating of CNTs. Especially, the hybrid electrodes of Ag-meshes with EPD-coated CNTs showed excellent properties such as sheet resistance lower than $20{\Omega}/{\Box}$, transmittance higher than 90 %, and reflectance lower than 8%.

Three-dimensional Molecular Director Simulation within a Unit Pixel of TFT-LCDs including Floating Electrodes

  • Jung, Sung-Min;Park, Woo-Sang
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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    • pp.1151-1154
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    • 2004
  • In this study, we presented a novel method to calculate unknown voltages on the floating electrodes introduced in a unit pixel of TFT-LCDs using three-dimensional molecular director simulation. For the simulation of the potential distribution profiles generated under the influence of the floating electrodes, we used the floating boundary condition on the surface enclosing the floating electrodes. The constraint for the floating boundary condition was derived from the charge neutrality condition about the floating electrodes disconnected from voltage sources. For the pixel with the floating electrodes patterned between the pixel and the data electrodes, we simulated the molecular director and the potential distribution in three-dimension, and then observed the location of the disclination lines around the edge of the pixel electrode. As a result, it was revealed that the floating electrodes significantly affect the electro-optical characteristics such as the location of the disclination line.

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Formation of Magnetic Structures for Trapping of Breast Cancer Cell

  • Alaa Alasadi;Ali Ghanim Gatea Al Rubaye
    • 한국재료학회지
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    • 제34권3호
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    • pp.144-151
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    • 2024
  • This work focuses on the fabrication of excellent magnetic structures for trapping breast cancer cells. Micromagnetic structures were patterned for trapping cancer cells by depositing 30 nm of permalloy on a silicon substrate. These structures were designed and fabricated using two fabrication techniques: electron beam lithography and laser direct writing. Two types of magnetic structures, rectangular wire and zig-zagged wire, were created on a silicon substrate. The length of each rectangular wire and each straight line of zig-zagged wire was 150 ㎛ with a range of widths from 1 to 15 ㎛ for rectangular and 1, 5, 10 and 15 ㎛ for zigzag, respectively. The magnetic structures showed good responses to the applied magnetic field despite adding layers of silicon nitride and polyethylene glycol. The results showed that Si + Si3N4 + PEG exhibited the best adhesion of cells to the surface, followed by Si + Py + Si3N4 + PEG. concentration of 5-6 with permalloy indicates that this layer affected silicon nitride in the presence of Polyethylene glycolPEG.