• 제목/요약/키워드: Lift-off

검색결과 417건 처리시간 0.059초

리모트 수소 플라즈마를 이용한 Si 기판 위의 Cu 불순물 제거 (A Study on the Removal of Cu Impurity on Si Substrate and Mechanism Using Remote Hydrogen Plasma)

  • 이종무;전형탁;박명구;안태항
    • 한국재료학회지
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    • 제6권8호
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    • pp.817-824
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    • 1996
  • 리모트 수소 플라즈마를 이용하여 Si 기판 위의 구리 오염의 제거 효과에 관하여 조사하였다. 최적의 공정 조건을 찾기 위하여 Si 기판을 1ppm ${CuCI}_{2}$ 표준 화학 용액으로 인위적으로 오염시킨 후 rf power와 세정시간, 거리 (수소플라즈마 중심에서 Si 기판표면까지의 거리)등의 공정 변수를 변화시키며 리모트 수소 플라즈마 세정을 실시하였다. 리모트 수소 플라즈마 세정 후 Si 표면의 분석을 위하여 TXRF(total x-ray reflection fluorescence)와 AFM(atomic force microscope)측정을 실시하였다. 리모트 수소 플라즈마 세정이 Cu의 제거에 효과적이며 Si 표면의 거칠기에 나쁜 영향을 주지 않음을 TXRF와 AFM 분석결과로부터 알 수 있었다. Cu 불순물의 흡착 메커니즘은 산화 환원 전위 이론으로 설명될 수 있으며, Cu 불순물의 제거 메커니즘은 XPS(x-ray photoelectron spectroscopy)분석결과를 근거로 하여 다음과 같이 설명할 수 있다. :먼저 Cu 이온이 Si 표면에 흡착되어 화학적 산화막을 생성한다. 그 다음, 수소 플라즈마 중의 반응성이 강한 수소이온이 이 산화막을 분해시켜 제거하며 Cu 불순물은 산화막이 제거될 때 함께 제거된다.

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층류제트 부상화염에서 열손실에 의한 자기진동에 관한 연구 (Study on Heat-Loss-Induced Self-Excitation in Laminar Lifted Jet Flames)

  • 윤성환;박정;권오붕;김정수;배대석;윤진한;길상인
    • 대한기계학회논문집B
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    • 제35권3호
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    • pp.309-319
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    • 2011
  • 질소 희석된 프로판 부상화염에서 열손실에 의한 자기진동을 기초로 화염안정화선도를 도출하기 위하여 노즐직경 0.3 mm, 1.0 mm에서 실험적 연구를 수행하였다. 예혼합화염에서 확산화염으로의 전도 열손실에 의한 자기진동 및 매연 복사에 의한 자기진동을 관찰하였다. 0.1 Hz보다 낮은 주파수 성향을 띄는 열손실에 의한 자기진동은 제안된 메커니즘에 의해 잘 묘사되었고 반면 매연복사에 의한 자기진동은 O(0.1 Hz)의 주파수 범위를 나타내었으며 제안된 메커니즘은 항온항습실 실험을 통해 입증하였다. 질소 희석된 프로판 부상화염에서 관찰된 열손실에 의한 자기진동의 특성화는 관련된 변수 및 스트라훌 수에 의해 잘 묘사되었다.

현행(現行) 수의(壽衣) 착의법(着衣法) 관(關) 연구(硏究) (A Study about Current Putting on a Shroud)

  • 남민기;백영자
    • 패션비즈니스
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    • 제3권2호
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    • pp.85-90
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    • 1999
  • A shroud is clothes for giving a dead person a bath and being finely dressed:though our routine clothes have been western, putting on a shroud has been kept comparatively well as a tradition of a conventional ceremony garments. This study is about the current using of dressing a shroud, and for presenting foundations of a way about dressing a shroud in order to make the most of this by everyone, therefore this research will be worthwhile to preserve the traditional custom of giving a dead person a bath and being finely dressed. 1. We must confirm the death of a person before we do Su-Si for controlling rightly a corse. Su-Si is ways of changing a clean clothes after bathing the dead person, tieing up hands, feet and ankles with a string, filling up a mouth, a nose and ears with a wad of cotton, laying down the dead person with his head toward east, and setting up a screen after covering the dead person with a bed sheet. 2. Here are processes of putting on a shroud. After the day of death, first of all, you must untie the string to control rightly a corpse, take off the clothes, and give a dead man a bath. You trim the dead person's fingernails and toenails, put them in O-nang, then put his hands and feet in five pouches, finally put feet in korean socks and wrap with Ak-su. You put a underwear in a overwear in order to put on the clothes easily, and then put on an upper garments after putting on trousers. And put on Sb-sin After you wash the dead person's face and his hair, you put gems and raw rice in his mouth, wrap head with cotton fabrics, and put hairs into five pouches, then put on a headgear which is filled with five pouches. 3. You tie up with hem cloth the dead person dressed a shroud after wrapping with Dae-ryum-km and So-ryumkm. 4. After you encoffin the dead person, you weave coffin strings with cotton fabrics in order to lift up the coffin easily, and lay down a red fabrics having white letters about the dead person's name or social position onto the coffin, then cover the coffin with a coffin cover : finally you leave the coffin at the former place and set up screen.

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Analysis of Surface Plasmon Resonance on Periodic Metal Hole Array by Diffraction Orders

  • 황정우;윤수진;강상우;노삼규;이상준
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.176-177
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    • 2013
  • Surface plasmon polaritons (SPPs) have attracted the attention of scientists and engineers involved in a wide area of research, microscopy, diagnostics and sensing. SPPs are waves that propagate along the surface of a conductor, usually metals. These are essentially light waves that are trapped on the surface because of their interaction with the free electrons of conductor. In this interaction, the free electrons respond collectively by oscillating in resonance with the light wave. The resonant interaction between the surface charge oscillation and the electromagnetic field of the light constitutes the SPPs and gives rise to its unique properties. In this papers, we studied theoretical and experimental extraordinary transmittance (T) and reflectance (R) of 2 dimensional metal hole array (2D-MHA) on GaAs in consideration of the diffraction orders. The 2d-MHAs was fabricated using ultra-violet photolithography, electron-beam evaporation and standard lift-off process with pitches ranging from 1.8 to $3.2{\mu}m$ and diameter of half of pitch, and was deposited 5-nm thick layer of titanium (Ti) as an adhesion layer and 50-nm thick layer of gold (Au) on the semiinsulating GaAs substrate. We employed both the commercial software (CST Microwave Studio: Computer Simulation Technology GmbH, Darmstadt, Germany) based on a finite integration technique (FIT) and a rigorous coupled wave analysis (RCWA) to calculate transmittance and reflectance. The transmittance was measured at a normal incident, and the reflectance was measured at variable incident angle of range between $30^{\circ}{\sim}80^{\circ}$ with a Nicolet Fourier transmission infrared (FTIR) spectrometer with a KBr beam splitter and a MCT detector. For MHAs of pitch (P), the peaks ${\lambda}$ max in the normal incidence transmittance spectra can be indentified approximately from SP dispersion relation, that is frequency-dependent SP wave vector (ksp). Shown in Fig. 1 is the transmission of P=2.2 um sample at normal incidence. We attribute the observation to be a result of FTIR system may be able to collect the transmitted light with higher diffraction order than 0th order. This is confirmed by calculations: for the MHAs, diffraction efficiency in (0, 0) diffracted orders is lower than in the (${\pm}x$, ${\pm}y$) diffracted orders. To further investigate the result, we calculated the angular dependent transmission of P=2.2 um sample (Fig. 2). The incident angle varies from 30o to 70o with a 10o increment. We also found the splitting character on reflectance measurement. The splitting effect is considered a results of SPPs assisted diffraction process by oblique incidence.

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Treatment of velopharyngeal insufficiency in a patient with a submucous cleft palate using a speech aid: the more treatment options, the better the treatment results

  • Park, Yun-Ha;Jo, Hyun-Jun;Hong, In-Seok;Leem, Dae-Ho;Baek, Jin-A;Ko, Seung-O
    • Maxillofacial Plastic and Reconstructive Surgery
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    • 제41권
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    • pp.19.1-19.6
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    • 2019
  • Background: The submucous cleft palate (SMCP) is a type of cleft palate that may result in velopharyngeal insufficiency (VPI). Palate muscles completely separate oral and nasal cavities by closing off the velopharynx during functional processes such as speech or swallow. Also, hypernasality may arise from anatomical or neurological abnormalities in these functions. Treatments of this issue involve a combination of surgical intervention, speech aid, and speech therapy. This case report demonstrates successfully treated VPI resulted from SMCP without any surgical intervention but solely with speech aid appliance and speech therapy. Case presentation: A 13-year-old female patient with a speech disorder from velopharyngeal insufficiency that was caused by a submucous cleft palate visited to our OMFS clinic. In the intraoral examination, the patient had a short soft palate and bifid uvula. And the muscles in the palate did not contract properly during oral speech. She had no surgical history such as primary palatoplasty or pharyngoplasty except for tonsillectomy. And there were no other medical histories. Objective speech assessment using nasometer was performed. We diagnosed that the patient had a SMCP. The patient has shown a decrease in speech intelligibility, which resulted from hypernasality. We decided to treat the patient with speech aid (palatal lift) along with speech therapy. During the 7-month treatment, hypernasality measured by a nasometer decreased and speech intelligibility became normal. Conclusions: Surgery remains the first treatment option for patients with velopharyngeal insufficiencies from submucous cleft palates. However, there were few reports about objective speech evaluation pre- or post-operation. Moreover, there has been no report of non-surgical treatment in the recent studies. From this perspective, this report of objective improvement of speech intelligibility of VPI patient with SMCP by non-surgical treatment has a significant meaning. Speech aid can be considered as one of treatment options for management of SMCP.

저온 공정 온도에서 $Al_2O_3$ 게이트 절연물질을 사용한 InGaZnO thin film transistors

  • 우창호;안철현;김영이;조형균
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.11-11
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    • 2010
  • Thin-film-transistors (TFTs) that can be deposited at low temperature have recently attracted lots of applications such as sensors, solar cell and displays, because of the great flexible electronics and transparent. Transparent and flexible transistors are being required that high mobility and large-area uniformity at low temperature [1]. But, unfortunately most of TFT structures are used to be $SiO_2$ as gate dielectric layer. The $SiO_2$ has disadvantaged that it is required to high driving voltage to achieve the same operating efficiency compared with other high-k materials and its thickness is thicker than high-k materials [2]. To solve this problem, we find lots of high-k materials as $HfO_2$, $ZrO_2$, $SiN_x$, $TiO_2$, $Al_2O_3$. Among the High-k materials, $Al_2O_3$ is one of the outstanding materials due to its properties are high dielectric constant ( ~9 ), relatively low leakage current, wide bandgap ( 8.7 eV ) and good device stability. For the realization of flexible displays, all processes should be performed at very low temperatures, but low temperature $Al_2O_3$ grown by sputtering showed deteriorated electrical performance. Further decrease in growth temperature induces a high density of charge traps in the gate oxide/channel. This study investigated the effect of growth temperatures of ALD grown $Al_2O_3$ layers on the TFT device performance. The ALD deposition showed high conformal and defect-free dielectric layers at low temperature compared with other deposition equipments [2]. After ITO was wet-chemically etched with HCl : $HNO_3$ = 3:1, $Al_2O_3$ layer was deposited by ALD at various growth temperatures or lift-off process. Amorphous InGaZnO channel layers were deposited by rf magnetron sputtering at a working pressure of 3 mTorr and $O_2$/Ar (1/29 sccm). The electrodes were formed with electron-beam evaporated Ti (30 nm) and Au (70 nm) bilayer. The TFT devices were heat-treated in a furnace at $300^{\circ}C$ and nitrogen atmosphere for 1 hour by rapid thermal treatment. The electrical properties of the oxide TFTs were measured using semiconductor parameter analyzer (4145B), and LCR meter.

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$8{\times}1$ 다중코일 와전류탐촉자를 이용한 원전 증기발생기 전열관 단면형상검사 기법 개발 (Development of Profile Technique for Steam Generator Tubes in Nuclear Power Plants Using $8{\times}1$ Multi-Array Eddy Current Probe)

  • 남민우;이희종;김철기
    • 비파괴검사학회지
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    • 제28권2호
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    • pp.184-190
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    • 2008
  • 원전 증기발생기 전열관의 건전성을 평가하기 위해서 여러 가지 와전류검사 기법이 적용되고 있다. 이와 같은 와전류검사 기법중에서 보빈탐촉자 기법은 전열관에 발생할 수 있는 축방향균열, 마모 검사에 적용하고 있으며, MRPC 기법은 튜브시트 상단 및 곡관부위 균열의 정밀검사에 적용된다. 원전 증기발생기 전열관의 설치공정 혹은 운전중에 전열관에 덴트(dent, 혹은 ding) 및 벌지(bulge)가 형성될 수 있으며, 와전류검사에서 이러한 지시는 결함으로 간주하지 않기 때문에 일정 크기 이상의 지시만 검사보고서에 기록하여 관리하고 있다. 이러한 지시는 보빈탐촉자 기법으로 용이하게 검출이 가능하고 보빈단면형상검사에 의해 대략적인 크기의 측정이 가능하지만, 정확한 크기 및 형상은 알 수는 없으므로 본 연구에서는 단면형상검사의 정확도를 증가시키기 위해 $8{\times}1$ 다중코일 탐촉자를 설계 개발하여 그 정확도를 평가하였다. 한편, OPR-1000형 증기발생기 전열관의 튜브시트 확관 천이영역에 형성된 덴트부위에 균열성 결함이 발생할 가능성이 높기 때문에 일부 발전소에서는 예방차원의 슬리빙을 수행하고 있다 이와 같은 슬리빙 대상 전열관 선정시 본 검사기법을 활용하면 유용할 것으로 판단된다.

전자상거래의 역물류 최소화를 위한 효율적 관리 방안 - B2C 거래를 중심으로 - (Study on methods of minimizing the reverse logistics in e-Commerce - Focused on the B2C -)

  • 임용택;서선애
    • 한국항만경제학회지
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    • 제24권3호
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    • pp.147-165
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    • 2008
  • 온라인 시장은 비대면 거래와 한정적인 시장의 규모로 인해 오프라인시장의 보조적 역할로 자리매김해 왔다. 그러나 전자상거래의 많은 장점에도 불구하고, 전자상거래의 동시 다발적 물류의 발생흐름은 전자상거래 상품의 가격 상승과 이로 인한 잠재적 구매 고려로 이어져 전자상거래 활성화에 걸림돌로 작용되어 왔다. 또한 이러한 순흐름 방향의 물류 발생이외에도 역물류 발생 자체가 상품 가격의 상승으로 이어지고, 역물류 발생 우려에 대한 잠재적 불안이 소비자의 구매 자체를 저해하는 요인이 되어왔다. 전자상거래 역물류를 발생시키는 원인에는 제품불량, 제품 부적합, 기대이하의 제품, 더 나은 거래 조건의 등장 등이 있는 것으로 조사되었다. 더 나아가 전자상거래 제품 선택에 대한 인지적 능력에 대한 높은 요구 그리고 비대면 거래의 특성, 상품지표 역할의 부족으로 인한 제품 채택의 어려움이 역물류 발생 원인으로 조사되었다. 본 연구 목적은 전자상거래 특히, B2C거래 중심의 역물류 발생원인을 살펴보고, 역물류 발생 원인을 제거하여 역물류 발생을 최소화할 수 있는 요인을 찾고, 역물류의 효율적 관리 방안을 제시함으로써 이에 대한 최소화 방안을 연구하여 역물류 발생자체를 억제하는데 있다. 그러나 현상의 발생과 대안이 선행연구의 부족에 따라 연구자의 주관적 견해가 많아, 이를 발전시켜 설문조사와 실증분석을 통해 입증하고, 세분화하는 것이 향후 연구 방향이라 하겠다.

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엔터테이먼트 공간에 나타나는 유희적 표현에 관한 연구 - 클럽 공간을 중심으로 - (A Study on the Entertaining Expressions in the Spaced for Entertainment - With a Focus on the Club Environment -)

  • 김혜현;윤갑근;문혁;서수미
    • 한국실내디자인학회논문집
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    • 제20권5호
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    • pp.42-50
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    • 2011
  • In the 21st century, people began to pay more attention on the culture, and the chances for them to participate in the cultural lives also increased. The spaces for entertainments can also be deemed as the center of the cultural contents. The entertainment is, in consideration of its definition by the literal meaning and the origin of the word itself, 'an act that entertains, or any artificial creation that is designed to give entertainment with a view to relieve the subjects from the burdens they have as they live.'Of the modem entertainment spaces, the one with the most profound visual manifestation of the entertainment element is the club. The purpose of this study is to examine the influence from the entertaining element manifested in the club spaces. Only until a few years back, the club spaces were deemed with negative impressions that comes with the more negative side of the entertaining world. But, recently such negative impressions are lift off considerably, and the club spaces are regarded with positive impressions as to be the kind of place where the young people can enjoy performances and other kind of culture in healthy atmosphere. In Chapter 2, we will examine the entertainment and the nature of the pleasure it gives, as well as the correlation between the entertaining environments and the pleasure they give. In chapter 3, the entertaining elements within such contexts are classified into the experience, form, color, objects, and the lightings and examine the characteristics of each of them. Also, the influences of these elements to the entertaining environment will be reviewed. In the case study in chapter 4, 9 overseas and domestic club spaces that were introduced in 'Interior World' magazines, that is, in the issues that are focused on 'Entertainment,'such as Issue 59, 68, and 79. As a result of the analysis, the influences of the entertaining, or pleasing, elements were discovered. The particular expression characteristics of the pleasing designs in the club spaces are, namely, the form elements, material elements, color elements, objects elements, and the lighting elements. As the society changes and the cultural level goes up, the club spaces are required to adopt more changes. Therefore, the pleasing elements of the space should receive further emphasis. These elements will act as a trend in the space and make the people appreciate the space more refreshing.

Modelling Pasture-based Automatic Milking System Herds: System Fitness of Grazeable Home-grown Forages, Land Areas and Walking Distances

  • Islam, M.R.;Garcia, S.C.;Clark, C.E.F.;Kerrisk, K.L.
    • Asian-Australasian Journal of Animal Sciences
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    • 제28권6호
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    • pp.903-910
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    • 2015
  • To maintain a predominantly pasture-based system, the large herd milked by automatic milking rotary would be required to walk significant distances. Walking distances of greater than 1-km are associated with an increased incidence of undesirably long milking intervals and reduced milk yield. Complementary forages can be incorporated into pasture-based systems to lift total home grown feed in a given area, thus potentially 'concentrating' feed closer to the dairy. The aim of this modelling study was to investigate the total land area required and associated walking distance for large automatic milking system (AMS) herds when incorporating complementary forage rotations (CFR) into the system. Thirty-six scenarios consisting of 3 AMS herds (400, 600, 800 cows), 2 levels of pasture utilisation (current AMS utilisation of 15.0 t dry matter [DM]/ha, termed as moderate; optimum pasture utilisation of 19.7 t DM/ha, termed as high) and 6 rates of replacement of each of these pastures by grazeable CFR (0%, 10%, 20%, 30%, 40%, 50%) were investigated. Results showed that AMS cows were required to walk greater than 1-km when the farm area was greater than 86 ha. Insufficient pasture could be produced within a 1 km distance (i.e. 86 ha land) with home-grown feed (HGF) providing 43%, 29%, and 22% of the metabolisable energy (ME) required by 400, 600, and 800 cows, respectively from pastures. Introduction of pasture (moderate): CFR in AMS at a ratio of 80:20 can feed a 400 cow AMS herd, and can supply 42% and 31% of the ME requirements for 600 and 800 cows, respectively with pasture (moderate): CFR at 50:50 levels. In contrast to moderate pasture, 400 cows can be managed on high pasture utilisation (provided 57% of the total ME requirements). However, similar to the scenarios conducted with moderate pasture, there was insufficient feed produced within 1-km distance of the dairy for 600 or 800 cows. An 800 cow herd required 140 and 130 ha on moderate and high pasture-based AMS system, respectively with the introduction of pasture: CFR at a ratio of 50:50. Given the impact of increasing land area past 86 ha on walking distance, cow numbers could be increased by purchasing feed from off the milking platform and/or using the land outside 1-km distance for conserved feed. However, this warrants further investigations into risk analyses of different management options including development of an innovative system to manage large herds in an AMS farming system.