• 한국정밀공학회지
• /
• 제19권9호
• /
• pp.41-50
• /
• 2002

Optical disk system aiming at fast data transfer rate and high-density recording requires the improvement in performance of the pickup head. Especially, the pickup actuator needs better linearity and stability. So, a lever actuator for optical disk is proposed. In this paper, the role of lever and its structure are discussed and the flexure hinge is introduced to enhance the precise movement. Using the Newoton's method, the motion of equation for the lever actuator is obtained. The results are compared with the analysis results by the FEM (Finite Element Method) for the vibration and the magnetic field. Consequently, the lever actuator has the 2"d system characteristics in 3-axis moving directions and superior stability for the external vibration.tion.

• 한국정밀공학회지
• /
• 제33권7호
• /
• pp.579-586
• /
• 2016

This paper describes kinematic analysis of a 6-degrees-of-freedom (DOF) ultra-precision positioning stage based on a flexure hinge. The stage is designed for processes which require ultra-precision and high load capacities, e.g. wafer-level precision bonding/assembly. During the initial design process, inverse and forward kinematic analyses were performed to actuate the precision positioning stage and to calculate workspace. A two-step procedure was used for inverse kinematic analysis. The first step involved calculating the amount of actuation of the horizontal actuation units. The second step involved calculating the amount of actuation of the vertical actuation unit, given the the results of the first step, by including a lever hinge mechanism adopted for motion amplification. Forward kinematic analysis was performed by defining six distance relationships between hinge positions for in-plane and out-of-plane motion. Finally, the result of a circular path actuation test with respect to the x-y, y-z, and x-z planes is presented.