• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1414-1416
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• 2001

Crack-free and homogeneous compact and epitaxial lead zirconate titanate(PZT) ferroelectric thin films with perovsikte structure have been prepared by sol-eel method. Tetrabutyl titanate, lead acetate and zirconium nitrate are used as raw materials. Glacial acetic acid is used as a catalyst. Ethylene glycol monoethyl ether is used as a solvent. The annealing temperatures of th thin films are 600~900$^{\circ}C$. The values of the remanent polarization Pr, and the coercive field $E_c$, of the PZT ceramic thin films are 46, 35 ${\mu}C/cm^2$ respectively.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.591-596
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• 2006

Lead zirconate titanate(PZT) thin films have been attracting worldwide interests in exploring their potential properties [1-3] or the origins [4-6] of their excellent dielectic, ferroelectric and piezoelectric properties near the morphotropic phase boundary (MPB). PZT thin films are expected to apply to the memory devices, micro electro mechanical systems (MEMS), and display because of their superior ferroelectric, pyroelectric, piezoelectric and electron emission properties. In this study, high- performance piezoelectric PZT thin films for actuated mirror array and optical scanner were developed by controlling the several factors, such as molecular-designed precursor, seeding layer and the residual stress in films, by a chemical solution deposition (CSD).

• 한국세라믹학회지
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• 제25권1호
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• pp.54-58
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• 1988

In order to depress PbO vaporization during calcination and improve sinterability in low temperature, a method for preparing homogeous Lead-Zirconate-Titanate (PZT) powder from aqueous salt solution by precipitation is described. In this method, single phae PZT fine powders are formed at above 500$^{\circ}C$. PZT-ceramics using these powders have high sinterability, and good sintering characteristics relatively low temp. (-high apparent density, low porosity, low water adsorption etc.)

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제50권12호
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• pp.593-598
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• 2001

Transient liquid phase processing was investigated to decrease processing temperatures while maintaining useful piezoelectric properties in the lead zirconate titanate (PZT) system. Niobium oxide$(Nb_2O_5)$ modified crystalline PZT (PZTN) powder was combined with lead silicate $(PS; PbO-SiO_2)$ glass powder and crystalline titania, zirconia, and niobia. Firing above the melting temperature of the lead silicate $(PS; Tm \risingdotseq\; 714^{\circk}C)$ resulted in liquid phase densification of the PZTN followed by dissolution of the titania, zirconia, and niobia into the liquid phase, and crystallization of additional PZTN. The addition of crystalline titania, zirconia, and niobia to react with the lead oxide from the lead silicate phase resulted in an increase in the dielectric and Piezoelectric properties.

• Transactions on Electrical and Electronic Materials
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• 제12권5호
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• pp.193-196
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• 2011

Lead zirconate titanate (PZT)/ bismuth ferrite (BFO) multilayer thin films have been fabricated by the spin-coating method on Pt(200 nm)/Ti(10 nm)/$SiO_2$(100 nm)/p-Si(100) substrates using $BiFeO_3$ and $Pb(Zr_{0.52}Ti_{0.48})O_3$ metal alkoxide solutions. The PZT/BFO multilayer thin films show a uniform and void-free grain structure, and the grain size is smaller than that of PZT single films. The reason for this is assumed to be that the lower BFO layers play an important role as a nucleation site or seed layer for the formation of homogeneous and uniform upper PZT layers. The dielectric constant and dielectric losses decreased with increasing number of coatings, and the six-layer PZT/BFO thin film has good properties of 162 (dielectric constant) and 0.017 (dielectric losses) at 1 kHz. The remnant polarization and coercive field of three-layer PZT/BFO thin films were 13.86 ${\mu}C/cm^2$ and 37 kV/cm respectively.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2002년도 추계학술발표대회 논문집
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• pp.216-219
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• 2002

Conventional piezoelectric lead-zirconate-titanate (PZT) senor has high sensitivity, but it is very brittle. Recently polymer films such as polyvinylidene fluoride (PVDF) have been used use as a sensor. The advantages of PVDF are the flexibility and mechanical toughness. Simple process and possible several shapes are also additional advantages. PVDF sensor can be directly embedded and attached to a structure. In this study, PVDF sensor was embedded in single glass fiber/epoxy composites whereas PZT sensor with AE was attached to single fiber composites (SFC). Piezoelectric sensor responds to interfacial damage of SFC. The signals measured by PVDF sensor were compared to PZT sensor. PZT sensor detected the signals of fiber fracture, matrix crack, interfacial debonding and even sensor delamination, whereas PVDF sensor only detected fiber fracture signals so far, because PZT sensor is much more sensitive than current PVDF sensor. Wave voltage of fiber fracture measured by PVDF sensor was lower than that of PZT sensor, but the results of fast Fourier transform (FFT) analysis were same. Wave velocity using two PZT sensors was also studied to know the internal and surface damage effect of epoxy specimens.

• Smart Structures and Systems
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• 제17권2호
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• pp.167-194
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• 2016

This paper investigates the Synergetics based Damage Detection Method (SDDM) for frame structures by using surface-bonded PZT (Lead Zirconate Titanate) patches. After analyzing the mechanism of pattern recognition from Synergetics, the operating framework with cooperation-competition-update process of SDDM was proposed. First, the dynamic identification equation of structural conditions was established and the adjoint vector (AV) set of original vector (OV) set was obtained by Generalized Inverse Matrix (GIM).Then, the order parameter equation and its evolution process were deduced through the strict mathematics ratiocination. Moreover, in order to complete online structural condition update feature, the iterative update algorithm was presented. Subsequently, the pathway in which SDDM was realized through the modified Synergetic Neural Network (SNN) was introduced and its assessment indices were confirmed. Finally, the experimental platform with a two-story frame structure was set up. The performances of the proposed methodology were tested for damage identifications by loosening various screw nuts group scenarios. The experiments were conducted in different damage degrees, the disturbance environment and the noisy environment, respectively. The results show the feasibility of SDDM using piezoceramic sensors and actuators, and demonstrate a strong ability of anti-disturbance and anti-noise in frame structure applications. This proposed approach can be extended to the similar structures for damage identification.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.178-181
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• 2003

In this work, we etched PZT films with various additive gases ($O_2$ and Ar) in $Cl_2/CF_4$ plasmas, while mixing ratio was fixed at 8/2. After the etching, the plasma induced damages are characterized in terms of hysteresis curves, leakage current, retention properties, and switching polarization. When the electrical properties of PZT etched in $O_2$ or Ar added $Cl_2/CF_4$ were compared, the value of remanent polarization in $O_2$ added $Cl_2/CF_4$ plasma is higher than that in Ar. added plasma. The maximum etch rate of the PZT thin films was 145 nm/min for 30% Ar added $Cl_2/CF_4$ gas having mixing ratio of 8/2 and 110 nm/min for 10% $O_2$ added to that same gas mixture. In order to recover the ferroelectic properties of the PZT thin films after etching, we annealed the etched PZT thin films at $550^{\circ}C$ in an $O_2$ atmosphere for 10 min. From the hysteresis curves, leakage current, retention property and switching polarization, the reduction of the etching damage and the recovery via the annealing was turned out to be more effective when $O_2$ was added to $Cl_2/CF_4$ than Ar. X-ray diffraction (XRD) showed that the structural damage was lower when $O_2$ was added to $Cl_2/CF_4$. And the improvement in the ferroelectric properties of the annealed samples was consistent with the increased intensities of the (100) and the (200) PZT peaks.

• 대한화학회지
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• 제46권3호
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• pp.242-251
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• 2002

졸-겔 형판 합성법을 이용하여 페로브스카이트 구조를 갖는 나노튜브를 합성하고 그 특성을 조사하였다. PbTiO3(PT), PbZrO3(PZ)와 PbZrO3-PbTiO3(PZT)고용체 나노튜부는 반응물, Ti(OPri)4, Zr(OBu)3와 Pb(OAc)2-3H2O 들의 킬레이트 졸-겔 합성법에 의해서 합성하였다. 산화 알루미늄 형판은 200nm의 직경을 갖는 훠트만 아노디스크가 사용되었다. 6.0M-NaOH 용액에서 형판을 제거한 다음, 주사현미경 분석에 의해서 50m 길이와 200nm 외곽 직경의 생성물 나노튜브를 확인할 수 있었다. 투과현미경 분석과 전자회절 분석에 의하여 나노튜브가 다결정임을 확인하였다. DSC 분석에 의하여 PT 나노튜브의 상전이 온도는 특이하게도 234.4$^{\circ}C$ 임이 확인되었으며, 이때의 입자크기는 X-선 분석의 하나인 Scherrer 식에 의해서 15.4nm 임이 계산되었다.

• 대한화학회지
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• 제24권1호
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• pp.53-62
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• 1980

본 실험에서는 혼합물중에서 한쪽 성분은 분체인 상태로 용액중에 분산시키고 이 용액중에서 다른 한 성분을 침전으로 석출시켜서 혼합물을 만드는 "부분침전법"이라는 새로운 혼합법으로 PZT ceramics를 만들기 위한 기초적 연구를 했다. 먼저 간단화 하기 위해서 $PbTiO_3$와 $PbZrO_3$의 생성반응을 개별적으로 검토했다. 그리고 이들 혼합상태가 ceramics 제조에 있어서 얼마나 중요한 인자인가도 다시 한번 확인시켰다.