• 한국전기전자재료학회논문지
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• 제29권8호
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• pp.483-488
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• 2016

Ultrasound imaging by using piezoelectric materials, such as lead zirconium titanate (PZT) has been one of the most preferred modes of imaging in the medical field due to its simple, low cost and non-ionizing radiation in comparison to other imaging techniques. Recently, the market demand for portable ultrasound is becoming larger with applications in developing countries, disaster area, military, and emergency purposes. However, most of ultrasound probes used is bulky and high power consumable, so unsuitable for such applications. In this study, the 3 layered ceramic specimen consisted of 128 pitches of $420{\mu}m$ in width and $450{\mu}m$ in thickness were prepared by using the Ti-rich PZT compositions co-fired at $1,050^{\circ}C$. Their electrical and ultrasound pulse-echo properties were investigated and compared to the single layer specimen. The 3 layered ultrasound probe showed 1.584 V of Vp-p, which is 3.2 times higher than single layered one, implying that it would allow effectively such a portable ultrasound probe system. The result were discussed in terms of higher capacitance, lower impedance and higher dielectric coefficient of the 3 layered ultrasound probe.

• Nuclear Engineering and Technology
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• 제54권10호
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• pp.3717-3723
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• 2022

For the first time, two-dimensional temporal behavior of the edge localized mode (ELM) filament is measured in the edge tokamak plasma with a multi-channel electrical probe array (MCEP). MCEP, which has 16 floating probes (4 × 4), is mounted at the far scrape-off layer (SOL) region in the KSTAR. An electron temperature and an ion flux are measured by sideband method (SBM), which can achieve two-dimensional measurements with high time resolution. Furthermore, temporal evolutions of the electron temperature and the ion flux are obtained during the ELM occurrence. In the H-mode period, short spikes from ELM bursts are observed in measured plasma parameters, and the trend is similar to that of typical Hα signal. Interestingly, when blob-like ELM filaments crash the probe, the heat flux is significantly higher in a local region of the probe array. The results show that our probe array using the SBM can measure the ELM behavior and the plasma parameters without the effect of the stray current caused by the huge device. This study can provide valuable data needed to understand the interaction between the SOL plasma and the plasma facing components (PFCs).

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.80-81
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• 2012

Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

• 정보저장시스템학회논문집
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• 제3권1호
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• pp.47-53
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• 2007

In this paper, a thermo-piezoelectric mechanism with integrated heaters and piezoelectric sensors has been studied for low power probe-based data storage. Silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been developed to improve the uniformity of cantilevers. Data bits of 40 nm in diameter were recorded on PMMA film. The sensitivity of the piezoelectric sensor was 0.615 fC/nm after poling the PZT layer. And, the $34\times34$ probe array integrated with CMOS circuits has been successfully developed by simple one-step bonding process. The process can simplify the process step and reduce tip wear using silicon nitride tip.

• 한국재료학회지
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• 제13권8호
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• pp.550-554
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• 2003

Current nanogold cluster synthesized by chemical routine with 11 or 55 atoms of gold has been widely used for immuno chemistry probe as a form of nanocluster conjugated with biomolecules. It would be an undeveloped region that the 1 nm size of nanogold could be made by materials engineering processing. Therefore, objective of this study is to minimize the size of gold nanocluster as a function of operating temperature and chamber pressure in inert gas condensation (IGC) processing. Evaporation temperature was controlled by input current from 50 A to 65 A. Chamber pressure was controlled by argon gas with a range of 0.05 to 2 torr. The gold nanocluster by IGC was evaluated by X-ray diffraction (XRD) and transmission electron microscopy (TEM). The gold nanocluster for TEM analysis was directly sampled with special in-situ method during the processing. Atomic force microscopy (AFM) was used to observe 3-D nanogold layer surfaces on a slide glass for the following biomolecule conjugation step. The size of gold nanoclusters had a close relationship with the processing condition such as evaporation temperature and chamber pressure. The approximately 1 nm size of nanogold was obtained at the processing condition for 1 torr at $1124 ^{\circ}C$.

• Geomechanics and Engineering
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• 제30권3호
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• pp.247-258
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• 2022

A field velocity resistivity probe (FVRP) can measure compressional waves, shear waves and electrical resistivity in boreholes. The objective of this study is to perform the soil classification through a machine learning technique through elastic wave velocity and electrical resistivity measured by FVRP. Field and laboratory tests are performed, and the measured values are used as input variables to classify silt sand, sand, silty clay, and clay-sand mixture layers. The accuracy of k-nearest neighbors (KNN), naive Bayes (NB), random forest (RF), and support vector machine (SVM), selected to perform classification and optimize the hyperparameters, is evaluated. The accuracies are calculated as 0.76, 0.91, 0.94, and 0.88 for KNN, NB, RF, and SVM algorithms, respectively. To increase the amount of data at each soil layer, the synthetic minority oversampling technique (SMOTE) and conditional tabular generative adversarial network (CTGAN) are applied to overcome imbalance in the dataset. The CTGAN provides improved accuracy in the KNN, NB, RF and SVM algorithms. The results demonstrate that the measured values by FVRP can classify soil layers through three kinds of data with machine learning algorithms.

• 한국분무공학회지
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• 제9권4호
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• pp.53-66
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• 2004

An experimental study was carried out in order to investigate the influence of flow conditions on a boundary layer in the near-wake of a flat plate. The flow conditions in the vicinity of the trailing edge that is influenced by upstream condition history are an essential factor that determines the physical characteristics of a near-wake. Tripping wires attached at various positions were selected to change flow conditions of a boundary layer. The flows such as laminar, transitional, and turbulent boundary layer at 0.98C from the leading edge are imposed in order to investigate the evolution of symmetric and asymmetric wake. An x-type hot-wire probe(55P61) is employed to measure at 8 stations in the near-wake. Test results show that the near-wake for the case of a turbulent boundary layer is relatively insensitive to instability after separating at the trailing edge, and Reynolds shear stress in the near-wake for the case of a turbulent boundary layer collapses due to turbulent kinetic energy.

• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2005년도 추계학술대회 논문집
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• pp.17-22
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• 2005

An experimental study was carried out to investigate the effect of local ultrasonic forcing on a turbulent boundary layer. Stereoscopic particle image velocimetry (SPIV) was used to probe the characteristics of the flow. A ultrasonic forcing system was made by adhering six ultrasonic transducers to the local flat plate. Cavitation which generates uncountable minute air-bubbles having fast wall normal velocity occurs when ultrasonic was projected into water. The SPIV results showed that the wall normal mean velocity is increased in a boundary layer dramatically and the streamwise mean velocity is reduced. The skin friction coefficient ($C_{f}$) decreases $60\%$ and gradually recovers at the downstream. The ultrasonic forcing reduces wall-region streamwise turbulent intensity, however, streamwise turbulent intensity is increased away from the wall. Wall-normal turbulent intensity is almost the same near the wall but it increases away from the wall, In tile vicinity of the wall, Reynold shear stress, sweep strength and production of turbulent kinetic energy were decreased. This suggests that the streamwise vortical structures are lifted by ultrasonic forcing and then skin friction is reduced.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.215-219
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• 2007

In this work, the indium zinc oxide (IZO) films had been deposited on the glass substrate coated with the SiO film. Based on a comparative investigation of the IZO monolayer and IZO/SiO multilayer, it is shown that the thickness of SiO film has a great effect on the mechanical properties of the thin films. The AFM images of the IZO thin film included the SiO film were shown smoother surfaces than monolayer. Resistivity was in inverse proportion to Mobility. If it deposited the SiO film on the substrate, the layer of change was generated between two layer(SiO and substrate). The layer of change influenced resistance because of oxygen content was more than the IZO monolayer.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집
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• pp.160-163
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• 2002

Silica waveguide for an integrated diffractive optical head system was designed and fabricated. The waveguide was designed to optimize the optical efficiency of red and/or blue laser source, and a lab-made RF magnetron sputter was adopted to deposit silica cladding and core layers on SiO$_2$/Si substrates. The cladding and core layers were formed using commercial targets, and the former was done with ＃7740 and the latter with BK7 and BAK4, respectively The surface roughness of the waveguide layers was measured to be 30.3${\AA}$ for BK7 and 17.8${\AA}$ for BAK4, and the difference of refractive indices between core and cladding layers was 0.9% and 2.5%, respectively. The waveguide fabricated with the core layer of BK7 showed better optical properties when the final diffractive optical probe heads were measured with red laser(650nm) source.