• Title/Summary/Keyword: Layer removal

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Effect of chemical in post Ru CMP Cleaning solutions on abrasive particle adhesion and removal (Post Ru CMP Cleaning에서 연마입자의 흡착과 제거에 대한 chemical의 첨가제에 따른 영향)

  • Kim, In-Kwon;Kim, Tae-Gon;Cho, Byung-Gwun;Son, Il-Ryong;Park, Jin-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.529-529
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    • 2007
  • Ruthenium (Ru) is a white metal and belongs to platinum group which is very stable chemically and has a high work function. It has been widely studied to apply Ru as an electrode material in memory devices and a Cu diffusion barrier metal for Cu interconnection due to good electrical conductivity and adhesion property to Cu layer. To planarize deposited Ru layer, chemical mechanical planarization(CMP) was suggested. However, abrasive particle can induce particle contamination on the Ru layer surface during CMP process. In this study, zeta potentials of Ru and interaction force of alumina particles with Ru substrate were measured as a function of pH. The etch rate and oxidation behavior were measured as a function of chemical concentration of several organic acids and other acidic and alkaline chemicals. PRE (particle removal efficiency) was also evaluated in cleaning chemical.

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Comparison of the Methods of Zona Pellucida Removal and Inner Cell Mass Isolation for the Generation of Parthenogenetic Embryonic Stem Cells in HanWoo Cattle

  • Kim, Dae-Hwan;Park, Sang-Kyu;Kim, Se-Woong;Jung, Yeon-Gil;Roh, Sang-Ho
    • Journal of Embryo Transfer
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    • v.26 no.2
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    • pp.111-115
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    • 2011
  • In general, zona pellucida (ZP) of the blastocyst has to be removed first, then either isolated the inner cell mass (ICM) or ZP-removed whole blastocyst, which is then cultured on the feeder layer to induce ICM outgrowth for the generation of embryonic stem cells (ESC). However, it is unclear whether ICM isolation before seeding on feeder layer is beneficial or not because the interaction between ICM and trophoblasts may affect cellular growth and/or pluripotency during the culture on the feeder. In the present study, two ZP removal methods (mechanically by splitting with a 28-gauge needle versus chemically by the treatment of acid-Tyrode's solution) and two ICM isolation methods (ZP-free whole blastocyst seeding versus mechanical isolation of ICM) were evaluated for the efficient isolation and culture of putative parthenogenetic bovine ESC. The number of maintained outgrown colonies was counted in each experimental group. As the result, mechanical removal of ZP with a needle and followed by whole ZP-free blastocyst seeding on feeder cells tended to attach more on the feeder layer and resulted in more outgrown colonies with its simple and less time-costing benefits. Currently we are generating ESC lines in HanWoo cattle by using this method for initial outgrowth of the parthenogenetic bovine blastocysts.

Measurement of residual stresses in injection molded short fiber composites considering anisotropy and modulus variation

  • Kim, Sang-Kyun;Lee, Seok-Won;Youn, Jae-Ryoun
    • Korea-Australia Rheology Journal
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    • v.14 no.3
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    • pp.107-114
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    • 2002
  • Residual stress distribution in injection molded short fiber composites is determined by using the layer-removal method. Polystyrene is mixed with carbon fibers of 3% volume fraction (4.5% weight fraction) in an extruder and the tensile specimen is injection-molded. The layer-removal process, in which removing successive thin uniform layers of the material from the surface of the specimen by a milling machine, is employed and the resulting curvature is acquired by means of an image processing. The isotropic elastic analysis proposed by Treuting and Read which assumes a constant Yaung’s modulus in the thickness direction is one of the most frequently used methods to determine residual stresses. However, injection molded short fiber composites experience complex fiber orientation during molding and variation of Yaung’s modulus distribution occurs in the specimen. In this study, variation of Yaung’s modulus with respect to the thickness direction is considered for calculation of the residual stresses as proposed by White and the result is compared with that by assuming constant modulus. Residual stress distribution obtained from this study shows a typical stress profile of injection-molded products as reported in many literatures. Young’s modulus distribution is predicted by using numerical methods instead of experimental results. For the numerical analysis of injection molding process, a hybrid FEM/FDM method is used in order to predict velocity, temperature field, fiber orientation, and resulting mechanical properties of the specimen at the end of molding.

Improving the Initial Effluent Turbidity by Polyaluminium Chloride(PAC) Coating in Rapid Sand Filtration (급속모래여과에서 PAC 피복에 의한 초기 유출수의 탁도 개선)

  • Yoon, Tae-Han;Kim, Woo-Hang
    • Journal of Korean Society on Water Environment
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    • v.18 no.3
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    • pp.253-260
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    • 2002
  • The purpose of this research was to describe the mechanisms and prevention of initial degradation in turbidity of the sand filter effluent. The method used was by adding a coagulant (PAC) to the sand filter after backwashing as a means of reducing turbidity. It was found that adding 80 mg/L of PAC solution to the sand filter was very effective in improving the initial effluent turbidity. A turbidity removal efficiency of 99 % was observed in the initial term period as compared to a 70% efficiency without PAC addition. The PAC solution added to the sand filter resulted in high aluminum concentration at the upper layer as compared with the bottom layer of the sand filter column. A change in the zeta potential to a strong positive-ions at upper layer was observed at this time but only a small change was obtained at the bottom. This result showed that the zeta potential of the sand was changed to positive with PAC coating. The effect of pH on zeta potential with PAC addition was also investigated. Zeta potential was greatly changed to positive-ion at pH 4~6. A series of experiments was then conducted in this study to optimize the pH of the PAC solution to be added to the sand filter after backwashing. The removal efficiency of turbidity was found to be highest at pH 5. This result suggested that hydrolyzed aluminium species attached to the surface of the sand enhanced the removal of turbidity of the effluent.

Self-healing Anticorrosion Coatings for Gas Pipelines and Storage Tanks

  • Luckachan, G.E.;Mittal, V.
    • Corrosion Science and Technology
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    • v.15 no.5
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    • pp.209-216
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    • 2016
  • In the present study, chitosan based self-healing anticorrosion coatings were prepared by layer by layer (lbl) addition of chitosan (Ch) and polyvinyl butyral (PVB) on mild carbon steel substrate. Chitosan coatings exhibited enhanced coating stability and corrosion resistance in aggressive environments by the application of a PVB top layer. Chitosan layer in the lbl coatings have been modified by using glutaraldehyde (Glu) and silica ($SiO_2$). Performance of different coatings was tested using electrochemical impedance spectroscopy and immersion test. The best anticorrosion performance was observed in case of 10 % Ch_$SiO_2$_PVB coatings, which withstand immersion test over 25 days in 0.5 M salt solution without visible corrosion. 10 % Ch_$SiO_2$ coatings without the PVB top layer didn't last more than 3days. Application of PVB top layer sealed the defects in the chitosan pre-layer and improved its hydrophobic nature as well. Raman spectra and SEM of steel surfaces after corrosion study and removal of PVB_Ch/Glu_PVB coatings showed a passive layer of iron oxide, attributing to the self-healing nature of these coatings. Conducting particle like graphene reinforcement of chitosan in the lbl coatings enhanced corrosion resistance of chitosan coatings.

A STUDY OF THE EFFECT OF CHEMO-MECHANICAL CARIES REMOVAL SYSTEM ON THE REMOVAL OF CARIOUS DENTIN AND RESIN ADHESION TO DENTIN (화학제재를 이용한 우식상아질 제거효과 및 레진과의 결합강도에 관한 연구)

  • Kang, Dug-Il;Park, In-Chon;Lee, Nan-Young;Lee, Sang-Ho;Lee, Chang-Seop
    • Journal of the korean academy of Pediatric Dentistry
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    • v.30 no.4
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    • pp.581-592
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    • 2003
  • The aim of this study was to evaluate the effect of chemo-mechanical caries removal system($Carisolv^{TM}$, Medi Team, Sweden) for resin adhesion to carious primary and permanent dentin compared with conventional drilling method. The buccal surface of 92 primary molars and 92 permanent molars were used. Exposed dentins were occurred artificial caries. 32 tooth of primary molars and 32 tooth of permanent molars were prepared to observe treated dentin surface with $Carisolv^{TM}$ and conventional drilling method by SEM. Other tooth were prepared to measure resin-dentin shear bonding strength according to caries removal methods and dentin adhesive system. Two adhesive systems and a composite resin were used; single bonding agent(Scotchbond Multi-Purpose Plus, 3M) and self-etching bonding system(Prompt L-pop, 3M ESPE), and a composite resin (Z-250, 3M). The results were as follows : 1. The removal effect of carious dentin on $Carisolv^{TM}$ was stronger on the primary dentin than that to permanent dentin, and dentin surface became rougher with treated $Carisolv^{TM}$ than drilling method. 2. Acid-etched dentin surfaces were showed smoothening without smear layer. 3. In specimen applied single bonding system hybrid layer and adhesive layer were $2-4{\mu}m$ and $10-15{\mu}m$ in thickness, whereas self-etching bonding system were showed only thin hybrid layer($1-2{\mu}m$). 4. The shear bonding strength of group applied single bonding agent was higher than that applied self-etching priming system(P<0.05). 5. The shear bonding strength of group applied $Carisolv^{TM}$ and self-etching priming system were slightly higher than that applied conventional drilling method and self-etching priming system(P>0.05).

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Effects of canal enlargement and irrigation needle depth on the cleaning of the root canal system at 3 mm from the apex (근관확대 및 세척 주사바늘의 근관 내 위치가 치근단 3 mm 부위의 근관 세정에 미치는 영향)

  • Moon, Ho-Jin;Hong, Chan-Ui
    • Restorative Dentistry and Endodontics
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    • v.37 no.1
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    • pp.24-28
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    • 2012
  • Objectives: The aim of this study was to test the hypothesis, that the effectiveness of irrigation in removing smear layer in the apical third of root canal system is dependent on the depth of placement of the irrigation needle into the root canal and the enlargement size of the canal. Materials and Methods: Eighty sound human lower incisors were divided into eight groups according to the enlargement size (#25, #30, #35 and #40) and the needle penetration depth (3 mm from working length, WL-3 mm and 9 mm from working length, WL-9 mm). Each canal was enlarged to working length with Profile.06 Rotary Ni-Ti files and irrigated with 5.25% NaOCl. Then, each canal received a final irrigation with 3 mL of 3% EDTA for 4 min, followed by 5 mL of 5.25% NaOCl at different level (WL-3 mm and WL-9 mm) from working length. Each specimen was prepared for the scanning electron microscope (SEM). Photographs of the 3mm area from the apical constriction of each canal with a magnification of ${\times}250$, ${\times}500$, ${\times}1,000$, ${\times}2,500$ were taken for the final evaluation. Results: Removal of smear layer in WL-3 mm group showed a significantly different effect when the canal was enlarged to larger than #30. There was a significant difference in removing apical smear layer between the needle penetration depth of WL-3 mm and WL-9 mm. Conclusions: Removal of smear layer from the apical portion of root canals was effectively accomplished with apical instrumentation to #35/40 06 taper file and 3 mm needle penetration from the working length.

Post Ru CMP Cleaning for Alumina Particle Removal

  • Prasad, Y. Nagendra;Kwon, Tae-Young;Kim, In-Kwon;Park, Jin-Goo
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.05a
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    • pp.34.2-34.2
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    • 2011
  • The demand for Ru has been increasing in the electronic, chemical and semiconductor industry. Chemical mechanical planarization (CMP) is one of the fabrication processes for electrode formation and barrier layer removal. The abrasive particles can be easily contaminated on the top surface during the CMP process. This can induce adverse effects on subsequent patterning and film deposition processes. In this study, a post Ru CMP cleaning solution was formulated by using sodium periodate as an etchant and citric acid to modify the zeta potential of alumina particles and Ru surfaces. Ru film (150 nm thickness) was deposited on tetraethylorthosilicate (TEOS) films by the atomic layer deposition method. Ru wafers were cut into $2.0{\times}2.0$ cm pieces for the surface analysis and used for estimating PRE. A laser zeta potential analyzer (LEZA-600, Otsuka Electronics Co., Japan) was used to obtain the zeta potentials of alumina particles and the Ru surface. A contact angle analyzer (Phoenix 300, SEO, Korea) was used to measure the contact angle of the Ru surface. The adhesion force between an alumina particle and Ru wafer surface was measured by an atomic force microscope (AFM, XE-100, Park Systems, Korea). In a solution with citric acid, the zeta potential of the alumina surface was changed to a negative value due to the adsorption of negative citrate ions. However, the hydrous Ru oxide, which has positive surface charge, could be formed on Ru surface in citric acid solution at pH 6 and 8. At pH 6 and 8, relatively low particle removal efficiency was observed in citric acid solution due to the attractive force between the Ru surface and particles. At pH 10, the lowest adhesion force and highest cleaning efficiency were measured due to the repulsive force between the contaminated alumina particle and the Ru surface. The highest PRE was achieved in citric acid solution with NaIO4 below 0.01 M at pH 10.

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W Chemical Mechanical Polishing (CMP) Characteristics by oxidizer addition (산화제 첨가에 따른 W-CMP 특성)

  • Park, Chang-Jun;Seo, Yong-Jin;Lee, Kyoung-Jin;Jeong, So-Young;Kim, Chul-Bok;Kim, Sang-Yong;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.46-49
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    • 2003
  • Chemical mechanical polishing (CMP) is an essential dielectric planarization in multilayer microelectronic device fabrication. In the CMP process it is necessary to minimize the extent of surface defect formation while maintaining good planarity and optimal material removal rates. The polishing mechanism of W-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. Thus, it is important to understand the effect of oxidizer on W passivation layer, in order to obtain higher removal rate (RR) and very low non-uniformity (NU%) during W-CMP process. In this paper, we compared the effects of oxidizer or W-CMP process with three different kind of oxidizers with 5% hydrogen peroxide such as $Fe(NO_3)_3$, $H_2O_2$, and $KIO_3$. The difference in removal rate and roughness of W in stable and unstable slurries are believed to caused by modification in the mechanical behavior of $Al_3O_3$ particles in presence of surfactant stabilizing the slurry.

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Effect of irrigation protocols on smear layer removal, bond strength and nanoleakage of fiber posts using a self-adhesive resin cement

  • Rodrigo Stadler Alessi;Renata Terumi Jitumori ;Bruna Fortes Bittencourt;Giovana Mongruel Gomes ;Joao Carlos Gomes
    • Restorative Dentistry and Endodontics
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    • v.48 no.3
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    • pp.28.1-28.13
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    • 2023
  • Objectives: This study aimed to investigate the effect of the application method of 2% chlorhexidine (CHX) and its influence on the adhesion of fiberglass posts cemented with a self-adhesive resin cement. Materials and Methods: Sixty human mandibular premolars were endodontically treated and divided into 5 groups (n = 12), according to the canal irrigant and its application method: 2 groups with conventional syringe irrigation (CSI)-2.5% sodium hypochlorite (NaOCl) (control) and 2% CHX- and 3 groups with 2% CHX irrigation/activation-by passive ultrasonic irrigation (PUI), Easy Clean file, and XP-Endo Finisher file. Two roots per group were evaluated for smear layer (SL) removal by scanning electron microscopy. For other roots, fiber posts were luted using a self-adhesive resin cement. The roots were sectioned into 6 slices for push-out bond strength (BS) (7/group) and nanoleakage (NL) (3/group). Data from SL removal were submitted to Kruskal-Wallis and Student-Newman-Keuls tests (α = 0.05). Data from BS and NL were evaluated by 2-way analysis of variance and Tukey's test (α = 0.05). Results: For SL removal and BS, the CHX irrigation/activation promoted better values than CSI with CHX (p < 0.05), but it was not significantly different from CSI with NaOCl (p > 0.05). For NL, the lowest values were obtained by the chlorhexidine irrigation/activation groups (p < 0.05). Conclusions: Active 2% CHX irrigation can be used to improve the post space cleaning and adhesion before fiber post cementation with self-adhesive resin cements.