• Title/Summary/Keyword: Laser-induced breakdown

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A novel surface cleaning process using laser-induced breakdown of liquid (액체의 레이저 유기 절연파괴를 이용한 신개념 표면 세정 공정)

  • Jang, Deok-Suk;Lee, Jong-Myoung;Kim, Dong-Sik
    • Laser Solutions
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    • v.12 no.4
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    • pp.17-25
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    • 2009
  • The surface cleaning method based on the laser-induced breakdown (LIB) of gas and subsequent plasma and shock wave generation can remove small particles from solid surfaces. In the laser shock cleaning (LSC) process, a high-power laser pulse induces optical breakdown of the ambient gas above the solid surface covered with contaminant particles. The subsequently created shock wave followed by a high-speed flow stream detaches the particles. In this work, a novel surface cleaning process using laser-induced breakdown of liquid is introduced and demonstrated. LIB of a micro liquid jet increases the shock wave intensity and thus removes smaller particle than the conventional LSC method. Experiments demonstrate that the cleaning force and cleaning efficiency are also increased significantly by this method.

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A Study on the Corrosion Characteristics of a Metal Surface by Laser-Induced Breakdown Spectroscopy (레이저 유도 플라즈마 분광분석법을 적용한 금속표면의 부식 특성에 관한 연구)

  • Kang, Dongchan;Kim, Joohan
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.16 no.1
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    • pp.83-89
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    • 2017
  • The corrosion of metal specimens was analyzed in this study using laser-induced breakdown spectroscopy. The samples used in the study were magnesium alloys and corrosion, and standard specimens were prepared and analyzed using surface and depth analysis. The spectral wavelengths used in the oxide layer analysis were 777.196 nm, 777.421 nm, and 777.543 nm. The spectral line of the surface corrosion was confirmed by experimentation, and surface micro morphology analysis was performed using an optical microscope. Approximately $100{\mu}m$ corrosion depth was confirmed via laser irradiation in the depth direction. The results of laser-induced breakdown spectroscopy and the SEM-EDS analysis were compared and analyzed.

Material Dependence of Laser-induced Breakdown of Colloidal Particles in Water

  • Yun, Jong-Il
    • Journal of the Optical Society of Korea
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    • v.11 no.1
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    • pp.34-39
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    • 2007
  • Laser-induced breakdown of colloidal suspensions, such as polystyrene, $ZrO_2$, and $SiO_2$ particles in diameters of 100-400 nm in water is investigated by nanosecond flash-pumped Nd:YAG laser pulses operating at a wavelength ${\lambda}$= 532 nm. The breakdown threshold intensity is examined in terms of breakdown probability as a function of laser pulse energy. The threshold intensity for $SiO_2$ particles ($1.27{\times}10^{11}\;W/cm^2$) with a size of 100 nm is higher than those for polystyrene and $ZrO_2$ particles with the same size, namely $5.7{\times}10^{10}$ and $5.5{\times}10^{10}\;W/cm^2$, respectively. Results indicate that the absorption of five photons is required to induce ionization of $SiO_2$ particles, whereas the other particles necessitate four-photon absorption. These breakdown thresholds are compared with those measured by nanosecond pulses from a diode-pumped Nd:YAG laser having a different focusing geometry.

Precision exploration of space resources using laser-induced breakdown spectroscopy (레이저 유도 플라즈마 분광분석법을 활용한 정밀 우주 자원 탐사)

  • Choi, Soo-Jin;Yoh, Jai-Ick
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.39 no.5
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    • pp.451-457
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    • 2011
  • A short laser pulse irradiates a sample to create the highly energetic plasma that emits light of a specific wavelength peak according to the material. By identifying different peaks for the analyzed samples, its chemical composition can be rapidly determined. The LIBS (Laser-Induced Breakdown Spectroscopy) has great advantages as an elemental analyzer on board a space rover, namely real-time rapid analysis and stand-off detection. The LIBS signal intensity is remarkably increased by using double-pulse LIBS system for component analysis of lunar environments where the surrounding pressure is low. Also the angle of target is adjusted for replicating arbitrary shapes of the specimen.

Hardness Analysis of Surface Treated Magnesium Alloy using Laser Induced Breakdown Spectroscopy (레이저 플라즈마 분광분석법을 이용한 표면처리 된 마그네슘 합금 표면의 경도 분석)

  • Kang, Dongchan;Kim, Joohan
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.24 no.6
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    • pp.625-631
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    • 2015
  • The hardness of surface treated magnesium alloy was evaluated using laser induced breakdown spectroscopy. The surface of the specimen was hardened mechanically, and the hardness profiles were measured using a traditional measurement technique. A laser beam was irradiated to generate a plasma, and the peaks of the components of the specimen were analyzed. A wavelength of 333.66 nm and 293.65 nm were selected as the atomic and ionic peaks, respectively. The ratios of the ionic peak to the atomic peak were obtained so as to compare the hardness profile. As the depth increased, the ratio decreased. These results are in good agreement with the previous hardness measurement results. It can be considered that this technique could be applied for remote and time-efficient hardness measurement.

Development of Aerosol-LIBS (Laser Induced Breakdown Spectroscopy) for Real-time Monitoring of Process-induced Particles (공정 중 발생 오염입자 실시간 모니터링을 위한 에어로졸-레이저 유도 플라즈마 분광분석 시스템 개발)

  • Kim, Gibaek;Kim, Kyoungtae;Maeng, Hyunok;Lee, Hae Bum;Park, Kihong
    • Particle and aerosol research
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    • v.12 no.3
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    • pp.57-63
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    • 2016
  • The laser-induced breakdown spectroscopy (LIBS) has been used for rapid detection of elemental compositions of various materials in multi-media (solid, liquid, gas, and aerosols). In this study, the aerosol-LIBS has been developed for real-time monitoring of process-induced particles produced during the semiconductor manufacturing. The developed aerosol-LIBS mainly consists of laser, optics, spectrometer, and aerosol chamber. A new aerosol chamber was constructed for the aerosol-LIBS to be applied for various semiconductor manufacturing process, including exhaust tubes, and low pressure and high temperature chamber. The aerosol-LIBS was evaluated by using laboratory generated aerosols for detection of various elements. As a result, P, Fe, Mg, Cu, Co, Ni, Ca, Na, and K emission lines were successfully detected by the aerosol-LIBS. Further evaluation of the aerosol-LIBS is being conducted.

Damage Analysis of CCD Image Sensor Irradiated by Continuous Wave Laser (연속발진 레이저에 의한 CCD 영상센서의 손상 분석)

  • Yoon, Sunghee;Jhang, Kyung-Young;Shin, Wan-Soon
    • Journal of the Korea Institute of Military Science and Technology
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    • v.19 no.6
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    • pp.690-697
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    • 2016
  • EOIS(electro-optical imaging system) is the main target of the laser weapon. Specially, the image sensor will be vulnerable because EOIS focuses the incident laser beam onto the image sensor. Accordingly, the laser-induced damage of the image sensor needs to be identified for the counter-measure against the laser attack. In this study, the laser-induced damage of the CCD image sensor irradiated by the CW(continuous wave) NIR(near infrared) laser was experimentally investigated and mechanisms of those damage occurrences were analyzed. In the experiment, the near infrared CW fiber laser was used as a laser source. As the fluence, which is the product of the irradiance and the irradiation time, increased, the permanent damages such as discoloration and breakdown appeared sequentially. The discoloration occurred when the color filter was damaged and then the breakdown occurred when the photodiode and substrate were damaged. From the experimental results, LIDTs(laser-induced damage thresholds) of damages were roughly determined.

Fabrication of a UV laser micromachining platform with process-monitoring optical modules (공정 모니터링 광학모듈이 장착된 UV 레이저 미세가공 플랫폼 제작)

  • Sohn, H.;Lee, J.H.;Jeong, Y.W.;Kim, S.I.;Hahn, J.W.
    • Laser Solutions
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    • v.11 no.2
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    • pp.33-38
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    • 2008
  • Laser micromachining has increasingly been adopted in various advanced industries where the high-precision machining of large-area, high-density and multi-layered components is in a strong demand. To effectively meet the requirements, the laser micromachining process must be carefully monitored. In order to facilitate the development of a new laser micromachining process and/or a new system, we have fabricated a UV laser micromachining platform that is equipped with optical modules for monitoring the process online. They include a laser power stabilizing module, a module for laser-induced breakdown spectroscopy, and an auto-focusing module.

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Tandem laser-induced breakdown spectroscopy laser-ablation inductively-coupled plasma mass spectrometry analysis of high-purity alumina powder

  • Lee, Yonghoon;Kim, Hyang
    • Analytical Science and Technology
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    • v.32 no.4
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    • pp.121-130
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    • 2019
  • Alumina is one of the most important ceramic materials because of its useful physical and chemical properties. Recently, high-purity alumina has been used in various industrial fields. This leads to increasing demand for reliable elemental analysis of impurities in alumina samples. However, the chemical inertness of alumina makes the sample preparation for conventional elemental analysis a tremendously difficult task. Herein, we demonstrated the feasibility of laser ablation for effective sampling of alumina powder. Laser ablation performs sampling rapidly without any chemical reagents and also allows simultaneous optical emission spectroscopy and mass spectrometry analyses. For six alumina samples including certified reference materials and commercial products, laser-induced breakdown spectroscopy (LIBS) and laser-ablation inductively-coupled plasma mass spectrometry (LA-ICP-MS) analyses were performed simultaneously based on a common laser ablation sampling. LIBS was found to be useful to quantify alkali and alkaline earth metals with limits-of-detection (LODs) around 1 ppm. LA-ICP-MS could quantify transition metals such as Ti, Cu, Zn, and Zr with LODs in the range from a few tens to hundreds ppb.