• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2000년도 추계학술대회 논문집
• /
• pp.102-105
• /
• 2000

A simple digital control system has been developed for the frequency stabilization of an internal mirror He-Ne laser. The system is based on one chip microprocessor with embedded Basic interpreter. To stabilize the laser output frequency, the signal such as power difference or beat frequency between two modes is supplied and processed by a microprocessor, and control signal is fed to the heating coil would round the laser tube for adjusting the spacing of the laser cavity mirror. Newly developed frequency stabilization system is totally digitized. The system and the frequency stability performance are briefly described.

• KIEE International Transactions on Electrophysics and Applications
• /
• 제4C권3호
• /
• pp.96-100
• /
• 2004

The Nd： YAG laser is commonly used throughout many fields such as accurate material processing, IC marking, semiconductor annealing, medical operation devices, etc., due to the fact that it has good thermal and mechanical properties and is easy to maintain. In materials processing, it is essential to vary the laser power density for specific materials. The laser power density can be mainly controlled by the current pulse width and pulse repetition rate. It is important to control the laser energy in those fields using a pulsed laser. In this paper we propose the constant-frequency current resonant half-bridge converter and monitoring of capacitor charging voltage. This laser power supply is designed and fabricated to have less switching loss, compact size, isolation with primary and secondary transformers, and detection of capacitor charging voltage. Also, the output stabilization characteristics of this Nd： YAG laser system are investigated. The test results are described as a function of laser output energy and flashlamp arc discharging constant. At the energy storage capacitor charges constant voltage, the laser output power is 2.3％ error range in 600[V].

• 대한전기학회논문지:전기물성ㆍ응용부문C
• /
• 제53권11호
• /
• pp.583-588
• /
• 2004

We stabilized the frequency and power of a high voltage excited CW CO2 laser on the peak of the Doppler broadened gain curve using the photoacoustic effect generated from the laser itself. The photoacoustic signal is directly coupled from an radio frequency discharge chamber via a capacitor microphone into a detector and a lock-in stabilizer. The frequency stability is estimated to be better then 1.2×10/sup -7/ at the transition P(20) line. The stabilized output power variation was reduced to from 77 % to 3.3 %.

• 한국광학회지
• /
• 제15권4호
• /
• pp.337-342
• /
• 2004

본 연구에서는 opto-Hertzian 효과를 이용하여 고주파 여기식 슬랩형 $CO_2$ 레이저의 출력을 안정화하였다. 슬랩레이저 공진기속의 복사선 세기가 변화할 때 opto-Hertzian 효과에 의해서 공진기의 방전 임피던스도 함께 변화한다. 이에 따라 공진기로 입사 또는 반사되는 고주파 에너지 값도 변화한다. 이 같은 변화를 결합 루프를 통해 검출하여 고주파 성분을 제거한 후 록인 안정기에서 발생시킨 오차신호를 기준신호로 사용하여 슬랩 레이저의 출력을 안정화하였다. 본 방법으로 안정화된 레이저의 출력 변동률이 0.2%로 개선됨을 확인하였다.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2008년도 추계학술대회 논문집
• /
• pp.753-754
• /
• 2008

• 한국레이저가공학회지
• /
• 제9권2호
• /
• pp.17-22
• /
• 2006

In this study, PID control method was applied to decrease the power fluctuation of the pulse laser which is one of the major processing variables in laser machining process. To stabilize the power fluctuation of the pulse laser, we averaged 10 pulse outputs of Nd:YAG laser operating in 10Hz using boxcar averager, and with taking this averaged output as an input signal, we conducted PID control using optical attenuator which is consisted of half wave plate attached on the stepping motor and polarizer. When PID control was not enabled, the power fluctuation was 4.71% and with PID control, the power fluctuation was 1.86% for 2 hours and 1 hour respectively. As a result, we stabilized the power fluctuation of the pulse laser by 60.5%

• 한국레이저가공학회:학술대회논문집
• /
• 한국레이저가공학회 2006년도 춘계학술발표대회 논문집
• /
• pp.89-96
• /
• 2006

In this study, PID control method was applied to decrease the power fluctuation of the pulse laser which is one of the major processing variables in laser machining process. To stabilize the power fluctuation of the pulse laser, we averaged 10 pulse outputs of Nd:YAG laser operating in 10Hz using boxcar averager, and with taking this averaged output as an input signal, we conducted PID control using optical attenuator which is consisted of half wave plate attached on the stepping motor and polarizer. When PID control was not enabled, the power fluctuation was 4.71% and with PID control, the power fluctuation was 1.86% for 2 hours and 1 hour respectively. As a result, we stabilized the power fluctuation of the pulse laser by 60.5%

• Journal of the Optical Society of Korea
• /
• 제2권1호
• /
• pp.1-4
• /
• 1998

The second harmonic light of an 842 nm diode laser was generated from a KNbO3 crystal in an external ring resonator. The power of the second harmonic light was about 0.8 mV at an input fundamental power of 87 mW. The laser frequency was stabilized to the resonance frequency of the ring resonator, and the frequency fluctuation was measured as about 3 MHz.

• 한국레이저가공학회지
• /
• 제11권2호
• /
• pp.33-38
• /
• 2008

Laser micromachining has increasingly been adopted in various advanced industries where the high-precision machining of large-area, high-density and multi-layered components is in a strong demand. To effectively meet the requirements, the laser micromachining process must be carefully monitored. In order to facilitate the development of a new laser micromachining process and/or a new system, we have fabricated a UV laser micromachining platform that is equipped with optical modules for monitoring the process online. They include a laser power stabilizing module, a module for laser-induced breakdown spectroscopy, and an auto-focusing module.

• 한국정밀공학회지
• /
• 제27권2호
• /
• pp.34-39
• /
• 2010

In order to achieve and maintain dimensional accuracy in laser micro-machining, dominant parameters such as laser power and laser focus position need to be monitored and controlled real time. Also, in order to selectively machine multi-layered materials, the material being presently machined need to be recognized. This paper presents an auto-focusing (AF) module to keep laser focus on a large-area surface; a real-time laser power stabilizing module based on optical attenuation; and a laser-induced breakdown spectroscopy (LIBS) module. With these monitoring modules, position error in laser focus on a 4" silicon wafer was kept below $4{\mu}m$, initially $51{\mu}m$, and laser power stability of a UV laser source was improved from 1.6% to 0.3%. Also, the material transition from polyimide to copper in machining of FCCL (flexible copper clad laminate) was successfully observed.