• 제목/요약/키워드: Laser position

검색결과 625건 처리시간 0.034초

PSD를 이용한 광학적 자동 촛점장치 (Optical Autofocus System for Wafer Steppers using PSD as the Position Sensor)

  • 박기수
    • 한국광학회지
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    • 제4권2호
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    • pp.157-161
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    • 1993
  • PSD(Position Sensitive Detector)를 위치센서로 사용하여 광학적 자동촛점 장치를 구성하여 그 특성을 조사하였다. 본 연구는 광 리소그라피 장비인 KrF 엑사이머 레이저 스템퍼를 모델로 개발 하였다. 광원으로 780nm인 반도체 레이저를 사용하였으며, 시준기, 반사경, 렌즈 등을 사용한 광학계를 구성하여 위치신호(position error signal)를 측정 하였으며, 분해능은 $0.03{\mu}m$이었다.

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Realization of High Precision Position Measurement System Using M-sequence Encoded Laser Beam Scanning

  • Takayama, Jun-ya;Shinji Ohyama;Akira Kobayashi
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2001년도 ICCAS
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    • pp.107.5-107
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    • 2001
  • In this report, as the active position measurement system, a new method for two-dimensional position measurement system using a concept of semi-open type signal field has proposed. The feature of this system is realizing a position measurement only by scanning the encoded laser beams from scanning points to a measurement field, and observed it. First, both system configuration and encoding method are considered concretely, and M-sequence signal is selected for encoding. Next system design is performed to realize the theoretical measurement accuracy, and applied to a position measurement experiments. Experimental results show that measurement precision is larger than theoretical values. Furthermore, method for improving the measurement ...

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화염증 CO2 Laser를 이용한 입자의 크기 및 형상 제어 (Control of Size and Morphology of Particles Using CO2 Laser in a Flame)

  • 이동근;이선재;최만수
    • 대한기계학회논문집B
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    • 제23권11호
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    • pp.1379-1389
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    • 1999
  • A new technique for control of size and shape of flame-made particles is Introduced. The characteristic sintering time can be controlled Independently of collision time by heating the particles with irradiation of laser because the sintering time strongly depends on temperature. A coflow oxy-hydrogen diffusion flame burner was used for $SiCl_4$ conversion to silica particle. Nanometer sized aggregates irradiated by a high power CW $CO_2$ laser beam were rapidly heated up to high temperatures and then were sintered to approach volume-equivalent spheres. The sphere collides much slower than the aggregate, which results in reduction of sizes of particles maintaining spherical shape. Light scattering of Ar ion laser and TEM observation using a local sampling device were used to confirm the above effects. When the $CO_2$ laser was irradiated at low position from the burner surface, particle generation due to gas absorption of laser beam occurred and thus scattering intensity increased with $CO_2$ laser power. At high irradiation position, scattering intensity decreased with $CO_2$ laser power and TEM image showed a clear mark of evaporation and recondensation of particles for high $CO_2$ laser power. When the laser was irradiated between the above two positions where small aggregates exist, average size of spherical particles obviously decreased to 58% of those without $CO_2$ laser irradiation with the spherical shape. Even for increased carrier gas flow rate by a factor of three, TEM photograph also revealed considerable reduction of particle size.

A Fast Map-matching Method using a Laser Range Finder

  • Moon, Jung-Hyun;You, Bum-Jae;Oh, Sang-Rok;Kim, Hag-bae
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2002년도 ICCAS
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    • pp.38.4-38
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    • 2002
  • We propose a fast map-matching algorithm based on the length and the slope for the sequence of lines extracted from a laser range finder and a map. After finding two feature set from laser data and a map, the position and heading of the mobile robot can be determined exactly.

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용접용 Nd:YAG 레이저의 개발과 응용 (Development of an Industrial Nd:YAG Laser and its Applications)

  • 김광석
    • 한국광학회:학술대회논문집
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    • 한국광학회 1989년도 제4회 파동 및 레이저 학술발표회 4th Conference on Waves and lasers 논문집 - 한국광학회
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    • pp.32-35
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    • 1989
  • A 150W industrial Nd:YAG laser was developed. The thermal lensing effect was examined and the radius and position of rear mirror were optimized for higher efficiency. The efficiency of 2.5% was achieved. Also, the performance of laser welding in fine thermocouples and between high-temperature-melting dissimilar metals were investigated.

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압전작동기를 이용한 레이져 스케닝 미러의 위치제어 (Position Control of Laser Scanning Mirror Using Piezoelectric Actuator)

  • 지학래;김재환;최승복
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1995년도 추계학술대회 논문집
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    • pp.442-445
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    • 1995
  • This paper presents the position tracking control of a laser scanning mirror system in which piezoelectic actuator is incorporated. Using the shear mode of the piezoelectric actuator,angular oscillation of a laser scanning mirror is derived. Torsion bar is rhen designed and attached to the piezoelctric actuator in order to magnify the amplitude generated by the actuator. Finite element modeling and analysis are essntial for designing the piezoelectic actuator. The torsional resonance mode of the piezoelectric actuator is found from the model analysis of the actuator and the mechanical shear is matched with the driving frequency. Transfer function between the electrical excitation and the mechanical shear deformation at resonance frequency is found form the response of the actuator calculated by the finite element analysis and the governing equation of the system is derived from d'Alembert's principle. Tracking control performance for desired trajectory which is, in fact, sinusoidal curve is presented in order to demonstrate the validity of the proposed system.

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높이 변화가 있는 막대기 용접선 추적용 시각센서 (Vision Sensor System for Weld Seam Tracking of I-Butt Joint with Height Variation)

  • 김무연;김재웅
    • Journal of Welding and Joining
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    • 제22권6호
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    • pp.43-49
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    • 2004
  • In this study, a visual sensor system which can detect I-butt weld joint with height variation and includes a seam tracking algorithm was investigated. Three-dimensional position of an object can be acquired by using the method of distance measurement, i.e., an optical trigonometry which results from the spatial relations between the camera, the object and the structured light by a visible laser. Effects of laser intensity and iris number for the image quality as well as object material were investigated for the optical system design. For the image processing, a region of interest is defined from the whole image and a line image of laser is drew by using the gray level difference in the image. From the drew laser line, the weld joint can be recognized in searching the biggest point position calculated from the central difference method. Through a series of welding experiments, a good tracking performance was confirmed under GMA welding.

저탄소 박판 강재의 Nd:YAG 레이저 용접부 형성에 미치는 공정변수의 영향 (Effect of Process Parameters on Bead Formation in Nd:YAG Laser Welding of Thin Steels)

  • 김기철;허재협
    • Journal of Welding and Joining
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    • 제19권3호
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    • pp.317-324
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    • 2001
  • This study deals with high power Nd:YAG laser welding of thin steels for small pressure vessels. Full penetration welding at the overlap joint was performed so as to assure sufficient weld strength. Results showed that mid-depth weld size reduced drastically with increasing the travel speed. Position of focus had little effect on the bead formation even though short focal system was used. However, the shape factor and the bead width had closely related with the position of focus. Based on the microstructural inspection, acceptable weld was obtained when the overlap clearance was controlled up to 20% of the base metal thickness. In the case that the joint contained more clearance than the critical value, both the tensile shear strength and the tear strength were reduced. Results also demonstrated that shielding gases were proved to play a key role as far as the bead formation characteristics was taken into consideration. Blowing dry air through 5mm in diameter nozzle produced narrower bead cross-section than that of argon or nitrogen shielding.

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Betatron Radiation of an Off-axis Injected Electron in a Laser Wakefield Accelerator

  • Hwang, Seok-Won;Lee, Hae-June
    • Journal of the Optical Society of Korea
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    • 제13권1호
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    • pp.86-91
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    • 2009
  • The electrons injected into a laser wakefield undergo betatron oscillation and give rise to the emission of intense X-ray radiation. To investigate the generation conditions of the X-rays, the relativistic motion of an electron injected in an off-axis position has been simulated with wakefield profiles which are pre-calculated with a two-dimensional particle-in-cell code. The wakefield with a plasma density of $1.78{\times}10^{18}\;cm^{-3}$ is generated by the laser with an intensity of $1.37{\times}10^{18}\;W/cm^2$ and a pulse width of 30 fs. From the calculation of the single particle motion, the characteristics of the betatron radiation are investigated in the time domain. As the transverse injection position increases, the power and the duration time of the radiation increase, but the width of each pulse decreases.

3D City Modeling Using Laser Scan Data

  • Kim, Dong-Suk;Lee, Kwae-Hi
    • 대한원격탐사학회:학술대회논문집
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    • 대한원격탐사학회 2003년도 Proceedings of ACRS 2003 ISRS
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    • pp.505-507
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    • 2003
  • This paper describes techniques for the automated creation of geometric 3D models of the urban area us ing two 2D laser scanners and aerial images. One of the laser scanners scans an environment horizontally and the other scans vertically. Horizontal scanner is used for position estimation and vertical scanner is used for building 3D model. Aerial image is used for registration with scan data. Those models can be used for virtual reality, tele-presence, digital cinematography, and urban planning applications. Results are shown with 3D point cloud in urban area.

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