• Journal of Biosystems Engineering
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• v.22 no.3
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• pp.269-278
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• 1997

An automatic level measurement system was developed to level the land fer direct seeding of rice. A laser transmitter/receiver set was used to measure land-level. The inclination error occurred in level measurement on irregular land surface could be compensated by attaching rotating mass. The level measuring experiments were performed on three kinds of different shapes(step, random, sine). This system could accurately measure step level of which amplitude was 40mm in 0.5s, random level change within $\pm$ 5mm maximum measurement error, and sine level change of which spatial frequency was 0.5m-1. To verify performance of the inclination error compensation system, frequency transfer function(acceleration input vs. inclination error) was computed by spectral analysis. The inclination error was decreased about 20㏈ by error compensation system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.756-760
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• 1997

In this research, the automatic level measurement system used in land leveling was developed. By using a laser transmitter and a receiver as measuring equipments, level was measured automatically. The driving part of this system was composed of stepping motor, timing belt and pulley. It drived the laser receiver to track laser beam generated form the laser transmitter. The level measuring experiments were performed about three level change shapes (step, random, sine). This system could measure step level change of which amplitude was 40mm in 0.5s, random level change within .+-. mm, maximum measurement error. In case of sine level change, experiment was executed with varying the spatial frequency of level change. As a result, this system was able to measure sine level change of which spatial frequency was 0.5m $^{-1}$ accurately.

• Korean Journal of Optics and Photonics
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• v.4 no.1
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• pp.15-21
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• 1993

This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.9 s.174
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• pp.147-154
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• 2005

A precision hi-directional actuator for a high precision leveling system with $Z{\Theta}_x{\Theta}_y$ motions is proposed and designed in this paper. The actuator is composed of a force generation structure, a guide mechanism, and a symmetric structure. At first, its driving force is generated by a change of flux in air gaps by permanent and changeable flux. The permanent flux is generated by a permanent magnet. The changeable flux is created by variable current flowing through coil. The combination of permanent and changeable flux makes various flux densities in air gaps between moving part and fixed yokes. And then, the difference between flux densities in lower and upper gaps creates forces fur the $bi-direction({\pm}z)$ motion. The guide mechanism of this actuator is composed of two circular plates and one shaft. Reducing motions generated by forces except z-motion, these circular plates endow the actuator with high stiffness for fast settling time. And the function of the shaft is to transfer motion to an object. At last, total body has a symmetric structure to be stable on thermal error. The actuator is designed by MAXWELL 2D and ProMECHANICA. The designed actuator is evaluated by 8nm laser doppler vibrometer, dynamic signal analyzer, and simple PID controller.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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• v.29 no.4
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• pp.393-403
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• 2011

In this study, we suggested the period of tide observations is proper to calculate the mean sea level(MSL) precisely on Incheon tide station using wavelet analysis, and newly determined then the vertical reference surface of Korea using the calculated MSL. In order to calculate the height difference between the calculated MSL and specific ground station (ICGP) near the Incheon tide stations, we performed the laser measurements directly to the sea surface where located below ICGP. The orthometric-height of ICGP was determined that corrected the height difference to the calculated MSL using linear interpolation method. Finally, we connected the orthometric-height of ICGP with the original benchmark (ORBM) using GPS leveling methods for determining the new orthometric-height of ORBM. As the results, there is a variation amount of 0.026m between the new MSL was calculated in this study and old MSL was calculated in 1910's. Also, there is a difference of 0.035m between the new and old orthometric-heights of ORBM. The connection (or leveling) error of 0.009m was revealed in new orthometric height of ORBM with consideration of MSL variation which may caused by the error of GPS ellipsoid height and/or geoid model. In this study, we could be determined precisely the orthometric-height of ORBM based on the new MSL of Incheon Bay using only GPS leveling method, not a spirit leveling method. Therefore, it is necessary to determine the vertical datum strictly using long-term and continuously tide observations more than 19 years and to use the GPS leveling method widely in the height leveling work for the effective changeover from the orthonormal to the orthometric in national height system.

• Journal of Korean Society for Geospatial Information Science
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• v.22 no.2
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• pp.25-32
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• 2014

The river plan executes the role for prevention of disaster and protection of environment, and requires the surveying results with high accuracies for managing river, dam, reservoir which will be the major infrastructures. The purpose of this study is for comparing and analyzing the results of river surveying which is used widely for disaster management and construction industry support. The results are gathered by using LiDAR which is being used in Korea recently and by using Total station. Study area is chosen at upper area of Bukhan River which is located at Gangwon-do. Total 2 cross-sections of the two methods are extracted from the study area. The standard deviation of land part is about 0.017m which shows little difference between two methods, but the Airborne LiDAR results cannot survey the heights of the points accurately at the singular points with vertical structure and water body part. To overcome the problems through this study, there should be ways to survey the bottom river through transmission of water level within the same margin scope as land part and to survey detailed facilities used by laser exactly through continuous research and experiment. When implementation stage comes, this study expect that this document will be utilized variously for making decision in the area of planning and drawing of business and engineering not just for river regarding the major area or the area that people cannot access.