• 제목/요약/키워드: Laser grating projection

검색결과 6건 처리시간 0.019초

Ultra High-speed 3-dimensional Profilometry Using a Laser Grating Projection System

  • Park, Yoon-Chang;Ahn, Seong-Joon;Kang, Moon-Ho;Kwon, Young-Chul;Ahn, Seung-Joon
    • Journal of the Optical Society of Korea
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    • 제13권4호
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    • pp.464-467
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    • 2009
  • The grating projection method with phase-shifting technique is very useful in measuring the 3-dimensional (3D) shape with high accuracy and speed. In this work, we have developed an ultra high-speed digital laser grating projection system using a high-power laser diode and a highsensitivity CMOS camera. With our system, the optical measurement required to find out the profile of a 3D object could be carried out within 2.6 ms, which is a significant ($\sim$10 times) improvement compared with those of the previous studies.

A High-speed Digital Laser Grating Projection System for the Measurement of 3-dimensional Shapes

  • Park, Yoon-Chang;Park, Chul-Geun;Ahn, Seong-Joon;Kang, Moon-Ho;Ahn, Seung-Joon
    • Journal of the Optical Society of Korea
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    • 제13권2호
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    • pp.251-255
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    • 2009
  • In the non-contact 3-dimensional (3D) shape measurements, the fringe pattern projection method based on the phase-shifting technique has been considered very effective for its high speed and accuracy. The digital fringe projector in particular has great flexibility in generating fringe patterns since the patterns can be controlled easily by the computer program. In this work, we have developed a high-speed digital laser grating projection system using a laser diode and a polygon mirror, and evaluated its performance. It has been demonstrated that all the optical measurements required to find out the profile of a 3D object could be carried out within 31 ms, which confirmed the validity of our 3D measurement system. The result implies the more important fact that the speed in 3D measurement can be enhanced remarkably since, in our novel system, there is no device like a LCD or DMD whose response time limits the measurement speed.

회전다면경을 이용한 줄무늬 격자 영사방법에 관한 연구 (A Study on the Grating Projection Method using Polygon Mirror)

  • 박윤창;정경민;장석준;박경근
    • 한국정밀공학회지
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    • 제18권6호
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    • pp.159-165
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    • 2001
  • Recently Moire and PMP(Phase Measuring Profilometry) are adopted as a practical methodology for non-contact 3-D measurement of free surface. These methods extract the 3-D informations from the images of the object projected with stripe-pattern light. This paper presents a simple projector generating stripe-pattern light using expensive polygon mirror. In this projector, slit-beam is generated with a Laser diode and a rod lens and the laser diode is switched on/off synchronizing with the rotation of the polygon mirror. So its structure is very simple and light-weighted compared to the existent projection methods using several lenses and it is also easy to change the pitch and the phase of the stripe pattern. Experimental results show that the intensity profile of the stripe pattern can be approximated with sinusoidal curve by reducing the pitch of the stripe pattern.

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Design of Diffraction Limited Head Mounted Display Optical System Based on High Efficiency Diffractive Elements

  • Tehrani, Masoud Kavosh;Fard, Sayed Sajjad Mousavi
    • Current Optics and Photonics
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    • 제1권2호
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    • pp.150-156
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    • 2017
  • A diffraction limited optical system for head mounted displays (HMDs) was designed. This optical system consists of four modules, including 1:5 mm and 5:30 mm beam expanders, polarization grating-polarization conversion system (PG-PCS) and refractive/diffractive projection optical module. The PG-PCS module transforms the unpolarized Gaussian beam to a linearly polarized beam and it simultaneously homogenizes the spatial intensity profile. The optical projector module has a $30^{\circ}$ field of view, a 22 mm eye relief, and a 10 mm exit pupil diameter with a compact structure. Common acrylic materials were utilized in the optical design process; therefore, the final optical system was lightweight. The whole optical system is suitable for a 0.7 inch liquid crystal on silicon microdisplay (LCOS) with HDTV resolution ($1920{\times}1080$) and $8.0{\mu}m$ pixel pitch.

KrF 엑시머 레이저를 이용한 웨이퍼 스텝퍼의 제작 및 성능분석

  • 이종현;최부연;김도훈;장원익;이용일;이진효
    • 한국광학회지
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    • 제4권1호
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    • pp.15-21
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    • 1993
  • 본 연구에서는 설계제작된 KrF 엑시머 레이저 스텝퍼는 광원인 KrF엑시머 레이저, 조명광학계, 축소트영광학계, 정밀구동 웨이퍼 스테이지, 정렬시스템 및 이들을 제어하기 위한 제어계로 구성되어 있다. 본 실험에서 사용한 KrFdprtlaj 레이저는 밴드폭 3pm, 반복주파수 200Hz, 평균축력 3W이고, 5:1 투영렌즈는 N.A. 0.42, 전체 필드영역 $\varphi$21.2mm, 왜곡수차 최대 60nm 이하이다. 또한 정밀구동 웨이퍼 스테이지의 재현성과 해상도는 각각 $\pm$0.08$\mu\textrm{m}$/200mm(3 sigma), 100mm 반경에서 0.05 $\mu\textrm{m}$이다. 자동 초점 시스템은 $\pm$50$\mu\textrm{m}$범위에서 0.1$\mu\textrm{m}$의 해상도를 나타냈으며, 자동수평시스템은 120 arcsec 범위에서 larcsec의 해상도를 나타냈다. OFF-AXIS 정렬방식에서는 0.2$\mu\textrm{m}$의 해상도를 가지며, 두빔의 간섭을 이용한 새로운 TTL 정렬은 0.1$\mu\textrm{m}$의 해상도를 나타냈다. 스텝퍼 패턴 실험결과 SAL603레지스트를 사용하였을 때 웨이퍼의 노광후 열처리 $105^{\circ}C$, 60초에서 0.3$\mu\textrm{m}$ Lines and Spaces(L/S)까지 해상되었으며, 0.34$\mu\textrm{m}$ L/S에서 1$\mu\textrm{m}$의 초점심도를 얻을 수 있었다. 마스크 패턴과 레지스트 패턴의 선형성은 0.4$\mu\textrm{m}$ L/S가지 유지 되었다. 또한 XP-89131레지스트의 경우 노광후 열처리 $110^{\circ}C$, 60초에서 0.34$\mu\textrm{m}$ L/S까지 해상됨을 알수 있었다.

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Holographic phase gratings in back- and frontlights for LCD's

  • Bastiaansen, C.W.M.;Heesch, C. van;Broer, D.J.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.421-421
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    • 2006
  • The light and energy-efficiency of classical liquid crystal displays is notoriously poor due to the use of absorption-based linear polarisers and colour filters. For instance, the light efficiency of PVAL polarisers is typically between 40 and 45 % and the colour filters have a typical efficiency below 35 % which results in a total light and energy-efficiency of the display below 10 %. In the past, a variety of polarizers were developed with an enhanced efficiency in generating linearly polarized light. Typically, these polarizers are based on the polarisationselective reflection, scattering or refraction of light i.e. one polarisation direction of light is directly transmitted to the LCD/viewer and the other polarization direction of light is depolarised and recycled which results in a typical efficiency for generating linearly polarized light of 70-85 %. Also, special colour filters have been proposed based on chiral-nematic reactive mesogens which increase the efficiency of generating colour. Despite the enormous progress in this field, a need persists for improved methods for generating polarized light and colour based on low cost optical components with a high efficiency. Here, the use of holographic phase gratings is reported for the generation of polarized light and colour. The phase grating are recorded in a photopolymer which is coated onto a backor frontlight for LCDs. Typically the recording is performed in the transmisson mode or in the waveguiding mode and slanted phase gratings are generated with their refractive index modulation at an angle between 20o and 45o with the normal of the substrate. It is shown that phase gratings with a high refractive index modulation and a high efficiency can be generated by a proper selection of the photopolymer and illumination conditions. These phase gratings coupleout linearly polarized light with a high contrast (> 100) and the light is directed directly to the LCD/viewer without the need for redirection foils. Dependent on the type of phase grating, the different colours are coupled-out at a slightly different angle which potentially increases the efficiency of classical colour filters. Moreover, the phase gratings are completely transparent in direct view which opens the possibility to use them in frontlights for LCDs. Holographic polarization gratings posses a periodic pattern in the polarization state of light (and not in the intensity of light). A periodic pattern in the polarization direction of linearly polarized light is obtained upon interference of two circularly polarized laser beams. In the second part of the lecture, it is shown that these periodic polarization patterns can be recorded in a linear photo-polymerizable polymer (LPP) and that such an alignment layer induces a period rotation in the director of (reactive and non-reactive) liquid crystals. By a proper design, optical components can be produced with only first order diffraction and with a very high efficiency (>0.98). It is shown that these diffraction gratings are potentially useful in projection displays with a high brightness and energy efficiency

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