• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.484-487
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• 2001

Amorphous carbon thin films were deposited using laser ablation technique on Si(100) substrates at different temperatures. In this study, effects of the substrate temperature on the properties of amorphous carbon films were systematically investigated. The surface morphologic and structural properties of the films were studied by scanning electron microscopy (SEM) and raman spectroscope, respectively. With increasing of the substrate temperature, the surface morphologies were changed singnificantly. Moreover the intensity ratio of D-band and G-band and the full width at half maximum of these bands were dependent on substrate temperatures.

• Journal of the Korean Society for Nondestructive Testing
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• v.34 no.3
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• pp.226-232
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• 2014

In the present study, the characteristics of laser ultrasound in the ablation regime are investigated using simulations and experiments. The laser ultrasonic technique has been recognized as a noncontact method in the field of nondestructive tests (NDTs). In hostile environments (such as hot temperatures), this method has various advantages over the conventional contact ultrasonic method. In particular, in the ablation regime, the laser ultrasonic technique is suitable for inspecting internal defects because of the high amplitude and directivity of the longitudinal wave. In this paper, a simulation model for laser ultrasound in the ablation regime was developed. This model was subsequently applied to a defective specimen using the B-scan method to locate defects. Finally, we performed an experimental test to verify the simulation results. Consequently, the simulation demonstrated good agreement with the experimental test.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.11a
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• pp.6.2-6.2
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• 2009

Nanostructured materials arecurrently receiving much attention because of their unique structural andphysical properties. Research has been stimulated by the envisagedapplications for this new class of materials in electronics, optics, catalysisand magnetic storage since the properties derived from nanometer-scalematerials are not present in either isolated molecules or micrometer-scalesolids. This study presents the experimental results derived fromthe various functional materials processed in nano-scale using pulsed laserablation, since those materials exhibit new physical phenomena caused by thereduction dimensionality. This presentation consists of three mainparts to consider in pulsed laser ablation (PLA) technique; first nanocrystallinefilms, second, nanocolloidal particles in liquid, and third, nanocoating fororganic/inorganic hybridization. Firstly, nanocrystalline films weresynthesized by pulsed laser deposition at various Ar gas pressures withoutsubstrate heating and/or post annealing treatments. From the controlof processng parameters, nanocystalline films of complex oxides and non-oxidematerials have been successfully fabricated. The excellentcapability of pulsed laser ablation for reactive deposition and its ability totransfer the original stoichiometry of the bulk target to the deposited filmsmakes it suitable for the fabrication of various functionalmaterials. Then, pulsed laser ablation in liquid has attracted muchattention as a new technique to prepare nanocolloidal particles. Inthis work, we represent a novel synthetic approach to directly producehighly-dispersed fluorescent colloidal nanoparticles using the PLA from ceramicbulk target in liquid phase without any surfactant. Furthermore, novel methodbased on simultaneous motion tracking of several individual nanoparticles isproposed for the convenient determination of nanoparticle sizedistributions. Finally, we report that the GaAs nanocrystals issynthesized successfully on the surface of PMMA (polymethylmethacrylate)microspheres by modified PLD technique using a particle fluidizationunit. The characteristics of the laser deposited GaAs nanocrytalswere then investigated. It should be noted that this is the first successfultrial to apply the PLD process nanocrystals on spherical polymermatrices. The present process is found to be a promising method fororganic/inorganic hybridization.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1572-1577
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• 2003

High-power pulsed laser ablation under atmospheric pressure is studied utilizing numerical and experimental methods with emphasis on recondensation ratio, and the dynamics of the laser induced vapor flow. In the numerical calculation, the temperature pressure, density and vaporization flux on a solid substrate are first obtained by a heat-transfer computation code based on the enthalpy method, and then the plume dynamics is calculated by using a commercial CFD package. To confirm the computation results, the probe beam deflection technique was utilized for measuring the propagation of a laser induced shock wave. Discontinuities of properties and velocity over the Knudsen layer were investigated. Related with the analysis of the jump condition, the effect of the recondesation ratio on the plume dynamics was examined by comparing the pressure, density, and mass fraction of ablated aluminum vapor. To consider the effect of mass transfer between the ablation plume and air, unlike the most previous investigations, the equation of species conservation is simultaneously solved with the Euler equations. Therefore the numerical model computes not only the propagation of the shock front but also the distribution of the aluminum vapor. To our knowledge, this is the first work that employed a commercial CFD code in the calculation of pulsed ablation phenomena.

• Transactions of Materials Processing
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• v.11 no.7
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• pp.601-607
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• 2002

Optically transparent materials such as fused silica, quartz and crystal have become important in the filed of optics and optoelectronics. Laser ablation continues to grow as an important technique for micromachining and surface modification of various materials, because many problems caused by direct contact between tools and workpiece can be avoided. Especially, laser ablation with excimer lasers enables fine micromachining of transparent materials such as fused silica, quartz and crystal, etc. In this study, laser-induced wet etching of fused silica in organic solution was conducted. KrF excimer laser was used as a light source and acetone solution of pyrene was used as etchant. Changing the number of laser pulses, micro holes of various depths are fabricated.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.10
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• pp.105-110
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• 2020

Radioactive Oxides are formed on the surface of the primary equipment in a nuclear power plant. In order to remove the oxide film that is formed on the surfaces of the equipment, chemical and physical decontamination technologies are used. The disadvantage of traditional technologies is that they produce secondary radioactive wastes. Therefore, in this study, the short-pulsed laser eco-friendly technology was used in order to reduce production of the secondary radioactive wastes. They were also used to minimize the damages that were caused on the base material and to remove the contaminated oxide film. The study was carried out using a Stainless steel 304 specimen that was coated with nickel-ferrite particles. Further, the laser source was selected with two different wavelengths. Furthermore, the depth of the coating layer was analyzed using a 3D laser microscope by changing the laser ablation conditions. Based on the analysis, the optimal conditions of ablation were determined using a 1064nm short-pulsed laser ablation technique in order to remove the radioactively contaminated oxide film from the irradiated stainless steel surface.

• Proceedings of the KIEE Conference
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• 2005.07c
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• pp.2163-2165
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• 2005

A pulsed laser ablation deposition (PLAD) technique has been used for producing fine particle as well as thin film at relatively low substrate temperatures. However, in order to manufacture and evaluate such materials in detail, motions of plume particles generated by laser ablation have to be understood and interactions between the particles by ablation and gas plasma have to be clarified. Therefore, this paper was focused on the understanding of plume motion in laser ablation assisted by Ar plasma at 50(mTorr). Two-dimensional hybrid model consisting of fluid and particle models was developed and three kinds of plume particles which are carbon atom (C), ion $(C^+)$ and electron were considered in the calculation of particle method It was obtained that ablated $C^+$ was electrically captured in Ar plasmas by strong electric field (E). The difference between motions of the ablated electrons and $C^+$ made E strong and the collisional processes active.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.7 s.178
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• pp.1847-1853
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• 2000

A computer simulation technique for 2-dimensional laser generated ultrasonic waves was developed for visualization and investigation of ultrasonic propagation in solids. The technique is similar to a finite difference method (FDM) and a mass-particle model method, but uses a new nodal calculation method based on fundamental consideration of an elastic wave equation. By this method, the propagation behavior oflaser generated ultrasonic wave in thermoelastic and ablation mode is visualized and shows good agreement with previous experimental result or the numerical analysis result by Green function.

• Journal of the Microelectronics and Packaging Society
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• v.14 no.3
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• pp.29-36
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• 2007

The main objectives of this study are to investigate the micro-scale energy transfer mechanism for silicon wafer and to find an efficient way for fabrication of silicon wafer through-hole by using the femtosecond pulse laser ablation. In addition, the electron-phonon interactions during laser irradiation are discussed and the carrier number density and temperatures are estimated. In particular, the present study observes the shapes of silicon wafer through-hole with $100\;{\mu}m$ diameter and it also measures the heat-affected area and the ablation depths fur different laser fluences by using the optic microscope and the three-dimensional profile measurement technique. First, from numerical investigation, it is found that the nonequilibrium state exists between electrons and phonons during laser irradiation. From experimental results, it should be noted that the heat-affected area increases with laser fluence, and the optimal conditions for through-hole formation with minimum heat affected zone are finally obtained.

• Korean Journal of Materials Research
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• v.4 no.4
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• pp.401-405
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• 1994

The chemical composition and electrical properties were investigated for epitaxially crystallized $(Ba_{0.5}Sr_{0.5})Tio_3$ (BST) films deposited on Pt and $YBa_Cu_3O_{7-x}$(YBCO) electrodes by laser ablation technique. The crystalline quality of the heteroepitaxial BST films deposited on Pt bottom electrode was found to be better than that of BST film on YBCO electrode by the RBS analysis. Films deposited at $600^{\circ}C$ on Pt electrode showed a dielectric constant of 320 and a dissipation factor of 0.023 at 100kHz. Leakage current density of BST films on Pt electrode was smaller than that on YBCO bottom electrode. Their leakage current density was about 0.8$\mu \; A/ \textrm{cm}^2$ at an applied electric field of 0.15MV/cm.