• Title/Summary/Keyword: Laser ablation process

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The Study of formation of LiCoO$_2$thin film electrode by RF-MSP (RF-MSP에 의한 LiCoO$_2$박막전극의 형성에 관한 연구)

  • 김상필;이우근;김익수;하홍주;박정후;조정수
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1995.11a
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    • pp.167-170
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    • 1995
  • LiCoO$_2$is a electrode material of Li ion Cell which is expected as the cell with a very high electric charge density. The recent study is mainly to focused on a high power secondary cell. If very thin Li ion Cell can be made in the scale of IC substrate it can be a electric souse in IC chip , micro machine or very thin electrical display etc. LiCoO$_2$thin film can be made by CVD, Laser ablation, E-Beam, ton Beam process, sputtering etc. But to make the material with a high quality for a cell is difficult as the electrode in cell have the fitable ratio in components and a lattice structure of bulk etc. In this study, LiCoO$_2$is made by R.F magnetron sputtering with the variance of substrate temperature and oxygen partial pressure etc. In the substrate temperature of 600$^{\circ}C$ and the oxygen rate of 10%, we can acquire the good thin film LiCoO$_2$compared wish a bulk material.

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New Mechanism of Thin Film Growth by Charged Clusters

  • Hwang, Nong-Moon;Kim, Doh-Yeon
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1999.06a
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    • pp.115-127
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    • 1999
  • The charged clusters or particles, which contain hundreds to thousands of atoms or even more, are suggested to form in the gas phase in the thin film processes such as CVD, thermal evaporation, laser ablation, and flame deposition. All of these processes are also used in the gas phase synthesis of the nanoparticles. Ion-induced or photo-induced nucleation is the main mechanism for the formation of these nanoclusters or nanoparticles inthe gas phase. Charged clusters can make a dense film because of its self-organizing characteristics while neutral ones make a porous skeletal structure because of its Brownian coagulation. The charged cluster model can successfully explain the unusual phenomenon of simultaneous deposition and etching taking place in diamond and silicon CVD processes. It also provides a new interpretation on the selective deposition on a conducting material in the CVDd process. The epitaxial sticking of the charged clusters on the growing surface is gettign difficult as the cluster size increases, resulting in the nanostructure such as cauliflowr or granular structures.

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Micro Metal Powder Injection Molding in the W-Cu System (W-Cu의 마이크로 금속분말사출성형)

  • 김순욱;양주환;박순섭;김영도;문인형
    • Journal of Powder Materials
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    • v.9 no.4
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    • pp.267-272
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    • 2002
  • The production of micro components is one of the leading technologies in the fields of information and communiation, medical and biotechnology, and micro sensor and micro actuator system. Microfabrication (micromachining) techniques such as X-ray lithography, electroforming, micromolding and excimer laser ablation are used for the production of micro components out of silicon, polymer and a limited number of pure metals or binary alloys. However, since the first development of microfabrication technologies there have been demands for the cost-effective replication in large scale series as well as the extended range of available material. One such promising process is micro powder injection molding (PIM), which inherits the advantages of the conventional PIM technology, such as low production cost, shape complexity, applicability to many materials, applicability to many materials, and good tolerance. This paper reports on a fundamental investigation of the application of W-Cu powder to micro metal injection molding (MIM), especially in view of achieving a good filling and a safe removal of a micro mold conducted in the experiment. It is absolutely legitimate and meaningful, at the present state of the technique, to continue developing the micro MIM towards production processes for micro components.

New mechanism of thin film growth by charged clusters

  • Hwang, Nong-Moon;Kim, Doh-Yeon
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.9 no.3
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    • pp.289-294
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    • 1999
  • The charged clusters or particles, which contain hundreds to thousands of atoms or even more, are suggested to from in the gas phase in the thin film processes such as CVD, thermal evaporation, laser ablation, and flame deposition. All of these processes are also phase synthesis of the nanoparticels. Ion-induced or photo-induced nucleation is the main mechanism for the formation of these nanoclusters or nanoparticles in the gas phase. Charge clusters can make a dense film because of its self-organizing characteristics while neutral ones make a porous skeletal structure because of its Brownian coagulation. The charged cluster model can successfully explain the unusual phenomenon of simultaneous deposition and etching taking place in diamond and silicon CVD processes. It also provides a new interpretation on the selective deposition on a conducting material in the CVD process. The epitaxial sticking of the charged clusters on the growing surface is getting difficult as the cluster size increases, resulting in the nanostructure such as cauliflower or granular structures.

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Analysis of the Concentration of Metal Elements in Freshwater Fish Otolith Using LA-ICP/MS (LA-ICP/MS를 이용한 담수 어류 이석 내 금속 원소 농도 분석)

  • Park, Hyun Woo;Yoon, Suk-Hee;Park, Jaeseon;Lim, Bo-Ra;Lee, Hyeri;Choi, Jong Woo
    • Korean Journal of Ecology and Environment
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    • v.52 no.4
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    • pp.324-332
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    • 2019
  • In this study, the possibility of a follow-up study on environmental pollution in domestic freshwater was identified by analyzing fish otoliths using Laser ablation-inductively coupled mass spectrometry (LA-ICP/MS). Fish otolith are known to be affected by the environment in which fish live. As a result, research on this subject is active in many countries; however, this is not the case in Korea. Therefore, in this study, the possibility of tracing environmental pollution using fish otoliths was identified by analyzing the components of metal elements used as indicators for environmental pollution. For the component analysis of metallic elements LA-ICP/MS, which can shorten analysis time by reducing the pretreatment process, was used. Sampling was conducted by dividing the research and the background area and carp, a freshwater species, was selected as the experimental fish species subject. Based on the established LA-ICP/MS conditions, the concentration of the metallic elements in the fish otoliths collected in the research area was 2202.9 mg kg-1, 2.03 times higher than the 1,086.3 mg kg-1 in the background area. All elements except for Li and U, were found to be higher in the research area than in the background area. Compared with the sediment measuring net analysis data, the distribution tendency of Zn, Pb, and Cu in sediment metal element concentrations in the two regions and distribution of metal element concentration in fish otoliths were similarly shown. These results confirm that fish otoliths can be used to track environmental pollutants, such as in sediments.