• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.6
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• pp.551-557
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• 2002

Carbon nitride films have been deposited on Si(100) substrate by a high voltage discharge plasma combined with laser ablation in a nitrogen atmosphere. The films were grown both with the without the presence of an assisting focused Nd:YAG laser ablation. The laser ablation of the graphite target leads to vapor plume plasma expending into th ambient nitrogen arc discharge area. X-ray photoelectron spectroscopy and Auger electron spectroscopy were used to identify the binding structure and the content of the nitrogen species in the deposited films. The nitrogen content of the films was found to increase drastically with an increase of nitrogen pressure. The surface morphology of the films was studied using a scanning electron microscopy. Data of infrared spectroscopy and x-ray photoelectron spectroscopy indicate the existence of carbon-nitrogen bonds in the films. The x-ray diffraction measurements have also been taken to characterize the crystal properties of the obtained films.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.5-8
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• 2000

The population density of excited species in dc, rf and laser ablation plume plasmas has been measured using laser absorption spectroscopy. It was shown that, when the plasma was modulated by on and off with, the sensitivity and signal to noise (S/N) ratio became high. For example, the atomic O(3$^{5}$ S$^{o}$ $_2$) Population density, No* in $O_2$/He mixtures was obtained by the highest S/N ratio at a frequency of 2.7kHz. In a 20Torr room air, the lowest No* level to be detectable was shown to be an order of 10$^{7}$ cm$^{-3}$ . The population densities of resonance Ar(1S$_2$) and Xe(1S$_4$) levels were also measured in barrier discharges and laser ablation plasmas.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.48 no.6
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• pp.479-487
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• 2020

A new double-pulse laser system that combines Raman and laser induced plasma spectroscopy (LIPS) in a single unit is proposed. The study attempts to enhance the laser induced plasma signals while simultaneously extracting the desired molecular signals from Raman spectroscopy. In low pressure conditions such as the lunar atmosphere, the measuring of plasma emission is hard because of the low electron density and short persistence time causing a rapid plasma expansion. Furthermore, in the integration of the detecting system aimed at space exploration, the minimization of laser system is important in terms of the payload mass. Simultaneous molecular and atomic detection that gave highly resolved spectral data at pressure below 0.07 torr is demonstrated amongst eight rock samples test. The plasma stacking produced from the double-pulse laser enhanced the signal intensity of calcium and oxygen lines in calcite matrix by twofold, compared to a conventional LIPS.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.240-243
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• 2002

Carbon nitride films have been deposited on Si(100) substrate by a high voltage discharge plasma combined with laser ablation in a nitrogen atmosphere. The films were grown both with and without the Presence of an assisting focused Nd:YAG laser ablation. The laser ablation of the graphite target leads to vapor Plume plasma expending into the ambient nitrogen arc discharge area. X-ray photoelectron spectroscopy and Auger electron spectroscopy were used to identify the binding structure and the content of the nitrogen species in the deposited films. The surface morphology of the films was studied using a scanning electron microscopy Data of infrared spectroscopy and x-ray photoelectron spectroscopy indicate the existence of carbon-nitrogen bonds in the films. The x-ray diffraction measurements have also been taken to characterize the crystal properties of the obtain films.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.19 no.2
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• pp.9-17
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• 2020

In this study, the surface changes of titanium alloy using laser surface treatment and the surface analysis using laser-induced plasma spectroscopy were carried out. The laser surface treatment induced changes in surface roughness and the diffusion of atmospheric elements. Excessive melting or less melting caused roughness changes, but when moderate levels of energy were applied, a smoother surface could be obtained than the initial surface. In the process, the diffusion of atmospheric elements took place. To analyze the diffusion of atmospheric elements with respect to surface morphology, the surfaces were re-shaped with grinding. In this experimental conditions, the effect of plasma formation by surface roughness was identified. Compensated plasma signals for the material properties were obtained and analysed by removing the background plasma signal.

• Analytical Science and Technology
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• v.32 no.4
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• pp.121-130
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• 2019

Alumina is one of the most important ceramic materials because of its useful physical and chemical properties. Recently, high-purity alumina has been used in various industrial fields. This leads to increasing demand for reliable elemental analysis of impurities in alumina samples. However, the chemical inertness of alumina makes the sample preparation for conventional elemental analysis a tremendously difficult task. Herein, we demonstrated the feasibility of laser ablation for effective sampling of alumina powder. Laser ablation performs sampling rapidly without any chemical reagents and also allows simultaneous optical emission spectroscopy and mass spectrometry analyses. For six alumina samples including certified reference materials and commercial products, laser-induced breakdown spectroscopy (LIBS) and laser-ablation inductively-coupled plasma mass spectrometry (LA-ICP-MS) analyses were performed simultaneously based on a common laser ablation sampling. LIBS was found to be useful to quantify alkali and alkaline earth metals with limits-of-detection (LODs) around 1 ppm. LA-ICP-MS could quantify transition metals such as Ti, Cu, Zn, and Zr with LODs in the range from a few tens to hundreds ppb.

• 한국연소학회:학술대회논문집
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• 2013.06a
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• pp.99-101
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• 2013

The equivalence ratio is measured by LIBS(Laser-induced Breakdown spectroscopy) in hydrocarbon flame and high temperature (${\sim}3200^{\circ}C$) oxyhydrogen flame, where a stoichiometric mixture of hydrogen and oxygen is produced from water through electrolysis. The ratio of the hydrogen and oxygen (H/O) atomic lines intensities is used for quantitatively determining the quivalence ratio. laser energy is evaluated for determining the optimal condition for plasma diagnostics. The minimum laser energy for generating plasma in a laminar premixed hydrocarbon flame was about 70 mJ, whereas oxyhydrogen flame. consequently the irradiated spot of a lower density in high temperature oxyhydrogen flame gave rise to bigger plasma in size, thus limiting the spatial resolution of the LIBS measurement.

• Analytical Science and Technology
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• v.8 no.4
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• pp.779-786
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• 1995

Environmental and industrial aerosols can be analyzed on-line by laser plasma spectroscopy. The main problem in direct (no preparation or presorting) aerosol analysis is the extensive spectral fluctuations. A method to partially solve this problem is proposed. It is based on single shot measurements and application of a special rejection algorithm. The major factors that influence the spectral variations are discussed, in relation to the correction possibility by a rejection program. The method works well when average intensity of the single spectra is relatively high, as compared to detector's saturation limit. If intensities are too low, the accumulation of readout noise is critical, and no improvement is expected.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.147.1-147.1
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• 2016

Hydrophobic thin films are variously applicable for encapsulation of organic devices and water repulsive glass, etc. In this work, the stability of hydrophobic characteristics of plasma polymerized tetrakis (trimethylsilyloxy) silane (ppTTMSS) thin films were investigated. The films were deposited with plasma enhanced chemical vapor deposition (PECVD) on the glass. The deposition plasma power and deposition pressure was 70 W and 600 mTorr, respectively. Thereafter, deposited films were treated by 248nm KrF excimer laser. Stability of hydrophobic properties of plasma polymerized tetrakis(trimethylsilyloxy)silane film surface was tested by excimer laser irradiation, which is thought to simulate severe outdoor conditions. Excimer laser irradiation cycles changed from 10 to 200 cycles. The chemical structure and hydrophobicity of ppTTMSS films were analyzed by using Fourier transform infrared (FTIR) spectroscopy and water contact angle (WCA) measurement, respectively. Absorption spectra peaks and WCA of excimer laser treated ppTTMSS films did not change notably. These results show that our ppTTMSS films possess stable hydrophobic properties.

• Analytical Science and Technology
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• v.33 no.2
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• pp.86-97
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• 2020

Reconstruction and separation of explosive-contaminated overlapping fingerprints constitutes an analytical challenge of high significance in forensic sciences. Laser-induced breakdown spectroscopy (LIBS) allows real-time chemical mapping by detecting the light emissions from laser-induced plasma and can offer powerful means of fingerprint classification based on the chemical components of the sample. During recent years LIBS has been studied one of the spectroscopic techniques with larger capability for forensic sciences. However, despite of the great sensitivity, LIBS suffers from a limited detection due to difficulties in reconstruction of overlapping fingerprints. Here, the authors propose a simple, yet effective, method of using chemical mapping to separate and reconstruct the explosive-contaminated, overlapping fingerprints. A Q-switched Nd:YAG laser system (1064 nm), which allows the laser beam diameter and the area of the ablated crater to be controlled, was used to analyze the chemical compositions of eight samples of explosive-contaminated fingerprints (featuring two sample explosive and four individuals) via the LIBS. Then, the chemical validations were further performed by applying the Raman spectroscopy. The results were subjected to principal component and partial least-squares multivariate analyses, and showed the classification of contaminated fingerprints at higher than 91% accuracy. Robustness and sensitivity tests indicate that the novel method used here is effective for separating and reconstructing the overlapping fingerprints with explosive trace.