• 제목/요약/키워드: Laser Patterning

검색결과 187건 처리시간 0.022초

펨토초 레이저를 이용한 플렉시블 ITO 패터닝 연구 (Femtosecond laser pattering of ITO film on flexible substrate)

  • 손익부;김영섭;노영철
    • 한국레이저가공학회지
    • /
    • 제13권1호
    • /
    • pp.11-15
    • /
    • 2010
  • Indium tin oxide (ITO) provides high electrical conductivity and transparency in the visible and near IR (infrared) wavelengths. Thus, it is widely used as a transparent electrode for the fabrication of liquid crystal displays (LCDs) and organic light emitting diode displays (OLRDs), photovoltaic devices, and other optical applications. Lasers have been used for removing coating on polymer substrate for flexible display and electronic industry. In selective removal of ITO layer, laser wavelength, pulse energy, scan speed, and the repetition rate of pulses determine conditions, which are efficient for removal of ITO coating without affecting properties of the polymer substrate. ITO coating removal with a laser is more environmentally friendly than other conventional etching methods. In this paper, pattering of ITO film from polymer substrates is described. The Yb:KGW femtosecond laser processing system with a pulse duration of 250fs, a wavelength of 1030nm and a repetition rate of 100kHz was used for removing ITO coating in air. We can remove the ITO coating using a scanner system with various pulse energies and scan speeds. We observed that the amount of debris is minimal through an optical and a confocal microscope, and femtosecond laser pulses with 1030nm wavelength are effective to remove ITO coating without the polymer substrate ablation.

  • PDF

PC 기판상에 스퍼터링된 투명전도 산화막의 레이저 식각 특성 (Laser Direct Etching on Transparent Conductive Oxide Films Sputtered on Polycarbonate Substrates)

  • 이정민;권상직;조의식
    • 한국전기전자재료학회논문지
    • /
    • 제27권3호
    • /
    • pp.146-150
    • /
    • 2014
  • As a method of simple patterning of transparent conductive oxide (TCO) films deposited on flexible substrates, laser direct etching was carried out on TCO films sputtered on polycarbonate (PC) substrates. As a result of different binding energies in TCO films, indium tin oxide (ITO) and indium gallium zinc oxide (IGZO) were more easily etched than zinc oxide with different $Nd:YVO_4$ laser beam conditions.

Ablation of Polypropylene for Breathable Packaging Films

  • Sohn, Ik-Bu;Noh, Young-Chul;Choi, Sung-Chul;Ko, Do-Kyeong;Lee, Jong-Min;Choi, Young-Jin
    • 한국레이저가공학회지
    • /
    • 제9권3호
    • /
    • pp.15-21
    • /
    • 2006
  • A Polypropylene (PP) film was ablated using a femtosecond laser with a center wavelength of 785 nm, a pulse width of 184 fs and a repetition rate of 1 kHz. Increments of both pulse energy and the shot number of pulses lead to co-occurrence of photochemical and thermal effect, demonstrated by the spatial expansion of rim on the surface of PP. The shapes of the laser-ablated PP films were imaged by a scanning electron microscope (SEM) and measured a 3D optical measurement system (NanoFocus). And, the oxygen transmission rate (ORT) of periodically laser-ablated PP film were characterized by oxygen permeability tester for modified atmosphere packaging (MAP) of fresh fruit and vegetable. Our results demonstrate that femtosecond pulsed laser is efficient tools for breathable packaging films in modifying the flow of air and gas into and out of a fresh produce container, where the micropatterns are specifically tailored in size, location and number which are easily controlled by laser pulse energy and pulse patterning system.

  • PDF

레이저에 의해 패터닝 된 바늘과 탄성중합체와의 마찰 효과 (Investigation of friction effects between needles patterned using laser and elastomer)

  • 김재구;노승국;박종권;조성학;황경현
    • 한국레이저가공학회지
    • /
    • 제15권3호
    • /
    • pp.1-6
    • /
    • 2012
  • The friction force of patterned needle in elastomer have been investigated to verify the application for bio and plastic industry. The micro pattern on the needle surface were prepared by 266 nm, 20 ns laser and 800 nm, 220 fs laser, which were able to generate the different surface roughness. The friction force was measured by the load cell of 10 N capacity. As the results, the friction force of no patterned needle is almost constant during the needle penetrates the silicone rubber sample. However, the needle having asperities shows the variation of the friction force. The higher the surface roughness is, the smaller the friction force is until the surface roughness is very high. In our experiment conditions, the reduction of the friction force by 20 % compared to no pattern needle was achieved with straight and $50{\mu}m$ discrete line generated by 266 nm, 20 ns laser.

  • PDF

고밀도 기록을 위한 레이저 타이핑 공정 개발 (Development of Laser Typing Process for the High Density Recording)

  • 주영철;송오성;정영순
    • 한국산학기술학회논문지
    • /
    • 제4권3호
    • /
    • pp.317-321
    • /
    • 2003
  • 우리가 타자기로 글을 쓸 때는 먹지리본을 햄머가 가격하여 종이 위에 글씨 형태의 먹이 묻는 원리로 진행된다. 이러한 원리를 미세 패터닝에 응용하여, 해머 역할을 하는 Nd-YAG 레이저로 유리기판/ 100 ㎚ Cr(먹지)// 실리콘기판(종이)구조의 적층물에 조사시켜 Cr이 실리콘기판 위에 전사됨으로써 미세 패터닝이 가능한지 확인하였다. 제안된 미세 패터닝은 TeraBit/in²급 고밀도 정보저장 또는 반도체 공정의 생산성 향상을 위해 응용이 가능하다. 선폭 50 ㎛급 레이저를 주사속도 200과 1500 ㎜/s Q-스위치 조건을 10,000-50,000 Hz로 변화시키며 마킹을 실시한 결과 Cr의 전사는 진행되지 않았으나, 최종적으로 입사 선폭의 33% 이하로 마킹이 가능하여 비싼 광학계를 가진 레이저를 대치하여 보다 정밀한 마킹이 가능함을 확인하였다.

  • PDF

집속 아르곤 이온 레이저 빔을 이용한 레이저 유도 직접 구리 패터닝 (Laser-Induced Direct Copper Patterning Using Focused $Ar^+$ Laser Beam)

  • 이홍규;이경철;안민영;이천
    • 한국전기전자재료학회논문지
    • /
    • 제13권11호
    • /
    • pp.969-975
    • /
    • 2000
  • Laser direct writing of micro-patterned copper lines has been achieved by pyrolytic decomposition of copper formate films (Cu(HCOO)$_2$.4$H_2O$), as a metallo-organic precursor, using a focused CW Ar$^{+}$ laser beam (λ=514nm) on PCB boards and glass substrates. The linewidth and thickness of the lines wee investigated as a functin of laser power and scan speed. The profiles of the lines were measured by scanning electron microscope (SEM), surface profiler ($\alpha$-step) and atomic force measured by scanning electron microscope (SEM), surface profiler ($\alpha$-step) and atomic force microscopy (AFM). The electrical resistivities of the patterned lines were also investigated as a function of laser parameters using probe station and semiconductor analyzer. We compared resistivities of the patterned copper lines with these of the Cu bulk. Resistivities decreased due to changes in morphology and porosity of the deposit, which were about 3.8 $\mu$$\Omega$cm and 12$\mu$$\Omega$cm on PCB and glass substrates after annealing at 30$0^{\circ}C$ for 5 minutes.s.

  • PDF

Laser Groove 표면의 젖음 특성에 관한 연구 (Wettability Characteristics of the Laser Grooved Surfaces)

  • 장무연;김태완
    • Tribology and Lubricants
    • /
    • 제35권5호
    • /
    • pp.294-299
    • /
    • 2019
  • Most previous studies on water repellent surfaces using lasers rely on the use of pico- or femtosecond lasers. However, in industrial application, these methods have the disadvantages of high cost and low efficiency. In this study, we implement a hydrophobic surface using a high-power general-purpose diode laser. We have fabricated the microsurface using laser groove processing technology, and we present the correlation of wettability characteristics with space and width. The metal material is stainless steel (SUS 304), and the groove height during laser processing is set to $30{\mu}m$ to evaluate the wettability based on the gap and width of various grooves. Results show that the contact angle of the groove-shaped surface is increased by $40^{\circ}$ or more as compared with the surface without patterning, and the contact angle in the parallel direction is greater than that in the perpendicular direction. Results from contact angle hysteresis measurement experiments show that the groove width has a greater influence on the contact angle history than does the gap between grooves. In addition, the coating reveals that the contact angle can be increased using a chemical method and that the laser grooving process can further improve the wetting properties of the surface.