• 한국정밀공학회지
• /
• 제31권3호
• /
• pp.181-187
• /
• 2014

Micro patterns are used to maximize the performance and efficiency of the product in many industries such as energy, display, printing, biology, etc. Nowadays, the fabrication technology for micro patterns has been developed in various ways such as photolithography, laser machining, electrical discharge machining and mechanical machining. Recently, mechanical machining the size of smaller than 1 micrometer could be tried, because the technology related to the machining was developed brilliantly. This paper shows the experiments using cutting processes in order to fabricate the micro pattern. Micro patterns of the size of several micrometers were machined by the diamond tools of two different shape, the deformation and generation of burr were investigated.

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
• /
• pp.591-596
• /
• 2000

The needs of ultra precision machined parts is increase every days. But the experimental data of nonferrous metal is insufficient. The cutting behavior in micro cutting area is different from that of traditional cutting because of the size effect. Al6061 is widely used as optical parts such as LASER reflector's mirror or multimedia instrument. Al6061 opper is machined by ultra precision machine with natural diamond tool. From the experiment and discussion on the cutting force and worked surface roughness as the variable spindle speed, feed rate and depth of cut. As a result, the cutting force increases as the increasing depth of cut, but the worked surface roughness does not increase so much. The surface roughness is good when spindle sped is above 1200rpm, and feed rate is small. The influence of depth of cut is very small.

• 한국진공학회지
• /
• 제16권1호
• /
• pp.74-78
• /
• 2007

전자 산업의 발달과 더불어 더욱 더 작은 구조물의 제작을 위한 새로운 물질공정 기술에 대한 수요가 증가하고 있다. 물질 고유의 물리적인 성질을 유지하면서 초미세 공정이 필용한 시점에서 기존의 전통적으로 사용하여 왔던 기계적인 방법과 레이저 공정은 공정 분해능의 한계와 물리화학적인 변형 때문에 최종 부품의 성능저하와 불량률을 증가시켜 많은 문제점을 내포하고 있다. 반면에 고출력 펨토초 레이저 기반물질 공정 기술은 기존 레이저 공정에 비해 열적 손상이 매우 작기 때문에 최근 많은 분야에서 큰 관심을 불러일으키고 있다. 본 해설 논문에서는 박형 실리콘 기판의 마이크로 패키징 및 게르마늄 표면 공정을 통한 나노구조체 형성에 대해 본 연구진에서 발표한 최근의 개발 내용을 중심으로 관련 연구 분야를 소개하고자 한다.

• 한국정밀공학회지
• /
• 제21권4호
• /
• pp.32-38
• /
• 2004

Laser-induced thermochemical wet etching of titanium in phosphoric acid has been investigated to examine the feasibility of this method fur fabrication of microstructures. Cutting, drilling, and milling of titanium foil were carried out while examining the influence of process parameters on etch width, etch depth, and edge straightness. Laser power, scanning speed of workpiece, and etchant concentration were chosen as major process parameters influencing on temperature distribution and reaction rate. Etch width increased almost linearly with laser power showing little dependence on scanning speed while etch depth showed wide variation with both laser power and scanning speed. A well-defined etch profile with good surface quality was obtained at high concentration condition. Fabrication of a hole, micro cantilever beam, and rectangular slot with dimension of tess than 100${\mu}{\textrm}{m}$ has been demonstrated.

• Tribology and Lubricants
• /
• 제24권6호
• /
• pp.320-325
• /
• 2008

The recent industrial application requires technical methods to get the cutting fluid droplet surfaces in particular from the viewpoint of topography and micro texture. To characterize the surface topography of droplet, the combination of the confocal laser scanning microscope (CLSM) and wavelet filtering is well suited for obtaining the droplet geometry encountered in tribological research. This technique indicates a better agreement in obtaining an appropriate droplet surface obtained by the CLSM over a detail range of surface accuracy (resolution: $2{\mu}m$). And the results allow an excellent accuracy in a measurement of a droplet surface. The combination of extended focal depth measurement configured and multi-scale wavelet filtering has proven that it can construct a droplet surface in a successive and accurate way. A multi-scale approach of wavelet filtering was developed based on the decomposition and reconstruction of droplet surface by 2D wavelet transform using db9 (a mother wavelet of daubechies). Also this technique can be extended to characterize the quantification of droplet properties and other field in a wide range of scales. Finally this method is verified to be a better droplet surface modeling in a micro scale arising in a mist machining.

• 한국레이저가공학회:학술대회논문집
• /
• 한국레이저가공학회 2004년도 추계학술대회논문집
• /
• pp.50-61
• /
• 2004

Nowadays Laser Controllable Thermo-cleaving is the most promising method of cutting FPD(Flat Panel Display) glass in mass-production line. And this method can be used to cut other brittle materials such as quartz, sapphire, ceramic and semiconductor. The concept of this method is shown in Picture 1. Laser beam heats glass up to strain point not to melting point and cooling system chills glass to make maximum thermal stress in glass and then the thermal stress generates micro thermal crack in other words blind crack. Laser Controllable Thermo-cleaving controls the thermal stress to optimize the blind crack up to level of mass-production line.

• 한국생산제조학회지
• /
• 제23권6호
• /
• pp.630-635
• /
• 2014

This study aims to develop a PZT-driven depth adjustment device with a flexure hinge and to investigate its static/dynamic characteristics. This device will be applied to rapidly and accurately trace a flat surface with slight waviness of up to several hundreds of micrometers in magnitude. One typical example is to cut a film coated on a steel plate. A depth control system composed of PMAC, PZT/PZT amplifier, flexure hinge/knife, and laser displacement sensor is implemented on a desktop three-axis machine and an actual cutting test is conducted on a steel workpiece with a sinusoidal-wavy surface. It is verified that the dynamic characteristics of the device limit the maximum cutting speed and depth precision.

• 한국정밀공학회지
• /
• 제19권12호
• /
• pp.120-126
• /
• 2002

The needs of ultra-precisely machined parts are increasing more and more. But the experimental data required to ultra precision machining of nonferrous metal is insufficient. The behavior of cutting in micro cutting area is different from that of traditional cutting because of the size effect. Copper is widely used as optical parts such as LASER reflector's mirror and multimedia instrument. In experimental, after oxygen-free copper is machined by ultra precision machine with natural mono crystal diamond tool (NCD) and synthetic poly crystal diamond tool (PCD), we compared chip formation and tool's wear according to used tool. Also, we researched optimized cutting condition with the results measured according to cutting condition such as spindle speed, feed rate and depth of cut. As a result, the optimal working condition that makes good surface roughness is obtained. The surface roughness is good when spindle speed is above 80 m/min, and feed rate is small and depth of cut is above 0.5 ${\mu}{\textrm}{m}$. In cutting of klystron anode and cavity 3.2 nmRa of surface roughness is obtained.

• Journal of Advanced Marine Engineering and Technology
• /
• 제31권8호
• /
• pp.961-969
• /
• 2007

The laser material processing has replaced a conventional material processing such as a welding, cutting, drilling and surface modification and so on. LTH(Laser Transformation Hardening) is one branch of the laser surface modification process. A lot of energy is needed for the LTH process to elevate workpiece surface to temperature of the austenite transformation($A_3$), which results from utilizing a beam with a larger size and lower power intensity comparatively. The absorptivity of the laser energy with respect to material depends on the wave length of a beam. This study is related to the surface hardening for the rod-shaped carbon steel by the high power diode laser(HPDL) whose beam absorptivity is better than conventional types of lasers such as $CO_2$ or Nd:YAG laser. Because a beam proceeds on the rotating specimen the pretreated hardened-phase can be tempered and softened by the overlapping between hardened tracks. Accordingly, the longitudinal hardness measurement and observation of the micro structure was carried out for an assessment of the hardening characteristics. In addition, a hardening characteristics as a hardenability of materials was compared in the point of view of the hardness distribution and hardening depth and width.

• 소성∙가공
• /
• 제28권5호
• /
• pp.239-246
• /
• 2019

Various surface texturing techniques have been studied because of the effective applicability of micro or nano scale surface patterns. Particularly, the most promising types of patterns include the hierarchical patterns, which consists of micro/nano structures. Different processes such as MEMS, laser machining, micro cutting and micro grinding have been applied in the production of hierarchical patterns on various material surfaces. This study demonstrates the process of hot imprinting to induce the hierarchical patterns on the Al alloy surfaces. Wire electrical discharge machining (WEDM) process was used to imprint molds with micro scale sinusoidal pattern. In addition, the sinusoidal pattern with rough surface morphology was obtained as a result of the discharge craters. Consequently, the hierarchical patterns consisting of the sinusoidal pattern and the discharge craters were prepared on the imprinting mold surface. Hot imprinting process for the Al plates was conducted on the prepared mold, and the replication performance was analyzed. As a result, it was confirmed that the hierarchical patterns of the mold were effectively duplicated on the surface of Al plate.