• Analytical Science and Technology
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• v.32 no.4
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• pp.121-130
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• 2019

Alumina is one of the most important ceramic materials because of its useful physical and chemical properties. Recently, high-purity alumina has been used in various industrial fields. This leads to increasing demand for reliable elemental analysis of impurities in alumina samples. However, the chemical inertness of alumina makes the sample preparation for conventional elemental analysis a tremendously difficult task. Herein, we demonstrated the feasibility of laser ablation for effective sampling of alumina powder. Laser ablation performs sampling rapidly without any chemical reagents and also allows simultaneous optical emission spectroscopy and mass spectrometry analyses. For six alumina samples including certified reference materials and commercial products, laser-induced breakdown spectroscopy (LIBS) and laser-ablation inductively-coupled plasma mass spectrometry (LA-ICP-MS) analyses were performed simultaneously based on a common laser ablation sampling. LIBS was found to be useful to quantify alkali and alkaline earth metals with limits-of-detection (LODs) around 1 ppm. LA-ICP-MS could quantify transition metals such as Ti, Cu, Zn, and Zr with LODs in the range from a few tens to hundreds ppb.

• Proceedings of the KIEE Conference
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• 1991.11a
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• pp.241-244
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• 1991

In this paper, we introduced Silicon Oxynitride films deposited by Laser CVD, and evaluated the electrical breakdown of these films by TZDB(Time Zero Dielectric Breakdown) and TDDB(Time Dependent Dielectric Breakdown) test. In addition, high frequency C-V test was done in order to calculate hysterisis and flatband voltage(before and after electric field stress). Failure times against eletric field are examined and electric field accelation factor $\beta$ are obtained, and long term reliability was also described by extrapolating into life time in the operating voltage(5V). In this experiments, the deposited films with increased temperature represented small flatband voltage, hysterisis and favorable breakdown characteristics, this is why the hydrogen in the film was decreased and the film was densified, long term reliability was good in the laser CVD SiON films.

• Journal of the Korea Institute of Military Science and Technology
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• v.19 no.6
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• pp.690-697
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• 2016

EOIS(electro-optical imaging system) is the main target of the laser weapon. Specially, the image sensor will be vulnerable because EOIS focuses the incident laser beam onto the image sensor. Accordingly, the laser-induced damage of the image sensor needs to be identified for the counter-measure against the laser attack. In this study, the laser-induced damage of the CCD image sensor irradiated by the CW(continuous wave) NIR(near infrared) laser was experimentally investigated and mechanisms of those damage occurrences were analyzed. In the experiment, the near infrared CW fiber laser was used as a laser source. As the fluence, which is the product of the irradiance and the irradiation time, increased, the permanent damages such as discoloration and breakdown appeared sequentially. The discoloration occurred when the color filter was damaged and then the breakdown occurred when the photodiode and substrate were damaged. From the experimental results, LIDTs(laser-induced damage thresholds) of damages were roughly determined.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.2
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• pp.34-39
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• 2010

In order to achieve and maintain dimensional accuracy in laser micro-machining, dominant parameters such as laser power and laser focus position need to be monitored and controlled real time. Also, in order to selectively machine multi-layered materials, the material being presently machined need to be recognized. This paper presents an auto-focusing (AF) module to keep laser focus on a large-area surface; a real-time laser power stabilizing module based on optical attenuation; and a laser-induced breakdown spectroscopy (LIBS) module. With these monitoring modules, position error in laser focus on a 4" silicon wafer was kept below $4{\mu}m$, initially $51{\mu}m$, and laser power stability of a UV laser source was improved from 1.6% to 0.3%. Also, the material transition from polyimide to copper in machining of FCCL (flexible copper clad laminate) was successfully observed.

• Proceedings of the Korean Society of Laser Processing Conference
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• 2003.05a
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• pp.18-21
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• 2003

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.45 no.6
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• pp.523-530
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• 2017

Laser-Induced Breakdown Spectroscopy (LIBS) which a plasma is irradiated at a specific wavelength depending on the material when a high-energy laser is irradiated, and a Raman spectroscopy which measures rotation and vibration in molecules as light-scattering phenomenon occurs, are attracting attention as a space exploration technology because of the advantages of high accuracy and real-time analysis, and the ability to perform long-range detection. In this study, the tendency of the laser spectrum according to the change of the soil component was analyzed by laser spectroscopy and the two - dimensional chemical distribution was conducted based on the trend of laser spectrum. We have also established the environment of Mars (4-7 torr) and lunar atmosphere (<1 torr) in experimental setup, to prove that it is possible to measure by difference of soil chemical composition using LIBS and Raman spectroscopy even in artificial space environment.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.46 no.6
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• pp.519-526
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• 2018

In order to analyze space resources, it had to be brought to earth. However, using laser-induced breakdown spectroscopy(LIBS) and Raman spectroscopy, it is possible to analyze qualitative and quantitative analysis of space minerals in real time. LIBS is a spectroscopic method in which a high energy laser is concentrated on a material surface to generate a plasma, and the emitted light is acquired through a spectroscope to analyze the atomic composition. Raman spectroscopy is a spectroscopic method that analyzes the molecular structure by measuring scattered light. These two spectroscopic methods are complementary spectroscopic methods for analyzing the atoms and molecules of unknown minerals and have an advantage as space payloads. In this study, data were analyzed qualitatively by using principal component analysis(PCA). In addition, a mixture of two minerals was prepared and a quantitative analysis was performed to predict the concentration of the material.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2017.05a
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• pp.285-289
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• 2017

Laser-induced breakdown spesctroscopy (LIBS) is a technique that complements the disadvantages of conventional laser-based combustion diagnosis techniques such as weak signal strength, complex equipment configuration, and low accuracy. In this study, basic research was carried out to measure the combustion gas temperature of scramjet engines using LIBS. Spray flames were generated from Jet A-1 fuel used in scramjet engines and gas temperatures were measured at the top of the flames with a calibrated thermocouple. The LIBS signals were acquired at the same points as the temperature measurement positions of the thermocouple. The LIBS spectra were analyzed to obtained a calibration curve between the LIBS signal and the reference temperature measured at the thermocouple. Therefore, it was confirmed that the combustion gas temperature can be measured in-situ using LIBS.

• Proceedings of the Korean Society of Laser Processing Conference
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• 2005.11a
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• pp.114-121
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• 2005

• Particle and aerosol research
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• v.12 no.3
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• pp.57-63
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• 2016

The laser-induced breakdown spectroscopy (LIBS) has been used for rapid detection of elemental compositions of various materials in multi-media (solid, liquid, gas, and aerosols). In this study, the aerosol-LIBS has been developed for real-time monitoring of process-induced particles produced during the semiconductor manufacturing. The developed aerosol-LIBS mainly consists of laser, optics, spectrometer, and aerosol chamber. A new aerosol chamber was constructed for the aerosol-LIBS to be applied for various semiconductor manufacturing process, including exhaust tubes, and low pressure and high temperature chamber. The aerosol-LIBS was evaluated by using laboratory generated aerosols for detection of various elements. As a result, P, Fe, Mg, Cu, Co, Ni, Ca, Na, and K emission lines were successfully detected by the aerosol-LIBS. Further evaluation of the aerosol-LIBS is being conducted.