• Korean Journal of Computational Design and Engineering
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• v.17 no.3
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• pp.156-163
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• 2012

Real-time three-dimensional shape measurement is becoming increasingly important in various fields, including medical sciences, high-technology industry, and microscale measurements. However, there are not so many 3D profile tools specially designed for specifically narrow space, for example, to scan the tooth shape of a human jaw. In this paper, a real-time 3D intraoral scanner is proposed for the measurement of tooth profile in the mouth cavity. The proposed system comprises a laser diode beam, a micro charge-coupled device, a graticule, a piezoelectric transducer, a set of optical lenses, and a polhemus device sensor. The phase-shifting technique is used along with an accurate calibration method for the measurement of the tooth profile. Experimental and theoretical inspection of the phase-to-coordinate relation is presented. In addition, a nonlinear system model is developed for collimating illumination that gives the more accurate mathematical representation of the system, thus improves the shape measurement accuracy. Experiment results are presented to verify the feasibility and performance of the developed system. The experimental results indicate that overall measurement error accuracy can be controlled within 0.4 mm with a variability of ${\pm}0.01$.

• Current Optics and Photonics
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• v.4 no.3
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• pp.221-228
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• 2020

We developed an all-fiber RGB laser light source module for application in an automobile head-up display. It is based on laser diodes and an optical fiber combiner that substantially enhances the flexibility of configuration and stability against harsh working conditions for automobiles. We coupled 13 laser diodes with optical fibers and merged them into a single output with a beam combiner device. Red (R), green (G), and blue (B) laser sources were employed to produce primary colors that were mixed into a white light output. An optical output power of approximately 1.5 W was achieved, and the color balance of the output lights was assessed based on the CIE 1931 color space. The optical output power was shown to be stable for over 160 h within an optical fluctuation of less than 0.27%.

• Journal of the Ergonomics Society of Korea
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• v.20 no.3
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• pp.77-88
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• 2001

A three dimensional body scanner for anthropomentric measurement has been developed. In this study, the slit laser beam projection method followed by digital image processing was used to provide accurate spatial data with the typical optical triangulation method to overcome the many difficulties in traditional in accurate and time-consuming tactic measurement method using rulers and gauges. Compared with other commercialized scanners. this system can obtain a relatively wide range of data at a much lower cost by the specially designed scanning process such as the simultaneous acquisition of vertical and horizontal body cross-section profiles.

• Journal of Institute of Control, Robotics and Systems
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• v.5 no.5
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• pp.568-576
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• 1999

Using a laser sheet beam projector combined with a CCD-Camera, an efficient technique to recognize complex surface of curvature and lane has been demonstrated for the purpose of mobile robot navigation. In general, obstacles of indoor environments in the field of SLIT-RAY plane are captured as segments of an elliptical arc and a line in the camera image. The robot has been capable of moving along around the obstacle in front of it, by recognizing the original shape of each segment with the differential coefficient by means of least squares method. In this technique, the imaged pixels of each segment, particularly elliptical arc, have been converted into a corresponding circular arc in the real-world coordinates so as to make more feasible the image processing for the position and radius measurement than conventional way based on direct elliptical are analyses. Advantages over direct elliptical cases include 1) higher measurement accuracy and shorter processing time because the circular arc process can reduce the shape-specifying parameters, 2) no complicated factor such as the tilt of elliptical arc axis in the image plane, which produces the capability to find column position and radiua regardless of the camera location . These are essentially required for a mobile robot application. This technique yields an accuracy less than 2cm for a 28.5cm radius column located in the range of 70-250cm distance from the robot. The accuracy obtained in this study is sufficient enough to navigate a cleaning robot which operates in indoor environments.

• Korean Journal of Optics and Photonics
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• v.4 no.1
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• pp.15-21
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• 1993

This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.5 no.3
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• pp.197-203
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• 2004

New lithography techniques are employed for the patterning of arbitrary shapes in nanometer scale. When, in the photolithography, the electromagnetic waves such as UV and X-ray are incident on the mask patterned in nanometer scale, the diffraction effect is unavoidable and degrades images of the mask imprinted on wafer. Only a convex lens is well-known Fourier transformer. It is possible to make the mask Fourier-transformed with the convex lens, even though the size of pattern on the mask is very large compared to the wavelength of electromagnetic wave. If the mask, modified according to new technique described in this paper, was placed at the front of the lens and was illuminated with laser beam, the nanometer-size patterns are only formed on the plane called Fourier transform plane. The new method presented here is quite simple setup and comparable with present and next generation lithographies such as UV/EUV photolithograpy and electron projection lithography when compared in attainable minimum linewidth. In this paper, we showed our theoretical research work in the field of Fourier optics, . In the near future, we are going to verify this theoretical work by experiments.