• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.220-220
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• 2013

Surface-normal transmission electro-absorption modulator (EAM) are attractive for high-definition (HD) three-dimensional (3D) imaging application due to its features such as small system volume and simple epitaxial structure [1,2]. However, EAM in order to be used for HD 3D imaging system requires uniform modulation performance over large area. To achieve highly uniform modulation performance of EAM at the operating wavelength of 850 nm, it is extremely important to remove the GaAs substrate over large area since GaAs material has high absorption coefficient below 870 nm which corresponds to band-edge energy of GaAs (1.424 eV). In this study, we propose and experimentally demonstrate a transmission EAM in which highly selective backside etching methods which include lapping, dry etching and wet etching is carried out to remove the GaAs substrate for achieving highly uniform modulation performance. First, lapping process on GaAs substrate was carried out for different lapping speeds (5 rpm, 7 rpm, 10 rpm) and the thickness was measured over different areas of surface. For a lapping speed of 5 rpm, a highly uniform surface over a large area ($2{\times}1\;mm^2$) was obtained. Second, optimization of inductive coupled plasma-reactive ion etching (ICP-RIE) was carried out to achieve anisotropy and high etch rate. The dry etching carried out using a gas mixture of SiCl4 and Ar, each having a flow rate of 10 sccm and 40 sccm, respectively with an RF power of 50 W, ICP power of 400 W and chamber pressure of 2 mTorr was the optimum etching condition. Last, the rest of GaAs substrate was successfully removed by highly selective backside wet etching with pH adjusted solution of citric acid and hydrogen peroxide. Citric acid/hydrogen peroxide etching solution having a volume ratio of 5:1 was the best etching condition which provides not only high selectivity of 235:1 between GaAs and AlAs but also good etching profile [3]. The fabricated transmission EAM array have an amplitude modulation of more than 50% at the bias voltage of -9 V and maintains high uniformity of >90% over large area ($2{\times}1\;mm^2$). These results show that the fabricated transmission EAM with substrate removed is an excellent candidate to be used as an optical shutter for HD 3D imaging application.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.46 no.4
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• pp.495-502
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• 2010

The effect of load and sliding speed on abrasive wear characteristics of glass fiber/polyurethane (GF/PUR) composites were investigated at ambient temperature by pin-on-disc friction test. The friction coefficient, cumulative wear volume and surface roughness of these materials against SiC abrasive paper were determined experimentally. Experimental results showed that the surface roughness of the GF/PUR composites was increased as applied load was higher in wear test. The cumulative wear volume tended to increase nonlinearly with increase of sliding distance and depended on applied load and sliding speed for these composites. It could be verified by scanning electric microscopy (SEM) photograph of surface tested that major failure mechanisms were lapping layers, ploughing, delamination, deformation of resin and cracking.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.2
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• pp.100-106
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• 2013

Stainless steel has some excellent properties as the material for the mechanical component. Purpose of this study is carried out to obtain mirror surface on the surperfinishing of stainless steel with high efficiency. To achieve this, we have conducted a series of polishing experiment for stainless steel using abrasive film from the perspective of oscillation speed, the rotational speed of workpiece, contact roller hardness, contact pressure and feed rate. Abrasive film used this study is a micro-finishing film and a lapping film. Furthermore, the polishing characteristics and efficiency of stainless steel is discussed through measuring optimal polishing time and surface roughness. From the obtained results, it was confirmed that efficient superfinishing conditions and polishing characteristic of Stainless steel can be determined.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1996.03a
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• pp.124-131
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• 1996

The use of small hemispherical high-speed precision bearing has increased drastically these days in the field of computer disk driver, highteech devices as well as communication and electronic device drivers. It was suggested that the new polishing process adopting the diamond grinding wheel and polishing tool instead of multi stage lapping processes, which enables the mass production of the bearing by reduction of polishing time. Polishing mechanism was analysed and the results were applied to the design and manufacturing of the polishing system. Experiments for selection of optimal polishing conditions were carried out using the polishing system.

• Journal of Astronomy and Space Sciences
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• v.21 no.2
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• pp.141-152
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• 2004

Optics fabrication process for precision space optical parts includes bound abrasive grinding, loose abrasive lapping and polishing. The traditional bound abrasive grinding with bronze bond cupped diamond wheel leaves the machine marks of about $20{mu}m$ rms in height and the subsurface damage of about 1 ${mu}m$ rms in height to be removed by subsequent loose abrasive lapping. We explored an efficient quantitative control of precision CNC grinding. The machining parameters such as grain size, work-piece rotation speed and feed rate were altered while grinding the work-piece surfaces of 20-100 mm in diameter. The input grinding variables and the resulting surface quality data were used to build grinding prediction models using empirical and multi-variable regression analysis. The effectiveness of such grinding prediction models was then examined by running a series of precision CNC grinding operation with a set of controlled input variables and predicted output surface quality indicators. The experiment achieved the predictability down to ${pm}20$ nm in height and the surface roughness down to 36 nm in height. This study contributed to improvement of the process efficiency reaching directly the polishing and figuring process without the need for the loose abrasive lapping stage.

• International Journal of Precision Engineering and Manufacturing
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• v.1 no.2
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• pp.61-66
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• 2000

In this paper, we discuss the machining characteristics of HDD glass. Glass is now being used globally as a data storage device, Such glasses are usually machined by lapping by this technique requires a long machining time, resulting in low productivity, For this reason, we examine the possibility of EILD grinding in HDD glass workpieces, A move to ELID grinding may result in substantial cost reduction. Our purpose is to investigate the grinding characteristics of HDD glass in ELID grinding. The bonding materials for fixing the abrasives of cast iron, cobalt and bronze are applied, and grinding conditions such as rotation speed and feeding are varied. Results show that with the use of ELID, mirror surfaces can be achieved with high efficiency.

• Bulletin of the Korean Space Science Society
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• 2003.10a
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• pp.26-26
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• 2003

During fabrication process for the large space optical surfaces, the traditional bound abrasive grinding with bronze bond cupped diamond wheel tools leaves the machine marks and the subsurface damage to be removed by subsequent loose abrasive lapping. We explored a new grinding technique for efficient quantitative control of precision CNC grinding for space optics materials such as Zerodur. The facility used is a NANOFORM-600 diamond turning machine with a custom grinding module and a range of resin bond diamond tools. The machining parameters such as grit number, tool rotation speed, work-piece rotation speed, depth of cut and feed rate were altered while grinding the work-piece surfaces of 20-100 mm in diameter. The input grinding variables and the resulting surface quality data were used to build grinding prediction models using empirical and multi-variable regression analysis methods. The effectiveness of the grinding prediction model was then examined by running a series of precision CNC grinding operation with a set of controlled input variables and predicted output surface quality indicators. The experiment details, the results and implications are presented.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.1049-1052
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• 1997

The pupose of this study on the surface finishing is to examine the performance of brushing as a means of reducing the surface roughness of the precision theaded shafts in ball screw assemblies. Ball screws provide superior performance compared to other types of screw feeds in terms of static and dynamic rolling resistance,backlash,and wear characteristics. The Reduction of the surface roughness of the lead shaft in ball screw assembiles is essential for precision movement,high speed/low noise tracel, and for low wear/long life. To reduce machine dependent errors that would influence the surface roughness compared with other lapping or polishing techniques,experiments will be performed using special wire brushes to polish precision ground shafts. The best results were obtained using the Al /sab 2/O /sab3/ brushes, with the Al /sab 2/O /sab3/ #500 grit brush producing a surface finish of approximately 0.7 .mu.m, and the Al /sab 2/O /sab3/ #600 grit producing a surface finish of approximately 0.8 .mu.m. Both of these results were produced at the highest wheel polishing speed of 3520 rpm. The SiC #500 brush produced a surface roughness of approximately 1 .mu.m at 3520 rpm.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.13 no.5
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• pp.76-81
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• 2014

The Engineering ceramics have some excellent properties as materials for modern mechanical and electrical components. It is, however, not easy to polish them efficiently because they are strong and hard. This study is carried out to obtain a mirror surface on engineering ceramics by surperfinishing with high efficiency. To achieve this, we conducted a series of polishing experiments using representative engineering ceramics, such as $Al_2O_3$, SiC, $Si_3N_4$ and $ZrO_2$, using diamond abrasive film from the perspective of oscillations peed, the rotational speed of the workpiece, contact roller hardness, contact pressure and feed rate. Furthermore, the polishing efficiency and characteristics for engineering ceramics are discussed on the basis of optimal polishing time and surface roughness. Our results confirmed that efficient superfinishing conditions and polishing characteristics of engineering ceramics can be determined.

• Tribology and Lubricants
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• v.26 no.6
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• pp.311-316
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• 2010

Surface texturing of micro dimple or pore-shaped pattern was prepared using a fiber laser system. Surface texturing was designed to have a square pattern with a particular pitch distance for each corresponding density of 5, 10, 20, and 30%. Thermal damages such as bulges and burrs formed during laser irradiation were observed around the dimples. Thermal damages were later removed by lapping using alumina particles of $0.3{\mu}m$ in diameter. Oscillating friction tests were performed against heat-treated high speed steels under lubricated condition. The lubricant used was SAE 5W-30 automotive engine oil. Normal contact pressure and oscillating frequency was 0.28 MPa and 20 Hz, respectively. The tests were continued for 20 minutes, and friction plots were recorded for examination. Results revealed that the coefficient of friction was lowered regardless of texturing density. Moreover, the lowest coefficient of friction was obtained for 10% density texturing. It is attributed to increased lubricity due to the introduction of surface texturing. In addition, it is concluded that the optimum texturing density and pattern must be found for the best lubricity and low friction.