• 제목/요약/키워드: LPE

검색결과 131건 처리시간 0.024초

LPE에 의한 GaInAs/InP PIN Photodiode의 제작 및 특성 (A Fabrication and Characteristics of GaInAs/InP PIN Phtodiode Grown by LPE)

  • 박찬용;남은수;박경현;김상배;박문수;이용탁;홍창희
    • 대한전자공학회논문지
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    • 제27권5호
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    • pp.737-746
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    • 1990
  • Ga0.47In0.53As PIN photodiodes(PD) having various areas have been fabricated by liquid phase epitaxial techniques. Ternary melt has been baked out at 675\ulcorner in H2 atmosphere for 20 hours before growth, which resulted in reduction of background carrier concentration of grown epi-layer. Also, lattice mismatch has been controlled within 0.01%. The room temperature performance of 10**-4cm\ulcornerarea PIN PD at a bias voltage of -5V were` quantum efficiency(with no antireflection coating)=60% for 1.3\ulcorner light source, dark current\ulcorner5nA, and capacitance\ulcornerpE. Frequency response measurement of packaged PIN PD has shown that cut-off frequency (f-3dB) was 961MHz. This PD has shown a good eye pattern when it was incorporated in a 565Mbps optical receiver.

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Growth of $La_{2-x}$$Sr_x$Cu$O_4$Single Crystals for Device Application

  • Tanaka, Isao
    • Progress in Superconductivity
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    • 제4권1호
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    • pp.14-18
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    • 2002
  • We had succeeded to grow bulk sing1e crystals of La/sub 2-x/Sr/sub x/$CuO_4$by the traveling solvent floating zone method (TSFZ), and to prepare La/sub 2-x/Sr/sub x/CuO$_4$single-crystalline thick films on the Zn-doped La$_2$$CuO_4$ substrate by new liquid phase epitaxial technique using an infrared heating furnace (IR-LPE). In this paper, Ireview growth of bulk single crystals and single-crystalline thick films of La/sub 2-x/Sr/sub x/$CuO_4$, and discuss on their device properties to develop high speed integrated electronic devices.

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액상결정성장에 의한 InGaAsP/InP MQW-ND 제작에 관한 연구 (A study on the InGaAsP/InP MQW-LD fabrication by the liquid phase epitaxy)

  • 조호성;홍창희;오종환;예병덕;이중기
    • 한국광학회지
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    • 제3권4호
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    • pp.252-257
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    • 1992
  • 본 연구에서는 수직형 LPE 장치를 이용하여 InGaAsP/InP MQW-DH웨이퍼를 성장하고 10$\mu$m stripe MQW-LD를 제작하였다. 공진기 길이 470$\mu$m LD의 경우 이득스펙트럼 중심파장은 1.32$\mu$m였다. 발전파장은 1.302$\mu$m로써 양자우물두께 300$\AA$의 이득중심에 해당한다는 사실을 알 수 있었다.

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경사 도파로형 고휘도 레이저 다이오드(SLD)의 제작 및 광출력 특성 (A Fabrication of the Tilted Waveguide Structure SLD and Its Output Light Power Characteristics)

  • 최영규;김기래
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제55권2호
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    • pp.55-60
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    • 2006
  • In order to suppress lasing oscillation and obtain high light power, We have proposed a novel SLD which is formed with a straight and tilted waveguide. The window region is used to suppress lasing oscillation and reduce the facet reflectivity. High power and low reflectivity is obtained by the straight and tilted waveguide. Based on the theoretical analysis, we have fabricated the SLD with the waveguide of 500 $\mu$m length and window region of 50 $\mu$m by LPE equipment. Through the measurements of optical characteristics, the output light power of 3 mW was obtained at the 150 mA CW injection current and 25$^{circ}C$. We have confirmed that the proposed SLD has a 0.8 dB spectrum ripple lower than 1 dB which is sufficiently low reflectivity for preventing lasing.

Auger 전자현미경을 이용한 LPE에 의해서 성장된 InGaAsP/InP 이종접합계면에 대한 연구 (Auger Study of LPE Grown In Ga As P/In P Heterostructure)

  • 김정호;권오대;박효현;남은수
    • 대한전자공학회논문지
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    • 제25권12호
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    • pp.1656-1662
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    • 1988
  • Auger depth profiles of various In Ga As P/In P heterojunctions grown by liquid phase epitaxial techniques under different growth conditions such as diffusion temperature, diffusion time and dopants, have been obtained. The surface contaminations of In Ga As have been investigated. We found that the samples with Zn diffusion exhibit significant interface grading phenomena including In depletion, Ga richness and P richness at the In Ga As P/In P interface, and In outdiffusion at the surface. The main surface contamination was found to be due to carbon and oxygen species. It can be suggested that Zn gettering takes a major role in such phenomena as interface grading, in depletion, and Ga and P richness at the interface.

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가시광 InGaAsP/GaAs 결정성장을 위한 상평형도 해석 (An Analysis of the Phase Diagram fo the Crystal Growth of InGaAsP/GaAs in the Visible Region)

  • 홍창희;조호성;오종환;예병덕;황상구;배정철
    • 한국항해학회지
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    • 제15권3호
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    • pp.99-106
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    • 1991
  • In order to grow InGaAsP epitaxial layer on GaAs by LPE, an accurate phase diagram for In-Ga-As-P quarternary compounds is required. But the short wavelength InGaAsP/GaAs phase diagram for full wavelength range was not yet reported. In this study, therefore, a theoretical calculation has been carried out by using thermodynamic's equation for InGaAsP/GaAs in order to get the relation between the mole fraction of the sloute and solid phase compounds. And the calculation being compared with the dta of Kawanishi et. al, the result has been shown that his phase diagram obtained by the calculation can apply to growing InGaAsP/GaAs by LPE.

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