• Korean Journal of Materials Research
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• v.11 no.6
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• pp.527-532
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• 2001

Dry etching of copper film using $O_2$ plasma and H(hfac) has been investigated. A one-step process consisting of copper film oxidation with an $O_2$ plasma and the removal of surface copper oxide by the reaction with H(hfac) to form volatile Cu(hfac)$_2$ and $H_2O$ was carried but. The etching rate of Cu in the range from 50 to 700 /min was obtained depending on the substrate temperature, the H(hfac)/O$_2$ flow rate ratio, and the plasma power. The copper film etch rate increased with increasing RF power at the temperatures higher than 215$^{\circ}C$. The optimum H(hfac)/O$_2$ flow rate ratio was 1:1, suggesting that the oxidation process and the reaction with H(hfac) should be in balance. Cu patterning using a Ti mask was performed at a flow rate ratio of 1:1 on 25$0^{\circ}C$\ulcorner and an isotropic etching profile with a taper slope of 30$^{\circ}$was obtained. Cu dry patterning with a tapered angle which is necessary for the advanced high resolution large area thin film transistor liquid-crystal displays was thus successfully obtained from one step process by manipulating the substrate temperature, RF power, and flow rate ratio.

• Journal of Broadcast Engineering
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• v.9 no.4 s.25
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• pp.391-401
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• 2004

In this paper, we introduce a novel coding method to efficiently enable spatial random access for high resolution video. In terms of resolution and display size, standard display devices (such as cathode-ray tubes. monitors. PDAs, and LCDs) do not sufficiently support high resolution video such as digital cinema and panoramic video. Currently, users have no choice but to view video at lower resolution as a result of down-sampling, or only a partial region of the video due to display size limitations. Our proposed method. which we call the B-map, represents the set of starting locations of the coded segments in a picture frame. This information, or B-map, is first sent to the decoder prior to the coded data stream of the frame and is then used for fast local decoding. To test our method, we compare our B-map with JPEG tiling and the JPEG Resynchronization marker. Experimental results show that the proposed coding method requires less overhead than existing methods during the same decoding time. The results show promise for future panoramic or digital cinema applications.

• The Journal of the Korea institute of electronic communication sciences
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• v.17 no.2
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• pp.309-316
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• 2022

Advances in technology have improved people's lives comfortably and have developed more easily, safely and simply. We usually turn on hot water to set the temperature of the water in the bathroom and gradually adjust the temperature to find the temperature we want with our skin. In this situation, I thought, "What if there is a device that can see the temperature of water with my eyes and help with the interior of the bathroom while including a safe system," and tried to create a system that values stability. For example, if a child accidentally changes the temperature of the water to high temperature while washing, he or she can get burned. And the biggest purpose is to secure better safety by adding LCDs and LEDs so that we can visually know the temperature before feeling it tactilely. As a result of the experiment, there was no error between the temperature detected by the water temperature sensor and the temperature displayed on the LCD, and no error occurred up to 27 cm in the distance measurement experiment using the ultrasonic sensor. There has been an error of about 2% since 28cm or older, but there is no significant inconvenience in using it within the category of faucets.