• 제목/요약/키워드: KimKoo

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DEVELOPMENT Al-FREE OHMIC CONTACT TO n-GaN

  • Kim, Dae-Woo;Kwak, Joon-Seop;Baik, Hong-Koo;Kim, Cha-Yeon;Kim, Sung-Woo
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 1998년도 IUMRS-ICEM ABSTRACT BOOK
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    • pp.95.2-95
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    • 1998

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Studies on the Pull-up MEMS Switch for the Lower Actuation Voltage and High Speed using Double Electrode

  • Lee, Seong-Dae;Jun, Byoung-Chol;Baek, Tae-Jong;Kim, Soom-Koo;Kim, Sam-Dong;Rhee, Jin-Koo
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2005년도 추계종합학술대회
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    • pp.929-932
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    • 2005

  • We report a pull-up type RF MEMS switch using double electrode without elastic deformation of the cantilever involved in the actuation. At a voltage of 4.5 V, reliable actuations are achieved such that the movable lower contact pad is pulled up by the electrostatic force to make contact with the upper pad. At a frequency of 50 GHz, an insertion loss of 0.7 dB and an isolation of 50.7 dB are obtained from the switch. The measured transient times for switch-on and switch-off are 120 and 80 us, respectively.

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