• Title/Summary/Keyword: Kim Tae-sun

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LGP Pattern Design by Using a Pattern Density Function with Simple Exponential Function (간단한 지수함수를 패턴 밀도 함수로 이용한 LGP 패턴 설계)

  • Kim, Young-Chul;Kim, Dae-Wook;Oh, Tae-Sik;Lee, Yong-Min;Ahn, Seung-Joon;Kim, Ho-Seob
    • Korean Journal of Optics and Photonics
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    • v.21 no.3
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    • pp.97-102
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    • 2010
  • A pattern density function using simulation analysis for controlling LGP output distribution was proposed. The pattern density function was found as [Pexp(-y/70)+Qexp(+y/25)]R. We analyzed the LGP output distribution of a hemi-sphere pattern using the function and then found that its output distribution was clearly improved as compared with that of the equi-distance pattern. We found that the density function works well for the pyramid pattern case as well as.