• Proceedings of the Korean Ceranic Society Conference
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• 2000.10a
• /
• pp.189.2-189
• /
• 2000

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.19 no.2
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• pp.130-134
• /
• 1983

• Proceedings of the Korean Ceranic Society Conference
• /
• 2003.10a
• /
• pp.122.1-122
• /
• 2003

• Proceedings of the KIEE Conference
• /
• 1985.07a
• /
• pp.280-281
• /
• 1985

• Bulletin of the Korean Chemical Society
• /
• v.22 no.3
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• pp.330-332
• /
• 2001

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.06a
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• pp.65-66
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• 2009

This paper describes a procedure developed to fabricate negative photo resist SUMS to a semi-insulating (SI)-GaAs-based substrate. SU-8 is attractive for micromachine multi-layer circuit fabrication, because it is photo-polymerizable resin, leading to safe, and economical processing. This work demonstrates SUMS photo resist can be used for RFIC/MMIC application.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2006.04a
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• pp.56-57
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• 2006

• Proceedings of the Korean Society of Veterinary Clinics Conference
• /
• 2006.05a
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• pp.124-124
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• 2006

• Proceedings of the Korean Ceranic Society Conference
• /
• 2003.04a
• /
• pp.28.2-28
• /
• 2003

• Proceedings of the Korean Vacuum Society Conference
• /
• 2009.08a
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• pp.190-190
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• 2009