• 제목/요약/키워드: Key-in inputted by operator

검색결과 1건 처리시간 0.016초

화합물반도체공장의 생산정보수집시스템 (Data Acquisition System of Compound Semiconductor Fabrication)

  • 이승우;송준엽;이화기
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2006년도 춘계학술대회 논문집
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    • pp.335-336
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    • 2006
  • Compound semiconductor manufacturing environment also has been emerged as mass customization and open foundry service so integrated manufacturing system is needed. In this study, we design data acquisition system of compound semiconductor fabrication that has monitoring and control of process. The developed DAS is consisted of key-in system inputted by operator and automatic acquisition system by GEM protocol. And we implemented them in the actual compound semiconductor. It is expected that using developed system would offer precise process information to buyer, reduce a lead-time, and obey a due-dates and so on.

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