• 반도체디스플레이기술학회지
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• 제21권2호
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• pp.144-149
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• 2022

A cryogenic Mixed Refrigerant Joule-Thomson refrigeration cycle was designed to be applied to the semiconductor etching process with non-flammable constituents. 3-stage cascade refrigerator, single mixed refrigerant Joule-Thomson refrigerator, and 2-stage cascade type mixed refrigerant Joule-Thomson refrigerator are analyzed to figure out the coefficient of performance. Non-flammable mixture of argon(Ar), tetrafluoromethane(R14), trifluoromethane (R23) and octafluoropropane(R218) were utilized to analyze the refrigeration cycle efficiency. The designed refrigeration cycle was adapted to cool down the coolant of HFE7200(Ethoxy-nonafluorobutane, C₄F₉OC₂H₅) with certain constraints. Maximum coefficient of performance of the refrigeration system is obtained as 0.289 for the cooling temperature lower than -100℃. The detailed result of the coefficient of performance according to the mixture composition is discussed in this study.

• 한국초전도ㆍ저온공학회논문지
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• 제9권1호
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• pp.86-90
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• 2007

The cryoprobe used in cryosurgery should be fabricated in milimeter-order size for its practical usage. In general a miniature J-T(Joule-Thomson) refrigerator is applied to a cryoprobe. In case of the miniature J-T refrigerator, the mass flow rate of working fluid is small due to considerable friction in a minute flow path. For that reason, the miniature J-T refrigerator has a limited cooling power. To obtain the large cooling power from the J-T refrigerator, the refrigerator should have large mass flow rate and effective J-T temperature drop. These quantities are closely related to the geometry of the heat exchanger and the expansion nozzle in a cryoprobe, and are contradictory. The large mass flow rate leads to the small J-T temperature drop and vice versa in the miniature J-T refrigerator. Therefore, the optimal design of a cryoprobe to achieve maximum cooling power at fixed tube size and fixed operating temperature is required. This paper presents the design procedure of such case.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2005년도 창립60주년 기념 추계 학술대회
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• pp.11.1-11.1
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• 2005

• 한국초전도저온공학회지:초전도와저온공학
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• 제9권1호
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• pp.26-30
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• 2007

• 한국초전도ㆍ저온공학회논문지
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• 제11권1호
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• pp.55-59
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• 2009

Miniature Joule-Thomson refrigerators have been widely used for rapid cooling of infrared detectors, probes of cryosurgery, thermal cameras, missile homing head and guidance system, due to their special features of simple configuration, compact structure and rapid cool-down characteristics. The thermodynamic performance of J-T refrigerator highly depends on the hydraulic and heat transfer characteristics of the recuperative heat exchanger. The typical recuperative heat exchanger of the J-T refrigerator has the double helical tube and fin configuration. In this study, effectiveness-NTU approach was adopted to predict the thermodynamic behaviors of the heat exchanger for the J-T refrigerator. The thermodynamic properties from the REFPROP were used to account the real gas effects of the gas. The results show the effect of the operating conditions on the performance of the heat exchanger and refrigerator for the given heat exchanger. The influences of mass flow rate and the supply pressure on the effectiveness of heat exchanger and the ideal cooling capacity are discussed in details.

• 설비공학논문집
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• 제11권4호
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• pp.457-463
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• 1999

The Joule-Thomson cryocooler with $H_2$gas has been developed. Cool-down characteristics and the cooling performance of a JT cryocooler have been investigated in detail. The JT cryocooler consists of JT expansion valve, heat exchanger, expansion chamber, compressed $H_2$gas storage tank, $LN_2$precooler, heater and a cryostat. The precooling process using both $GN_2$and $LN_2$was peformed to cool down the inside components of cryocooler under the maximum inversion temperature of $H_2$. The $H_2$expansion experiments have been peformed for 2-5MPa of H$_2$pressure to evaluate steady state temperatures of the cryocooler. It is found that the steady state temperatures are decreased as the H$_2$pressures are increased. The effects of cooling temperatures on the performance have been evaluated for various $H_2$and $N_2$pressures. It is seen that the cooling loads are increased, as the cooling temperature and operating pressure are increased.

• 반도체디스플레이기술학회지
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• 제23권2호
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• pp.6-11
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• 2024

This paper presents the design and experimental analysis of a cryogenic refrigeration system for -100 ℃, primarily intended for semiconductor etching process. The refrigeration system utilizes non-flammable mixed refrigerant Joule-Thomson refrigeration cycle, incorporating a precooling stage to enhance overall performance. The selected refrigerants for the system include R1234yf for the precooling stage, and Ar, R14, R23 and R218 for the main cooling stage of the Joule-Thomson refrigeration cycle. Design results according to the system constraints and experimental results are discussed, including lowest evaporation temperature, compressor isentropic efficiency and overall pressure tendencies. The achieved refrigerant fraction from optimal design is Ar: R14: R23: R218 = 0.15: 0.4: 0.15: 0.3, indicating COP of 0.1118 at the isentropic compressor efficiency of 50%. The experimental result shows the developed system reaches steady state in approximately 3 hours.

• 한국초전도ㆍ저온공학회논문지
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• 제12권4호
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• pp.41-45
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• 2010

Miniature Joule-Thomson refrigerators have been widely used for rapid cooling of infrared detectors, optoelectronic device, and integrated circuits of micro electronics. The typical J-T refrigerator consists of the recuperative heat exchanger with the double helical tube and fin configuration, J-T nozzle, a mandrel, Dewar and a compressed gas storage bottle. In this study, to predict the thermodynamic behaviors of the refrigerator with a compressed gas storage bottle during the cool-down time, numerical study of transient characteristics for a J-T refrigerator was developed. A simplified transient one.dimensional model of the momentum and energy equations was simultaneously solved to consider the thermal interactions of the each component of the refrigerator. To account for effects of the thermal mass of the solid, the heat capacities of the tube, fins, mandrel and Dewar are considered. The results show the charged gas pressure of the gas storage bottle has significant effects on the performance of the J-T refrigerator. At the elevated gas pressure of the gas storage bottle, the large capacity of the compressed gas storage does not need to get the fast cool-down performance of the J-T refrigerator in the cool-down stage.

• 한국초전도학회:학술대회논문집
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• 한국초전도학회 2008년도 High Temperature Superconductivity Vol.XVIII
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• pp.91-91
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• 2008

• 대한기계학회논문집
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• 제16권11호
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• pp.2196-2202
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• 1992

본 연구에서는 초전도 양자 간섭장치(SQUID, superconductiong quantum inte- rference device)를 냉각시킬 수 있는 정도의 소용량(3.995K에서 0.1W)의 GM/J-T 냉동 기에 대하여 요구되는 냉각용량을 만족시키면서 최대의 성능을 나타낼 수 있는 열교환 기의 면적배분 조건을 구하였다. 즉 냉동 성능을 알고 있는 상용 2단 GM 냉동기와 소형 극저온 냉동기에 널리 사용되는 열교환기로 이루어진 복합적인 GM/J-T 냉동기에 대하여 열교환기 총면적이 주어졌을 때, J-T 회로내의 냉매(헬륨)의 유량과 각 열교환 기 전열 면적의 비를 변수로 최적설계를 행하였다.