• Applied Microscopy
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• v.38 no.4
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• pp.363-374
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• 2008

In this paper we have examined the usefulness of IWFR (the iterative wave-function reconstruction) analysis for through-focal series of high-resolution images for a relative thick crystal. In the work we employed JEOL ARM 1300S, and observed the high-resolution images for a Si crystal at the two orientations of [01-1] and [11-2] having 30 nm and 35 nm thickness respectively. As a result of applying IWFR method on the images we found out that even for a thick crystal by the method we can retrieve the exit-surface wave function. However because of the strong dynamical scattering effect, the image pattern of the function reflects only qualitatively the atomic column structure of the crystal examined. Nevertheless it is no doubt that the pattern would give important clue for the crystal structure.