• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.9
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• pp.707-713
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• 2001

As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was requirdfo the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gest thinner, micro-scratches are becoming as major defects. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}{\textrm}{m}$ point of use (POU) filter, which is depth-type filter and has 80% filtering efficiency for the 1.0${\mu}{\textrm}{m}$ size particle. In this paper, we studied the relationship between defect generation and polished wafer counts to understand the exact efficiency fo the slurry filteration, and to find out the appropriate pad usage. Our experimental results showed that it sis impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the slurry flow rate, and to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of depth type filter.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.05c
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• pp.43-46
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• 2004

This paper describes the information for quantitative simulation of weal이y ionized plasma. We must grasp the meaning of the plasma state condition to utilize engineering application and to understand materials of plasma state. Using quantitative simulations of weakly ionized plasma, we can analyze gas characteristic. In this paper, the electron transport characteristic in $CH_4$ has been analysed over the E/N range 0.1~300[Td], at the $300[_{\circ}K]$ by the two tenn approximation Boltzmann equation method and Monte Carlo Simulation. Boltzmann equation method has also been used to predict swarm parameter using the same cross sections as input. The behavior of electron has been calculated to give swarm parameter for the electron energy distribution function has been analysed in $CH_4$ at E/N=10, 100 for a case of the equilibrium region in the mean energy. The result of Boltzmann equation and Monte Carlo Simulation has been compared with experimental data by Ohmori, Lucas and Carter. The swarm parameter from the swarm study are expected to sever as a critical test of current theories of low energy scattering by atoms and molecules.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.12
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• pp.579-585
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.63-63
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• 2000

Deep submicron device contact hole에서의 bottom step coverage의 향상 및 SALICIDE공정의 필요성에 의해 collimated sputtering 및 ionized sputtering 등의 다양한 증착방법이 연구되어왔다. 반도체소자의 고집적화 및 미세화에 따라서 기존의 증착방법보다 더 높은 throughput을 가진 새로운 증착방법의 필요성이 대두되고 있다. Collimated sputtering방식으로 증착한 박막의 경우에는 증착속도가 느리고 collimator의 사용기간에 따른 공정조건의 변화가 단점으로 작용하였고 새로이 ionzied sputtering방식이 개발되었다. ionzied sputtering방식은 증착되는 금속 입자를 이온화시키고 기판에 바이어스를 걸어서 증착되는 입자의 방향성 및 증착속도의 향상을 얻을 수 있었다. 하지만 고집적도가 더욱 증가함에 따라서 더 높은 박막의 증착속도, bottom step coverage의 향상, 방향성의 향상과 더불어 증착되는 입자의 이온화 율의 증가 및 기존의 증착방식에 의한 박막보다 향상된 물성을 가진 박막증착의 필요성에 의해 hollow cathode magnetron sputtering방식이 연구되었다. HCM방식으로 titanium 박막을 증착하여 collimated sputtering 및 ionize sputtering 방식으로 증착한 titanium 박막과 물성을 비교해서 증착방식에 따른 박막물성의 차이를 연구하였다. 증착전에 기판온도는 30$0^{\circ}C$를 유지하였고 base pressure는 5.0$\times$10-9torr, working pressure는 5.7m torr로 유지하였다. power는 30kW를 가하여 50nm두께의 titanium박막을 증착하였다. 증착된 박막의 미세구조는 TEM 및 XRD로 분석하였다. HCM방식으로 증착한 titanium박막은 5nm두께의 비정질 층이 관찰되었고 ionized sputtering방식으로 증착한 titatnium박막에서 나타나는 것으로 보고된 silicon (002)와 titanium (0002) eledtron diffraction spot사이의 (10-10)spot은 관찰되지 않았다. 박막은 크고 작은 grain의 연속적 분포를 가졌고 HCM방식으로 증착한 titanium박막의 in-plane grain size가 다른 증착방식으로 증착한 박막에 비해 크게 관찰됨을 Plan-view TEM 분석을 통해서 확인되었다.

• Bulletin of the Korean Chemical Society
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• v.17 no.10
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• pp.939-943
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• 1996

Reactions that proceed within mixed acetylene-methanol and ethylene-methanol cluster ions were studied using an electron-impact time-of-flight mass spectrometer. When acetylene and methanol seeded in helium are expanded and ionized by electron impact, the ion abundance ratio, [CH3OH+]/[CH2OH+] shows a propensity to increase as the acetylene/methanol mixing ratio increases, indicating that the initially ionized acetylene ion transfers its charge to adjacent methanol molecules within the clusters. Investigations on the relative cluster ion intensity distributions of [CH3OH2+]/[CH3OH+] and [(CH3OH)2H+]/[CH3OH·CH2OH+] under various experimental conditions suggest that hydrogen-atom abstraction reaction of acetylene molecule with CH3OH ion is responsible for the effective formation of CH2OH ion. In ethylene/methanol clusters, the intensity ratio of [CH3OH2]/[CH3OH] increases linearly as the relative concentration of methanol decreases. The prominent ion intensities of (CH3OH)mH over (CH3OH)m-1CH2OH ions (m=1, 2, and 3) at all mixing ratios are also interpreted as a consequence of hydrogen atom transfer reaction between C2H4 and CH3OH to produce the protonated methanol cluster ions.

• Bulletin of the Korean Chemical Society
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• v.15 no.6
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• pp.465-468
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• 1994

The charge transfer compounds $(TTF)_4FeCl_3{\cdot}CH_3OH,\;(TTF)_4SbCl_4\;and\;(TTF)_5(SbBr_4)_2{\cdot}CH_3COCH_3$ were prepared from reactions of the TTF (tetrathiafulvalene) and metal halides. The compounds were characterized by spectroscopic (UV,IR, EPR and XPS) methods, magnetic susceptibility and electrical conductivity measurements. The d.c electrical conductivities of the pressed pellets are in the order of $10^{-1}-10^{-3} Scm^{-1}$, which lies in the range of semiconductor region at room temperature. It means that the partially ionized TTF has stacked in low-dimensional chain in each compound. Spectroscopic properties also indicate that TTF molecules are partially ionized and charge transfer has occurred from (TTF)n to Fe(III) center in $(TTF)_4FeCl_3{\cdot}CH_3OH$ whereas to the $-SbX_4^-$ entity in $(TTF)_4SbCl_4\;and\;(TTF)_5(SbBr_4)_2{\cdot}CH_3COCH_3$. The EPR g values are consistent with TTF radical formation and EPR linewidths suggest the delocalization of unpaired electrons along TTF stacks. A signal arised from metal (Fe and Sb) ions were not detected in EPR spectra, indicating that metal ion is in the diamagnetic state in each compound. The diamagnetic state was also examined by the magnetic susceptibility measurement. The magnetic properties reveal the significant interaction between the $TTF^+$ radical cations in the stacks. The oxidation state of metal ions was also investigated by XPS spectra.

• Advances in Energy Research
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• v.4 no.3
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• pp.213-221
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• 2016

The main purpose of this work is to test the validation of use of a four step reaction mechanism to simulate the laminar speed of hydrogen enriched methane flame. The laminar velocities of hydrogen-methane-air mixtures are very important in designing and predicting the progress of combustion and performance of combustion systems where hydrogen is used as fuel. In this work, laminar flame velocities of different composition of hydrogen-methane-air mixtures (from 0% to 40% hydrogen) have been calculated for variable equivalence ratios (from 0.5 to 1.5) using the flame propagation module (FSC) of the chemical kinetics software Chemkin 4.02. Our results were tested against an extended database of laminar flame speed measurements from the literature and good agreements were obtained especially for fuel lean and stoichiometric mixtures for the whole range of hydrogen blends. However, in the case of fuel rich mixtures, a slight overprediction (about 10%) is observed. Note that this overprediction decreases significantly with increasing hydrogen content. This research demonstrates that reduced chemical kinetics mechanisms can well reproduce the laminar burning velocity of methane-hydrogen-air mixtures at lean and stoichiometric mixture flame for hydrogen content in the fuel up to 40%. The use of such reduced mechanisms in complex combustion device can reduce the available computational resources and cost because the number of species is reduced.

• The Korean Journal of Food And Nutrition
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• v.35 no.5
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• pp.295-301
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• 2022

The medicines for treating osteoporosis currently in use have minor to severe side effects, and can be financially burdensome. Thus, there is a need for prevention and alternative supplement that is relatively inexpensive, and can be easily consumed daily as an alternative dietary therapy. In this study, bone marrow density of the spine and femur of osteoporosis patients were checked before and after consuming complex composed of calcium and magnesium, considered to be the core of bone mineral content. November 2017-November 2021, patients with T-score of less than -2.5 or -1.0 < T-score < -2.5 with history of fractures or recent fractures were enrolled. The data of 60 patients who orally administered Ionized Cal/Mag^TM Complex were reviewed retrospectively, and it was significantly confirmed that the average value of T-score was up-regulated by 0.5. Additionally, the cumulative dose was observed to have a positive effect, on the improvement of BMD in the 2nd Lumbar and Femur neck. It is expected that better results will be achieved if use of the supplement is continued.

• Journal of Nutrition and Health
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• v.17 no.4
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• pp.245-252
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• 1984

The aim of the present experiment was to investigate the effects of anionization on the various stage of mice growth, the feeding level of diets, the switch - over effects, effects of plane of nutrition on growth of mice, the effects of method of ionization on growth of mice and associated breeding performance. Mice in polyethylene cages were placed on vinyl plate charged anion by an Electrical Ionizing Machine. At an early growing stages body weight gains of mice anionized were not different from the unionized group. The dietary intake did not affect significantly the body weight of mice 15- l7g. The growth of mice of 11.5-16.2g was not affected by ionization statistically, but the ionized group increased slightly. The switching over from the untreated to the ionization slightly depressed the ionized mice by 2.4g, the untreated switched over to ionization group by 2.28g as compared with the 3.29g for the untreated during the 4- day - feeding period. Plane of nutrition and ionization did not significantly affect the growth of mice of 7.1-15.8g when mice were fed high - protein and high - carbohydrate diets. The Common Ionization Method was appeared statistically superior to the Overnight - Ionization Method. The growth rate of the offspring of mice ionized prior to conception was found to be normal but the number of progeny was considerablly high.

• Korean Journal of Environmental Agriculture
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• v.12 no.2
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• pp.169-175
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• 1993

O-Ethyl S-methyl ethylphosphonothioate was studied for chemical and metabolic oxidation using $^{31}P-NMR$ analyses. The chemical shifts of O-ethyl ethylphosphonic acid (2) which is one of major metabolites were changed with the variation of oxidation systems. $^{31}P-NMR$ chemical shifts of 2 were observed at 40.15ppm from oxidaton by MCPBA, 30.98 ppm by MMPP, 29.31 ppm from in vitro rat liver microsomal oxidation, and 29.10 ppm from in vivo metabolism in houseflies. $^{31}P-NMR$ chemical shift of 2 in two different solvents such as deutero-chloroform and deuterium oxide were observed at 30.70 ppm and 40.15 ppm, respectively. And those of the metabolites were also observed at around 30 ppm under the conditions of pH 3, 5.6 and 14 and 47.91 ppm under pH 1 which is a strong acidic condition. It could be explained that the ionized form of 2 should have greater shielding effect on phosphorus atom and hence shows upfield chemical shift in polar solvents and alkaline conditions. On the other hand, a protonated form under organic solvents and the strong acidic condition should have less shielding effect than its ionized form, shifting the peak downfield.