• Title/Summary/Keyword: Ion range

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A Study on the Ion Reflective Index of Silicon Wafer by Implantation Angle Variation. (실리콘 웨이퍼의 이온주입각 변화에 의한 이온반사율에 관한 연구)

  • 강용철;이우선;박영준
    • The Transactions of the Korean Institute of Electrical Engineers
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    • v.40 no.6
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    • pp.590-597
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    • 1991
  • Ion reflective index and sheet resistance in the silicon oblique range smaller than 8 degree and optimization of annealing temperature have been studied. A four point probe was used to obtain the sheet resistance after annealing, while high resolution SIMS was used to determine the Boron and Fluorine atomic profiles before and after annealing. Experimental results and theory of ion reflective index are compared. Ion reflective index was found to decrease according to increasing an ion oblique angle. We introduce a simple analytical model ion reflection, concidering the Rutherford scattering model. This result can not be explained by the conventional Gaussian model.

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Monte-Carlo Simulation of Focused ton Beam Lithography (집속 이온빔 리소그라피의 몬데칼로 전산 모사)

  • 이현용;정홍배
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1993.11a
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    • pp.134-136
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    • 1993
  • Microelectronic fabrication technology .is based on the use of lithsgraphy to create small linewidths and patterns that make up ULSI. In previous papers, we discussed the theoretically calculated values such as ion range, ion concentration,ion transmission coefficient and the defocused ion beam-induced characteristics in a-Se$_{75}$Ge$_{25}$. In this paper, the typical Monte Carlo (MC) simulation results and p개cedures for the focused ion beam lithography were presented. The interaction and scattering of ions with the resist depend on the beam energy, impact parameter arid resist parameters. For ion exposure simulations, the quantity of interest is the spatial distribution of energy deposited by ions in the resist due to interaction phenomena with resist ions.s.s.

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Adsorption of Hg(I), Pb(II), and U(VI) ions using from Fruits of Schizandra Chinensis (오미자를 이용한 Hg(I), Pb(II), U(VI) 이온들의 흡착)

  • Kim, Kwan-Chun;Kim, Joon-Tae
    • Journal of environmental and Sanitary engineering
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    • v.22 no.1 s.63
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    • pp.29-35
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    • 2007
  • This study was examined adsorption ability of heavy metal Hg(I), Pb(II), and U(Vl) ion use of fruit from schizandra chinensis, The fruits of schizandra chinensis sample used breaking into fragments $50{\sim}100$ mesh. The sample solution was mixed fruits of schizandra chinensis and heavy metal ion. Each heavy metal ion of into solution was quantum analysis with ICP-AES. As the result, each condition of maxium adsorption ability of heavy metal ion was high in the range of pH 5-7, adsorption time was about 15 minutes, and the optimum temperature was $100^{\circ}C$. The heavy metal ion was increased adsorption in order of increasing concentration and in ethanol solution better than in aqueous solution.

Development and Performance Test of In-situ Particle Monitoring System using Ion-counter in Vacuum Environments (진공 환경내 실시간 입자 모니터링 시스템의 개발 및 성능평가)

  • Ahn Kang-Ho;Kim Yong-Min;Kwon Yong-Taek
    • Journal of the Semiconductor & Display Technology
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    • v.5 no.1 s.14
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    • pp.45-49
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    • 2006
  • In this paper, a new method that monitors the quantity of particles using ion-counter in vacuum environment is introduced. In-situ particle monitoring (ISPM) system is composed by Gerdien type ion-counter (house-made), DC power supply and electrometer. The ion-counter applied by positive voltage detects only positive charged particles. Therefore the particles to be detected should be in known charge state for further data analysis. ion-counter is installed at the exhaust line of process equipment where the pressure loss is structurally low. ISPM system performance has been verified with SMPS (Scanning Mobility Particle Sizer) system. The correlation coefficient is above 0.98 at the particle size range of $20{\sim}300nm$ in diameter with identified charge distribution under $0.1{\sim}10.0$ Torr.

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Determination of Total Glycyrrhetic Acid in Glycyrrhizae Radix by Second Derivative UV Spectrometry

  • Song, Seung-Bae;Choi, Jung-Kap;Yoo, Gyurng-Soo
    • Archives of Pharmacal Research
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    • v.13 no.2
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    • pp.174-179
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    • 1990
  • Second derivative (D2) spectrometry using ion-pair extraction technique was development for the determination of total glycyrrhetic acid (GA) in Glycyrrhizae Radix, Glycyr-rhizin (G) obtained from Glycyrrhizae Radix was hydrolyzed into GA in 2 N-HCI and methanol (1:1) and extracted from aqueous phase in the form of an ion-pair complex with tetrapentylammonium bromide (TPA) as a counter ion. Maximum D2 amplitude (Z value) was obtained when 1000-fold or greater molar ratio of TPA was used at pH 11. Reaction an effective extraction solvent of the ion-pair complex. The linearity of standard curve of ion-pair GA was obtained in the range of 4.120 $\mu$g/ml as GA. Assayed contents of GA in dry powder by D2 UV spectrometry and HPLC method were 5.31 $\pm$ 0.04% and 5.20 $\pm$ 0.008%, respectively.

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Determination of Basic Drugs with Ion-Selective Membrane Electrodes Using Ion-Exchanger (이온교환체 이온선택성 전극을 이용한 염기성의약품 정량)

  • 이지연;정문모;허문회;김은정;안문규
    • YAKHAK HOEJI
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    • v.43 no.3
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    • pp.289-293
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    • 1999
  • Many poly (vinyl chloride : PVC) membrane electrodes were investigated for the determination of basic drugs, chlorpromazine, amitriptyline, nortriptyline, etc. These electrodes are based on the use of the ion-association complexes of the basic drugs with eriochrome cyanine R, chromoxane cyanine, chrome azurol S and picric acid as ion-exchange sites in a plasticized PVC matrix. All ion-exchangers except picrate complex were not proper for use, because those complexes in plasticized membrane were excluded into aqueous working solution. These drug electrodes show excellent Nernstian responses in the concentration ranges $10^{-2}~10^{-6}$ mol $dm^{-3}$. Their selectivity with respect to each other, as well as their work-able pH range have been investigated. The major advantages of the proposed methods are their simplicity and speed.

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Determination of Cyanide Ion by Adsorptive Stripping Voltammetry (흡착벗김 전압전류법에 의한 시안화이온의 정량)

  • Cha, Ki-Won;Ko, Su-Jin;Kim, Jea-Kyun
    • Analytical Science and Technology
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    • v.14 no.6
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    • pp.540-544
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    • 2001
  • Determination of cyanide ion has been studied by adsorptive stripping voltammetry using hanging mercury electrode. Cyanide ion complexed with copper ion is adsorpbed on the electrode and oxidised at the positive potential scan. Optimal conditions of CN determination were found to be ; supporting electrolyte solution ; 0.1 M NaCl of ammonium buffer at pH 10, accumulation potential; -800 mV vs Ag/AgCl, accumulation time ; 300 s, scan rate ; 50mV/s. The linear concentration of cyanide ion was observed in the range $1{\times}10^{-8}$, $1{\times}10^{-7}M$. The detection limit(n/s=3) was $0.13{\mu}g/L$($5{\times}10^{-9}M$) with 3.5% RSD.

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Electrode Materials for Lithium Ion Batteries

  • Chowdari, B.V.R.
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.10a
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    • pp.5-5
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    • 2011
  • Lithium ion batteries are found to have wide range of applications in variety of mobile devices ranging from simple toys to electric vehicles. The performance of these batteries depends on the choice of constituent materials. In this lecture, the materials aspects and perspectives of the electrode batteries will be discussed. Results from some of the specific studies made at speaker's laboratory will be presented.

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