A Study on Etching Characteristics of Molybdenum Thin Films by Magnetically Enhanced Reactive lon Etching System (자장 강화 반응성 이온 식각 장비를 이용한 몰리브덴 박막의 식각 특성 연구)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.13 no.1
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- pp.6-12
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- 2000