• Title/Summary/Keyword: Ion mixing

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A Study on Etching Characteristics of Molybdenum Thin Films by Magnetically Enhanced Reactive lon Etching System (자장 강화 반응성 이온 식각 장비를 이용한 몰리브덴 박막의 식각 특성 연구)

  • 김남훈;권광호;김창일;장의구
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.1
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    • pp.6-12
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    • 2000
  • In this study, molybdenum thin films were etched with Cl\ulcorner/(Cl\ulcorner+SF\ulcorner) gas mixing ratio in an magneti-cally enhanced reactive ion etching(MERIE) by the etching parameters such as rf power of 250 watts, chamber pressure of 100 mTorr and B-field of 30 gauss. The etch rate was 150nm/min under Cl\ulcorner/(Cl\ulcorner+SF\ulcorner) gas mixing ratio of 0.25. At this time, the selectivity of Mo to SiO\ulcorner, photoresist were respectively 0.94, 0.05. The surface reaction of the etched Mo thin films was investigated with X-ray photoelectron spectroscopy(XPS). It was analyzed that Mo peaks was mainly observed in Mo-O bonds formed MoO\ulcorner compounds and F was detected in Mo-F and O-F bonds. Cl peaks were detected by the peak of Cl 2p\ulcorner in Cl-Mo bonds of MoCl\ulcorner or MoO\ulcornerCl\ulcorner formulas. Almost all of both Cl and S atoms had been com-bined with Mo, respectively.

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A study on the phase formation and sequence in Ni/Si system during ion beam mixing (Ion Beam Mixing에 의한 Ni/Si계의 상 형성 및 전이에 관한 연구)

  • Choe, Jeong-Dong;Gwak, Jun-Seop;Baek, Hong-Gu;Hwang, Jeong-Nam;Han, Jeong-In
    • Korean Journal of Materials Research
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    • v.5 no.5
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    • pp.503-511
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    • 1995
  • 금속/실리콘계에 대한 이온선 혼합시의 비정질상 및 결정상 형성여부를 예측할 수 있는 모델(ADF Model)과초기 결정상 예측 모델(PDF Model)의 적용을 실험적으로 조사하기 위하여 Ni/Si계에 대한 이온선 혼합을 온도와 이온선량을 변수로 하여 행하였으며 상형ㅅㅇ과정을 해석하였다. 이온선 혼합은 80keV가속기를 이용하여 상온~20$0^{\circ}C$의 온도 범위에서 1.0 $\times$ $10^{15}$Ar^{+}$/$cm^{2}$~2.0 $\times$ $10^{-16}$Ar^{+}$/$cm^{2}$의 이온선량을 변화시키면서 실험하였고, 상분석은 TEM과 GXRD를 이용하였다. Ni/Si게에 대한 ADF값은 0.804로 양의 값을 가지므로 이온선 혼합시 비정실상이 형성되고, $Ni_{2}$Si상이 다른 화합물상보다 훨씬 큰 음의 PDF값을 갖으므로 초기 결정상이 $Ni_{2}$Si가 될 것을 예측하였다. 이러한 예측은 실험결과와 매우 잘 일치하였다. 이상의 연구결과로부터 ADF 및 PDF모델을 이용하여 박막에서 형성되는 상을 보다 정확히 예측할수 잇음을 알 수 있었다.

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Etch Mechanism of $Y_{2}O_{3}$ Thin Films in High Density Plasma (고밀도 플라즈마에 의한 $Y_{2}O_{3}$박막의 식각 메커니즘 연구)

  • 김영찬;김창일;장의구
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.25-28
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    • 2000
  • In this study, $Y_2$O$_3$ thin films were etched with inductively coupled plasma (ICP). The etch rate of $Y_2$O$_3$, and the selectivity of $Y_2$O$_3$ to YMnO$_3$ were investigated by varying Cl$_2$/(Cl$_2$+Ar) gas mixing ratio. The maximum etch rate of $Y_2$O$_3$, and the selectivity Of $Y_2$O$_3$ to YMnO$_3$ were 302/min, and 2.4 at Cl$_2$/(Cl$_2$+Ar) gas mixing ratio of 0.2 repectively. In x-ray photoelectron spectroscopy (XPS) analysis, $Y_2$O$_3$ thin film was dominantly etched by Ar ion bombardment, and was assisted by chemical reaction of Cl radical. These results were confirmed by secondary ion mass spectroscopy(SIMS) analysis. YCI, and YCl$_3$ existed at 126.03 a.m.u, and 192.3 a.m.u, respectively

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Preparation and Characterization of Spherical Carbon Composite for Use as Anode Material for Lithium Ion Batteries

  • Ahn, Byoung-Hoon;Lee, Sung-Man
    • Bulletin of the Korean Chemical Society
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    • v.31 no.5
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    • pp.1331-1335
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    • 2010
  • A novel spherical carbon composite material, in which nanosized disordered carbons are dispersed in a soft carbon matrix, has been prepared and investigated for use as a potential anode material for lithium ion batteries. Disordered carbons were synthesized by ball milling natural graphite in air. The composite was prepared by mixing the ball-milled graphite with petroleum pitch powder, pelletizing the mixture, and pyrolyzing the pellets at $1200^{\circ}C$ in an argon flow. The ballmilled graphite consists of distorted nanocrystallites and amorphous phases. In the composite particle, nanosized flakes are uniformly distributed in a soft carbon matrix, as revealed by X-ray diffractometer (XRD) and transmission electron microscopy (TEM) experiments. The composite is compatible with a pure propylene carbonate (PC) electrolyte and shows high rate capability and excellent cycling performance. The electrochemical properties are comparable to those of hard carbon.

Fluorophotometric Determination of Basic Drugs with Lumogallion, Superchrome Garnet Y and Their Alkyl Derivatives (루모갈리온, 슈퍼크롬 가넷 와이 및 그 알킬 유도체에 의한 염기성 의약품의 형광정량)

  • 송만영;김동오;이은엽;안문규
    • YAKHAK HOEJI
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    • v.37 no.3
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    • pp.209-215
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    • 1993
  • Basic drugs could be extracted as ion-paired complexes with Lumogallion, Superchrome Garnet Y and their alkyl derivatives from aqueous acid solution, and then determined fluoro-metrically after addition of aluminum ion. The analysis was carried out as follows; To a 1 ml portion of basic drugs (10$^{-9}$~2$\times$0$^{-8}$mole/ml), 1ml of 0.01w/v% fluorescent reagent solution, and 10ml of dichloroethane are added. The mixture is stirred for 1 minute. After standing for a few minutes, the dichloroethane layer is transfered to 1 ml of 0.1w/v% Al(NO$_{3}$)$_{3}$ ethanol solution. After mixing, and standing for 30 minutes at room temperature, the fluorescence intensity is measured with each maximum excitation and emission wavelength. The reagent blank is run through the whole procedure. From the degree of enhancement of fluorescence intensity, hexyl and dodecyl lumogallion and Superchrome Garnet Y were judged to be the useful one of fluorescent reagent for basic drugs analysis.

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Electrochemical Performance of Carbon/Silicon Composite as Anode Materials for High Capacity Lithium Ion Secondary Battery

  • Kim, Taek-Rae;Wu, Jing-Yu;Hu, Quan-Li;Kim, Myung-Soo
    • Carbon letters
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    • v.8 no.4
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    • pp.335-339
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    • 2007
  • Carbon/silicon composites were synthesized by mixing silicon powders with petroleum pitch and subsequent heat-treatment. The resultant composites were composed of carbon and nano-size crystalline silicon identified by XRD and EDX. FIB images and SEM images were taken respectively to detect the existence of silicon impregnated in carbon and the distribution of silicon on the carbon surface. The obtained carbon/silicon materials were assembled as half cell anodes for lithium ion secondary battery and their electrochemical properties were tested. The pitch/silicon composite (3 : 1 wt. ratio) heat treated at $1000^{\circ}C$ and mixed with 55.5 wt.% of graphite showed relatively good electrochemical properties such as the initial efficiency of 78%, the initial discharge capacity of 605 mAh/g, and the discharge capacity of 500 mAh/g after 20 cycles.

Disturbance in the Daytime Midlatitude Upper F Region Associated with a Medium Scale Electrodynamic Vortex Motion of Plasma

  • Hegai, Valery V.;Kim, Vitaly P.
    • Journal of Astronomy and Space Sciences
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    • v.33 no.3
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    • pp.207-210
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    • 2016
  • Under the assumption of the presence of a medium-scale E × B drift vortex of plasma in the daytime midlatitude F region, and using a simplified ionospheric model, we demonstrate that the E × B drift produces noticeable perturbations in the horizontal distribution of the plasma density in the upper F region. The pattern of ion density perturbations shows two separate medium scale domains of enhanced and reduced ion density with respect to the background. The E × B drift does not produce multiple small-scale ion density irregularities through plasma mixing because of the suppression effect of the field-aligned ambipolar plasma diffusion.

Ion Permeability, Dehydration and Relaxation Times of Hydrated Ions Through Membranes (반투막을 통한 수화된 이온의 투과속도 탈수화율 및 완화시간에 관한 연구)

  • Kim Mu Shik;Lee Hai Bang;Kim Sung Wan;Joseph D. Andrade
    • Journal of the Korean Chemical Society
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    • v.20 no.6
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    • pp.448-452
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    • 1976
  • A simplified statistical mechanical method was developed for the calculation of the dehydration fraction, activation free energy of dehydration, and the relaxation times of hydrated ions. The model used includes the equilibrium constant between hydrated and dehydrated water, a water-ion interaction potential energy term, and a mixing factor for the species present. The agreement between theory and experiment is good. The pressure dependence of ion dehydration is also discussed.

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An Experimental Study on Turbulent Diffusion Flame in Double Coaxial Air Jets(II) (동축이중 공기분류중의 난류확산화염에 관한 실험적 연구 II)

  • 조용대;최병윤
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.14 no.5
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    • pp.1234-1243
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    • 1990
  • Double coaxial are jets(annular and coaxial air jets) between which propane gas is fed was selected to study the structure of diffusion flames in turbulent shear flow. Schlieren and direct photographs are taken to visualize the flame structure. Mean and fluctuating temperatures and ion currents were measured to investigate the macroscopic and the instantaneous flame structure. The objective of this study is to understand the interaction between combustion and mixing process especially in the transition region of turbulent shear flow. The investigation reported in this paper focuses on the macroscopic and the instantaneous structures of three flames obtained. The increased mixing effect resulting from increase of Reynolds number of central air jet makes the flame bluish and short. When the velocity of surrounding air stream is higher than that of central air jet, the instantaneous flame structure is composed of coherent structure. It is considered that the flame structure of transitional region of mixing layer depends on the structure of mixing layer of non-reacting conditions.

Synthesis of Lithium Manganese Oxide by Wet Mixing and its Removal Characteristic of Lithium Ion (습식혼합에 의한 리튬망간 산화물의 합성과 리튬이온 제거특성)

  • You, Hae-Na;Lee, Dong-Hwan;Lee, Min-Gyn
    • Clean Technology
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    • v.19 no.4
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    • pp.446-452
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    • 2013
  • In this paper, the wet mixing method was introduced to prepare spinel lithium manganese oxide (LMO) with $Li_2CO_3$ and $MnCO_3$. The physical properties of the resulting lithium manganese oxide were characterized by the XRD and SEM. The adsorption properties of LMO for $Li^+$ were investigated by batch methods. The maximum adsorption capacity of lithium was calculated from Langmuir isotherm and found to be 27.25 mg/g. The LMO are found to have a remarkable lithium ion-sieve property with distribution coefficients ($K_d$) in the order of $Ca^{2+}$ < $K^+$ < $Na^+$ < $Mg^{2+}$ < $Li^+$, which is promising in the lithium extraction from seawater.