• Applied Science and Convergence Technology
• /
• 제23권6호
• /
• pp.340-344
• /
• 2014

Ion pumps continue to be a staple in ultra-high vacuum (UHV) applications. Since their adoption as a primary UHV pump in the 1960's, it has been known that a variety of particles can emanate from within the ion pump and cause undesirable effects on current measurements and optics components. Historically the solution has been baffling and shielding which results in longer conductance paths to the ion pump. Those solutions can work, but require a larger pump and more vacuum plumbing to compensate for conductance losses. The first step was to fully understand the nature of the particles and their charges. Once those were characterized options for emissions reduction were evaluated. It was determined that an efficient design of shielding near the source of the particle generation site was the most cost effective solution. With a slight modification to the chamber of a small ion pump, internal shielding was developed that reduced the emissions by a factor of up to 1000 times.

• 대한방사선기술학회지:방사선기술과학
• /
• 제31권2호
• /
• pp.183-188
• /
• 2008

본 연구의 목적은 방사선치료용 선형가속기의 품질관리를 수행하기 위한 2차원이온전리함배열의 유용성을 검증하기 위함이다. 물팬톰과 필름으로 수행하던 기존의 품질관리 방법을 2차원이온전리함배열(MatriXX, Wellhofer Dosimetrie, Germany)을 이용하여 유용성을 검증하였다. MatriXX는 1,020개의 평판형 전리함(용적: $0.08\;cm^3$, 직경: 4.5mm, 높이: 5mm, 배열간격: 7.62mm)이 일정한 간격으로 $24{\times}24\;cm^2$의 면적에 배열 되어있다. MatriXX의 유용성을 검증하기 위해 연속된 5개월에 걸쳐 선량균등도, 에너지($TPR_{20,10}$), 그리고 절대 선량을 측정하여 물팬톰과 $0.65\;cm^3$ (FC65G, Wellhofer Dosimetrie, Germany) Farmer형 이온전리함을 통해 얻은 값과 비교, 분석하였다. MatriXX 측정 시 폴리스틸렌 고체 팬톰(${\rho}:\;1.18\;g/cm^3$)을 이용하였으며, MatriXX 고유의 커버 물질의 밀도와 두께(${\rho}:\;1.06\;g/cm^3$, t: 0.36 cm)를 물과 등가의 값으로 환산하여 적용하였다. 또한, 기하학적 점검을 위한 예비실험에서 콜리메이터의 회전축과 하프빔의 접합부를 필름측정의 결과와 비교하였다. 선량계측학적 실험 결과, MatriXX로 얻은 데이터와 물팬톰의 결과가 모든 항목에서 ${\pm}1%$ 이내의 일치를 보였다. 기하학 품질관리의 예비 실험 결과 기존의 필름방식과 유사한 결과를 얻었으며, 기하학적 품질관리의 정량적 분석 가능성을 제시하였다. 본 연구를 통해 주기적인 선형가속기의 품질관리에서 물팬톰과 필름을 대체할 수 있는 MatriXX의 유용성을 확인하였으며, 향후 비용절감과 시간과 인력을 절감할 수 있는 품질관리의 새로운 방법을 제시하였다.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.1186-1190
• /
• 2003

In this paper, a valveless bubble-actuated fluid micropump was has been developed and its performance was tested. The valveless micropump consists of the lower plate, the middle plate, the upper plate and a resistive heater. The lower plate includes the nozzle-diffuser elements and the double-chamber. Nozzle-diffuser elements and a double-chamber are fabricated on the silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The lower plate also has inlet/outlet channels for fluid flow. The middle plate is made of glass and plays the role of the diaphragm. The chamber in the upper plate is filled with deionized water, and which contacts with the resistive heater. The resistive heater is patterned on a silicon substrate by Ti/Pt sputtering. Three plates and the resister heater are laminated by the aligner and bonded in the anodic bonder. Since the bubble is evaporated and condensed periodically in the chamber, the fluid flows from inlet to outlet with respect to the diffusion effect. In order to avoid backflow, the double chamber system is introduced. Analytical and experimental results show the validity of the developed double-chamber micropump.

• KSTLE International Journal
• /
• 제3권2호
• /
• pp.101-109
• /
• 2002

This paper presents the fabrication and performance inspection of a peristaltic micropump by flow simulation. The valve-less micropump using the diffuser/nozzle is consists of base plate, mid plate, top plate and connection tubes fur inlet and outlet. In detail, the base plate is composed of two diffuser nozzles and three chambers, the mid plate consists of a glass diaphragm for the volumetric change of the pumping chamber. The inlet and outlet tubes are connected at the top plate and the actuator fur pressing the diaphragm is located beneath the top plate. The micropump is fabricated on the silicon wafer by DRIE (Deep Reactive ion Etching) process. The pumping performances are tested by the pneumatic test rig and compared with the simulated results fur various dimensions of diffuser nozzles. The pumping characteristics of the micropump by the volumetric change at the pumping chamber is modeled and simulated by the commercial software of FLOW-3D. The simulated results shows that reverse flow is the inherent phenomena in the diffuser nozzle type micropump, but it can be reduced at the dual pumping chamber model.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 1997년도 한국자동제어학술회의논문집; 한국전력공사 서울연수원; 17-18 Oct. 1997
• /
• pp.1371-1374
• /
• 1997

We had developed the on-line environmental monitoring system which has installed around Kori Nuclear Power Plants and will be taken the place of the existing system. The system consists of a main computer and 11 sets of radiation monitoring post equipments. Nal(Tl) scintillation detectro was adopted in addition to ion-chamber detector and implemented with DCU(Dose Conversion Unit) and SCA(Single Channel Analyzer). Compared with the existing system, it has revised feature in the radiation measurements which are detection of artificial radioactivity and 2-ways of the radiatiion detectors. The field test trsults show that the developed radiation detecting equipments can measure environmental radiation withn 5.0% of the theoretical value.

• 대한전자공학회:학술대회논문집
• /
• 대한전자공학회 2000년도 하계종합학술대회 논문집(2)
• /
• pp.282-285
• /
• 2000

Four helical resonators are distributed in a 2 ${\times}$ 2 array by modifying upper part of the conventional reactive ion etching(RIE) type LCD etcher in order to prepare a large area plasma source. Since the resonance condition of the RF signal to the helical antenna, one RF power supply is used for delivering the power efficiently to all four helical resonators without an impedance matching network Previous work of 2 ${\times}$ 2array inductively coupled plasma(ICP)requires one matching circuit to each ICP antenna for more efficient power deliverly Distributions of ion density and electron temperature are measured in terms of chamber pressure, gas flow rate and RF power . By adjusting the power distribution among the four helical resonator units, argon plasma density of higher than 10$\^$17/㎥ with the uniformity of better than 7％ can be obtained in the 620 ${\times}$ 620$\textrm{mm}^2$ chamber.

• Journal of Advanced Marine Engineering and Technology
• /
• 제22권2호
• /
• pp.225-231
• /
• 1998

Flame propagation speed characteristics of methante-air mixtures were experimentally investigated in combustion chamber modelled engine. Flame propagation process was known as a funtion of equivalence ratio initial pressure and initial temperature. Ion probe and schlieren photograph were applied to measure the local flame speed and flame radius in quiescent mixtures. Pressure was also measured to make sure of the reproducibility and to apply combustion analysis. Burning velocity was calculated from the flame propagation speed and combustion analysis. Flames were developed faster with higher initial pressure and initial temperature but showed maximum propagation speed at equivalence ratio 1.1 regardless of initial pressure and temperature. Local flame speed was maximum values at near midpoint between center and wall.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 1999년도 추계학술대회 논문집
• /
• pp.617-620
• /
• 1999

To reduce the consumption of chemicals and ultra pure water(UPW) in cleaning process used in device manufacturing, we proposed wet processes that use electrolytic ionized water(EIW), which is generated by electrolysis of a diluted electrolyte solution or UPW and systemically investicate the EIW\`s characteristics. EIW\`s pH values are increased in cathode chamber and decreased in anode chamber according to the electrolysis time and its varied ratio is reduced with time increasement. The variation of pH and ORP is increased accordin to the applied voltage until critical voltage. But more than that voltage, the variation is decreased because of ion\`s scattering effect. When electrolyte is added, the effects of electrolysis is increased because electrolyte acts as catalyst. But when the density of electrolyte is increased more than critical value, ion\`s flowage is obstructed and the effects of electrolysis is decreased.

• 반도체디스플레이기술학회지
• /
• 제2권4호
• /
• pp.9-12
• /
• 2003

This paper describes a newly developed simulation environment for analysis and design of a plasma processing chamber based on first principles including complicated physical and chemical interactions of plasma, fluid dynamics of neutrals, and transport phenomena of particles. Capabilities of our simulator, named VIP-SEPCAD (Virtual Integrated Prototyping Simulation Environment for Plasma Chamber Analysis and Design), are demonstrated through a two dimensional simulation of an oxygen plasma chamber. VIP-SEPCAD can provide plasma properties such as spatiotemporal profiles of plasma density and potential, electron temperature, ion flux and energy, etc. By coupling neutral and particle transport models with a three moment plasma model, VIP-SEPCAD can also predict spatiotemporal profiles of chemically reactive species and particles exist in plasma.

• 한국원자력학회:학술대회논문집
• /
• 한국원자력학회 2003년도 추계학술발표대회 요약집
• /
• pp.415.2-415.2
• /
• 2003