• Title/Summary/Keyword: Ion beam technology

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Using Electron-beam Resists as Ion Milling Mask for Fabrication of Spin Transfer Devices

  • Nguyen Hoang Yen Thi;Yi, Hyun-Jung;Shin, Kyung-Ho
    • Journal of Magnetics
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    • v.12 no.1
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    • pp.12-16
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    • 2007
  • Magnetic excitation and reversal by a spin polarized current via spin transfer have been a central research topic in spintronics due to its application potential. Special techniques are required to fabricate nano-scale magnetic layers in which the effect can be observed and studied. This work discusses the possibility of using electron-beam resists, the nano-scale patterning media, as ion milling mask in a subtractive fabrication method. The possibility is demonstrated by two resists, one positive tone, the ZEP 520A, and one negative tone, the ma-N2403. The advantage and the key points for success of this process will be also addressed.

Inorganic Thin film for Horizontal Aligned Liquid Crystal with Non-rubbing Technologies (무기막에서의 수형배향된 액정의 특성에 대한 연구)

  • Choi, Daesub;Shin, Hochul
    • Journal of Satellite, Information and Communications
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    • v.10 no.2
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    • pp.75-79
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    • 2015
  • In this study, we investigated the electro-optical (EO) characteristic of fringe-field switching (FFS) mode cell by the ion beam alignment method on the a-C:H thin film. The suitable inorganic thin films for FFS cell and the aligning capabilities of nematic liquid crystal (NLC) using the new alignment material of a-C:H thin film were studied. An excellent voltage-transmittance (V-T) and response time curve of the ion beam aligned FFS-LCD was observed with oblique ion beam exposure on the a-C:H thin films. Also, the V-T hysteresis characteristics of the ion beam-aligned FFS-LCD with IB exposure on the a-C:H thin films is almost the same as that of the rubbing-aligned FFS cell on a polyimide surface.

Dielectric properties of Pt/PVDF/Pt modified by low energy ion beam irradiation

  • Sung Han;Yoon, Ki-Hyun;Jung, Hyung-Jin;Koh, Seok-Keun
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.110-110
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    • 1999
  • Polyvinylidenefluoride (PVDF) is most used in piezoelectric polymer industry. Electrode effect on the electrical properties of PVDF has been investigated. al has been used due to fair adhesion for PVDF. Work function of metal plays an important role on the electrical properties of ferroelectrics for top and /or bottom electrode. However, Al has much lower work function than Pt or Au and so leakage current of Al/PVDF/Al may be large. Pt or Au has not been used for electrode of PVDF system due to poor adhesion. PVDF irradiated by Ar+ ion beam with O2 environment takes good adhesion to inert metal. Contact angle of PVDF to triple distilled water was reduced from 75$^{\circ}$ to 31$^{\circ}$ at 1$\times$1015 Ar+/cm2. Working pressure was 2.3$\times$10-4 Torr and base pressure was 5$\times$10-6 Torr. Pt was deposited by ion beam sputtering and thickness of pt film was about 1000$\AA$. in previous study, enhancing adhesion of Pt on PVDF was shown. in this study, effect of electrode on PVDF will be represented.

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Solution-Derived Hafnium Lanthanum Oxide Films Prepared Using Ion-Beam Irradiation and Their Applications as Alignment Layers for Twisted-Nematic Liquid Crystal Displays

  • Oh, Byeong-Yun
    • Transactions on Electrical and Electronic Materials
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    • v.17 no.6
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    • pp.355-358
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    • 2016
  • We present the alignment characteristics of LC (liquid crystal) molecules on solution-derived HLO (hafnium lanthanum oxide) films fabricated using IB (ion-beam) irradiation. We then demonstrated that LC molecules can be homogeneously and uniformly aligned on the HLO film irradiated at an IB incident energy of 1.2 keV. Physicochemical analysis methods such as atomic force microscopy and X-ray photoelectron spectroscopy were used to verify the LC alignment mechanism on the IB-irradiated HLO film. In addition, the electro-optical performance of a TN (twisted-nematic) cell fabricated using the IB-irradiated HLO film exhibited characteristics superior to those of the conventional TN cell fabricated using a rubbed polyimide layer.

3 Dimensional Machining System using Focused ion Beam (집속 이온빔에 의한 3차원 가공 시스템)

  • 박철우;이종항
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2004.04a
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    • pp.490-493
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    • 2004
  • There is great difficulty in machine below 10 micrometers by conventional machining methods, such as micro-EDM. However, ultra micro machining using focused ion beam(FIB) is able to machine to 50 nanometers. Bie & moulds techniques are better than one-to-one machining techniques in regards to production costs in the mass production of ultra size structures. Also, it is advantageous to machine die & moulds to the 10 micrometers level by FIB technique rather than other techniques. It is difficult to machine the three dimensional machining, such as micro lens, using FIB system because of their machining characteristics. In this paper, three dimensional machining techniques were properly introduced, and also experiments showed effectiveness of their techniques.

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Pt-and $TiO_2-doped\; Nb_2O_5$ Thin Film by Ion-Beam-Enhanced Deposition

  • Zhu, Jianzhong;Ren, Congxin
    • Journal of the Korean Vacuum Society
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    • v.7 no.s1
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    • pp.100-105
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    • 1998
  • This paper describes the preparation of Pt-and $TiO_2$-doped $Nb_2O_5$ thin film by Ion-Beam-Enhanced Deposition. Platinum and titanium doping, and Nb2O5 deposition were carried out in situ. The dependence of oxygen sensing properties on the amounts of Pt and Ti dopant in the $Nb_2O_5$ film was investigated. There were the highist sensitivity, the lowest temperature coefficient and the shortest responce time at doping of 5 mol% $TiO_2$ and 0.3 mol%Pt

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Liquid Crystal Orientation Mechanism: Competition Between Rubbing and Ion-beam Method

  • Kim, Ji-Ho;Han, Jeong-Min;Shon, Jin-Geun
    • Journal of Electrical Engineering and Technology
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    • v.8 no.6
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    • pp.1457-1461
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    • 2013
  • The effect of liquid crystal (LC) alignment on a homeotropic polyimide (PI) surface induced by ion beam (IB) irradiation and rubbing process was studied. LC alignment was not affected by IB irradiation with an exposure time of 10 s, and an IB irradiation with an exposure time of 60 s more effectively oriented the LCs on the PI layer than the rubbing process. It was assumed that the LC alignment depended on the C-O bonds created from the C=O bonds on the PI surface broken by IB irradiation after an exposure time of 60 s, which resulted in a strong surface energy that transformed the homeotropic LC alignment to homogeneous states.

Focused ion beam-scanning electron microscope examination of high burn-up UO2 in the center of a pellet

  • Noirot, J.;Zacharie-Aubrun, I.;Blay, T.
    • Nuclear Engineering and Technology
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    • v.50 no.2
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    • pp.259-267
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    • 2018
  • Focused ion beam-scanning electron microscope and electron backscattered diffraction examinations were conducted in the center of a $73\;GWd/t_U\;UO_2$ fuel. They showed the formation of subdomains within the initial grains. The local crystal orientations in these domains were close to that of the original grain. Most of the fission gas bubbles were located on the boundaries. Their shapes were far from spherical and far from lenticular. No interlinked bubble network was found. These observations shed light on previous unexplained observations. They plead for a revision of the classical description of fission gas release mechanisms for the center of high burn-up $UO_2$. Yet, complementary detailed observations are needed to better understand the mechanisms involved.

Research of Nitriding Process on Austenite Stainless Steel with Plasma Immersion Ion Beam (플라스마 이온증착 기술을 이용한 스테인리스강의 질화처리에 관한 연구)

  • Kim, Jae-Dol;Park, Il-Soo;Ok, Chul-Ho
    • Journal of Advanced Marine Engineering and Technology
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    • v.32 no.2
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    • pp.262-267
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    • 2008
  • Plasma immersion ion beam (PIIB) nitriding process is an environmentally benign and cost-effective process, and offers the potential of producing high dose of nitrogen ions in a way of simple, fast and economic technique for the high plasma flux treatment of large surface area with nitrogen ion source gas. In this report PIIB nitriding technique was used for nitriding on austenite stainless steel of AISI304 with plasma treatment at $250{\sim}500^{\circ}C$ for 4 hours, and with the working gas pressure of $2.67{\times}10^{-1}$ Pa in vacuum condition. This PIIB process might prove the advantage of the low energy high flux of ion bombardment and enhance the tribological or mechanical properties of austenite stainless steel by nitriding, Furthermore, PIIB showed a useful surface modification technique for the nitriding an irregularly shaped three dimensional workpiece of austenite stainless steel and for the improvement of surface properties of AISI 304, such as hardness and strength

A Study on $He^+$ Ion Beam Extraction in the Duoplasmatron Ion Source (Duoplasmatron 이온원에서의 $He^+$ 이온빔 인출에 관한 연구)

  • Myong-Seop KIM;Hae-iLL BAK
    • Nuclear Engineering and Technology
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    • v.23 no.4
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    • pp.438-443
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    • 1991
  • The operational characteristics of the duoplasmatron ion source are investigated in order to obtain the maximum achievable extraction current of the $He^+$ ion beam with the small divergence. Under the variations of the gas pressure, the arc current, the magnet current and the extraction voltage of the ion source, the change of the extracted $He^+$ ion beam current is observed. An oxide filament, the mixture of BaO and SrO coated on Ni meshes, is used as the hot cathode, and its average lifetime is about 100 hours. The extraction current is linearly proportional to the arc current. As the magnet current of the ion source is increased, the extraction current increases, but the beam divergence becomes larger. The maximum extraction current is obtained at the source pressure of 0.084 Torr. The extraction current is proportional to the extraction voltage raised to the power of 3/2 as estimated from theory. At the extraction voltage of 5.72 kV, the maximum extraction current of 50 $\mu$A is obtained under the optimized extraction condition.

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