• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.436-437
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• 2012

Double patterning technology (DPT) has been suggested as a promising candidates of the next generation lithography technology in FLASH and DRAM manufacturing in sub-40nm technology node. DPT enables to overcome the physical limitation of optical lithography, and it is expected to be continued as long as e-beam lithography takes place in manufacturing. Several different processes for DPT are currently available in practice, and they are litho-litho-etch (LLE), litho-etch-litho-etch (LELE), litho-freeze-litho-etch (LFLE), and self-aligned double patterning (SADP) [1]. The self-aligned approach is regarded as more suitable for mass production, but it requires precise control of sidewall space etch profile for the exact definition of hard mask layer. In this paper, we propose etch end point detection (EPD) in spacer etching to precisely control sidewall profile in SADP. Conventional etch EPD notify the end point after or on-set of a layer being etched is removed, but the EPD in spacer etch should land-off exactly after surface removal while the spacer is still remained. Precise control of real-time in-situ EPD may help to control the size of spacer to realize desired pattern geometry. To demonstrate the capability of spacer-etch EPD, we fabricated metal line structure on silicon dioxide layer and spacer deposition layer with silicon nitride. While blanket etch of the spacer layer takes place in inductively coupled plasma-reactive ion etching (ICP-RIE), in-situ monitoring of plasma chemistry is performed using optical emission spectroscopy (OES), and the acquired data is stored in a local computer. Through offline analysis of the acquired OES data with respect to etch gas and by-product chemistry, a representative EPD time traces signal is derived. We found that the SE-EPD is useful for precise control of spacer etching in DPT, and we are continuously developing real-time SE-EPD methodology employing cumulative sum (CUSUM) control chart [2].

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.284-284
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• 2011

Ion sensitive field effect transistor (ISFET)는 용액 중의 각종 이온 농도를 측정하는 반도체 이온 센서이다. ISFET는 작은 소자 크기, 견고한 구조, 즉각적인 반응속도, 기존의 CMOS공정과 호환이 가능하다는 장점이 있다. ISFET의 기본 구조는 기존의 metal oxide semiconductor field effect transistor (MOSFET)에서 고안되었으며, ISFET는 기존의 MOSFET의 게이트 전극 부분이 기준전극과 전해질로 대체되어진 구조를 가지고 있다. ISFET소자의 pH 감지 메커니즘은 감지막의 표면에서 pH용액의 수소이온이 막의 표면에 속박되어 표면전위의 변화를 유발하는 것에 기인한다. 그 결과, 수소이온의 농도에 따라 ISFET의 문턱전압의 변화를 일으키게 되고 드레인 전류의 양 또한 달라지게 된다. 한편, ISFET의 좋은 pH감지특성과 높은 출력특성을 얻기 위하여 high-k물질들이 감지막으로써 지속적으로 연구되어져 왔다. 그 중 Al2O3와 HfO2는 높은 유전상수와 좋은 pH 감지능력으로 인하여 많은 연구가 이루어져온 물질이다. 하지만 HfO2는 높은 유전상수를 갖음에도 불구하고 화학용액에 대한 non-ideal 효과에 취약하다는 보고가 있다. 반면에 Al2O3의 유전상수는 HfO2보다 작지만 화학용액으로 인한 손상에 대하여 강한 immunity가 있는 재료이다. 본 연구에서는, 이러한 각각의 high-k 물질들의 단점을 보안하기 위하여 SiO2/HfO2/Al2O3(OHA) 적층막을 이용한 ISFET pH 센서를 제작하였으며 SOI 기판에서 구현되었다. SOI기판에서 OHA 적층막을 이용한 ISFET 제작이 이루어짐에 따라서 소자의 signal to noise 비율을 증대 시킬것으로 기대된다. 실제로 SOI-ISFET와 같이 제작된 SOI-MOSFET는 1.8${\times}$1010의 높은 on/off 전류 비율을을 보였으며 65 mV/dec의 subthreshold swing 값을 갖음으로써, 우수한 전기적 특성을 보이는 ISFET가 제작이 되었음을 확인 하였다. OHA 감지 적층막의 각 층은 양호한 계면상태, 높은 출력특성, 화학용액에 대한non-ideal 효과에 강한 immunity을 위하여 적층되었다. 결론적으로 SOI과 OHA 적층감지막을 이용하여 우수한 pH 감지 특성을 보이는 pH 센서가 제작되었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.472-472
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• 2011

The capacitive coupled plasma (CCP) has been extensively used in the semiconductor industry because it has not only good uniformity, but also low electron temperature. But CCP source has some problems, such as difficulty in varying the ion bombardment energy separately, low plasma density, and high processing pressure, etc. In this reason, dual frequency CCP has been investigated with a separate substrate biasing to control the plasma parameters and to obtain high etch rate with high etch selectivity. Especially, in this study, we studied on the etching of $SiO_2$ by using the pulse-time modulation in the dual-frequency CCP source composed of 60 MHz/ 2 MHz rf power. By using the combination of high /low rf powers, the differences in the gas dissociation, plasma density, and etch characteristics were investigated. Also, as the size of the semiconductor device is decreased to nano-scale, the etching of contact hole which has nano-scale higher aspect ratio is required. For the nano-scale contact hole etching by using continuous plasma, several etch problems such as bowing, sidewall taper, twist, mask faceting, erosion, distortions etc. occurs. To resolve these problems, etching in low process pressure, more sidewall passivation by using fluorocarbon-based plasma with high carbon ratio, low temperature processing, charge effect breaking, power modulation are needed. Therefore, in this study, to resolve these problems, we used the pulse-time modulated dual-frequency CCP system. Pulse plasma is generated by periodical turning the RF power On and Off state. We measured the etch rate, etch selectivity and etch profile by using a step profilometer and SEM. Also the X-ray photoelectron spectroscopic analysis on the surfaces etched by different duty ratio conditions correlate with the results above.

• Asian Journal of Atmospheric Environment
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• v.7 no.1
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• pp.1-7
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• 2013

To establish the method for investigating the behavior of aerosol particles deposited on the leaf surface against fog water under natural conditions, scanning electron microscopy with energy-dispersive X-ray (SEM-EDX) analysis and wash water analysis by ion chromatography after the washing treatment were performed using leaves of white birch collected from low part of the tree crown and the top of the tree in Sapporo City, Hokkaido, northern Japan. Each of collected leaves was divided into two parts according to the treatment performed: leaf surface (adaxial side) was 1) untreated, and 2) washed with deionized water with a pipette. In untreated samples, many particles of various shapes, including soil particles and organic debris, were deposited on the surface. Particles containing S were found on the surface of samples collected from only low part of the tree crown. After the washing treatment, SEM-EDX analysis revealed that soil particles and particles containing S had been washed off with water, although some particles such as soil particles and organic debris still remained on the leaf surface. The major anion such as $SO{_4}^{2-}$ was detected in wash water of all samples, although the peak of S in X-ray spectra was not detected from samples collected at top of the tree. The combination of SEM-EDX analysis with wash water analysis indicated that $SO{_4}^{2-}$ was deposited on the leaf surface in dissolved state and/or in state of submicron particles. These results suggested that fog water could remove soil particles and particles containing S and $SO{_4}^{2-}$ from the leaf surfaces, but not all particles. There was no difference in sampling position in the tree crown. Our study suggested that combination with SEM-EDX analysis and wash water analysis would be effective for investigation of the behavior of particles on the leaf surface against fog water.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.30A no.12
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• pp.51-59
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• 1993

A 4${\times}10^{19}cm^{3}$ carbon-doped base AlGaAs/GaAs HBY was grown using carbontetracholoride(CCl$_4$) by atmospheric pressure MOCVD. Abruptness of emitter-base junction was characterized by SIMS(secondary ion mass spectorscopy) and the doping concentration of base layer was confirmed by DXRD(double crystal X-ray diffractometry). Mesa-type HBTs were fabricated using wet etching and lift-off technique. The base sheet resistance of R$_{sheet}$=550${\Omega}$/square was measured using TLM(transmission line model) method. The fabricated transistor achieved a collector-base junction breakdown voltage of BV$_{CBO}$=25V and a critical collector current density of J$_{O}$=40kA/cm$^2$ at V$_{CE}$=2V. The 50$\times$100$\mu$$^2$ emitter transistor showed a common emitter DC current gain of h$_{FE}$=30 at a collector current density of JS1CT=5kA/cm$^2$ and a base current ideality factor of ηS1EBT=1.4. The high frequency characterization of 5$\times$50$\mu$m$^2$ emitter transistor was carried out by on-wafer S-parameter measurement at 0.1~18.1GHz. Current gain cutoff frequency of f$_{T}$=27GHz and maximum oscillation frequency of f$_{max}$=16GHz were obtained from the measured Sparameter and device parameters of small-signal lumped-element equivalent network were extracted using Libra software. The fabricated HBT was proved to be useful to high speed and power spplications.

• Journal of the Korean Society of Propulsion Engineers
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• v.6 no.1
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• pp.55-62
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• 2002

A new off-surface visualization method of using the micro water droplet and laser beam sheet was presented. About a size of 5 to TEX>$10\mu\textrm{m}$ micro water droplet could be made from home-style ultrasonic humidifier, A 3 W Argon ion laser and cylindrical lens were used to generate a laser beam sheet, which interrogate specific cross section of the vortical flow field. Application of this new visualization method was conducted in KAFA small-sized low speed wind tunnel of having the test section of 0TEX>$0.9 m(W){\times}$0.9 m(H){\times}2.1 m(L)$$$. Visualization results show this method relatively easy and safe flow visualization method for wind tunnel testing. Moreover, this method is also make up for the disadvantage of smoke visualization, and can be applied to higher flow velocity range than that of smoke visualization.

• Korean Journal of Agricultural Science
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• v.29 no.1
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• pp.55-65
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• 2002

The most representative fruit in Yanbian area is Applepear(Ping Guo Li). It has been a important resource of farm income. According to the economic growth and income Increase of individual consumers, food consumption pattern will be changed from grain to high value cash crops such as Applepear and vegetables. The globalization and adapt ion of free market oriented economic policy of China government have led to change the collective farming system to individual farm management system. The institutional transformation have brought about high productivity of farm products and incomes of farmers. Therefore the plantation area of Applepear and requirement of investment cost for establishment of Applepear farms have increased rapidly since the 1980's, the time of perestroika and glasnost in Chinese economy. In prosperity of Chinese agriculture, individual farmer's decision making as free selection of farmland use, selection of high pay-off crops, free sale of the products in free market and credit support for the project might be the most important factors. In case of Applepear farm development, net present value of the project net benefit was estimated at 55.518won per hectare and financial rate of return was 21%. The benefit/cost ratio of the project was 2.11. Considering 10% of discounting rate or the opportunity cost of capital in China the Applepear farm development project showed us economically feasible in the light of the above efficiency indices. The Chinese government has to support Applepear farm development project financially and institutionally considering the high-payoff benefit of the fruit and farmer's in come increase in the future.

• The Bulletin of The Korean Astronomical Society
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• v.36 no.1
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• pp.88.2-88.2
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• 2011

The far-ultraviolet (FUV) continuum and spectral images of C IV and H2 emission lines for the region of Orion-Eridanus Superbubble (OES) are hereby presented and compared with the maps obtained in other wavelengths. While the region shows complex structures, consisting of hot gases and cold dust, a close examination reveals that the FUV emission in this region can be understood reasonably as the result of their interactions. We confirm the origin of most diffuse FUV continuum to be starlight scattered by dust, but we also find that the ionized gas also contributes 50-70% of the total FUV intensity in the regions of H_alpha arcs. We note the bright diffuse FUV continuum in the eastern part of the northern dust-rich region, and attribute it to the bright early-type stars more abundant in this region than in the west as the amount of dust itself does not seem to be much different across 'arc A' that separates the two regions. In addition, two P Cygni-type stars are identified in this eastern region and their peculiar spectral profiles around the C IV emission line are anifested in the scattered diffuse spectrum. Besides this, the C IV emission is generally enhanced at the boundaries of the hot X-ray cavities where thin dust regions are located, confirming the thermal interface nature of the origin of this cooling emission line. The morphology of the H2 emission shows a general correlation with dust extinction features but its intensity peaks are rather located in thin dust areas, off the peak dust regions. Furthermore, H2 emission is seen to be weak in the arc A region though the arc passes through the center of the dust-rich area. Hence, the H2 emission and dust features, together with those of X-ray and ion lines emissions, show stratified structure of arc A quite well, again confirming its thermal interface nature.

• Development and Reproduction
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• v.24 no.3
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• pp.215-224
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• 2020

Seawater adaptability of steelhead trout increases along with the increase in the size of the fish, independent of parr-smolt transformation. Three 96 h seawater challenge tests were conducted to determine the size at which seawater adaptability of steelhead trout develops. Plasma Na⁺ and Cl^- levels, moisture content, gill Na⁺/K⁺ ATPase activity, and mortality during the 96 h after direct transfer to seawater (32 ppt) were determined. Plasma Na⁺ and Cl^- levels in 50 g fish continuously increased during the 96 h after the transfer to seawater (p<0.05), but the levels in 100 and 150 g fish leveled off after 24 h (p<0.05). Both 100 and 150 g size steelhead trout maintained muscle moisture content (%) better than 50 g size fish (p<0.05). Gill Na⁺/K⁺ ATPase activity in the 100 g size group increased in a time-dependent manner after transfer to seawater (p<0.05), whereas activity in the 50 and 150 g sizes did not increase (p>0.05), for which a possible explanation was discussed. A mere 2.6% mortality in both the 50 and 150 g size groups was observed. In conclusion, the current results indicate that 50 g size steelhead trout did not show development of a high level of hypoosmoregulatory capacity, whereas fish in the 100 and 150 g size groups showed a high level in our experimental conditions. Therefore, the steelhead trout larger than a 100 g size is recommended for transfer to seawater culture.

• Proceedings of the Korean Institute of Navigation and Port Research Conference
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• 2009.06a
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• pp.435-438
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• 2009

A navigation aid buoy is a kind of safety facility for maritime navigation with a purpose of leading the vessels for navigating, docking and sail off. An advanced rechargeable battery is required for stable power supply for navigation aid buoy as the high magnitude LED lamps, real time location/control for navigation aids and e-Navigation support systems with maritime climate observation equipments have recently been deployed. This study is focused on the lithium battery, especially lithium polymer battery which is believed to be safer than the other types of batteries. The lithium polymer battery reviewed in this study is designed with $LiFePO_4$-based cathode, which has superior safety features to the oxide-based cathodes. Besides, a 3.6kWh battery pack has been built with the above-mentioned unit cells for the purpose of comparative research with lead acid battery system.