• Title/Summary/Keyword: Interlayer space

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The properties of pad conditioning according to manufacturing methods of CMP pad conditioner (CMP 패드 컨디셔너의 제조공법에 따른 패드 컨디셔닝 특성)

  • Kang S.K.;Song M.S.;Jee W.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.362-365
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    • 2005
  • Currently Chemical Mechanical Planarization (CMP) has become an essential step in the overall semiconductor wafer fabrication technology. Especially the CMP pad conditioner, one of the diamond tools, is required to have strong diamond retention. Strong cohesion between diamond grits and metal matrix prevents macro scratch on the wafer. If diamond retention is weak, the diamond will be pulled out of metal matrix. The pulled diamond grits are causative of macro scratch on wafer during CMP process. Firstly, some results will be reported of cohesion between diamond grits and metal matrix on the diamond tools prepared by three different manufacturing methods. A measuring instrument with sharp cemented carbide connected with a push-pull gauge was manufactured to measure the cohesion between diamond grits and metal matrix. The retention force of brazed diamond tool was stronger than the others. The retention force was also increased in proportion to the contact area of diamond grits and metal matrix. The brazed diamond tool has a strong chemical combination of the interlayer composed of chrome in metal matrix and carbon which enhance the interfacial cohesion strength between diamond grits and metal matrix. Secondly, we measured real-time data of the coefficient of friction and the pad wear rate by using CMP tester (CETR, CP-4). CMP pad conditioner samples were manufactured by brazed, electro-plated and sintered methods. The coefficient of friction and the pad wear rate were shown differently according to the arranged diamond patterns. Consequently, the coefficient of friction is increased according as the space between diamonds is increased or the concentration of diamonds is decreased. The pad wear rate is increased according as the degree of diamond protrusion is increased.

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Mineral-Based Slow Release Fertilizers: A Review

  • Noh, Young Dong;Komarneni, Sridhar;Park, Man
    • Korean Journal of Soil Science and Fertilizer
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    • v.48 no.1
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    • pp.1-7
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    • 2015
  • Global population is expected to reach nine billion in 2050 and the total demand for food is expected to increase approximately by 60 percent by 2050 as compared to 2005. Therefore, it is important to increase crop production in order to meet the global demand for food. Slow release fertilizers have been developed and designed in order to improve the efficiency of fertilizers. Mineral-based slow release fertilizers are useful because the minerals have a crystalline structure and are environmentally friendly in a soil. This review focuses on slow release fertilizers based on montmorillonite, zeolite, and layered double hydroxide phases as a host for nutrients, especially N. Urea was successfully stabilized in the interlayer space of montmorillonite by the formation of urea-Mg or Ca complex, $[(Urea)_6Mg\;or\;Ca]^{2+}$ protecting its rapid degradation in soils. Naturally occurring zeolites occluded with ammonium nitrate and potassium nitrate by molten salt treatment could be used as slow release fertilizer because the occlusion process increased the capacity of zeolites to store nutrients in addition to exchangeable cations. Additionally, surface-modified zeolites could also be used as slow release fertilizer because the modified surface showed high affinity for anionic nutrients such as nitrate and phosphate. Moreover, there were attempts to develop and use synthetic layered double hydroxide as a carrier of nitrate because it has positively charged layers which electrostatically bond nitrate anions. Kaolin was also tested by combining with a polymer or through the mechanical-chemical process for slow release of nutrients.

An Experimental Study on the Properties of Chloride Binding of Mg/Al-NO3 and Ca/Al-NO3 Layered Double Hydroxides in Solution (수용액내에서 Mg/Al-NO3 및 Ca/Al-NO3 층상이중수산화물(LDHs)의 염소이온 고정화 특성에 관한 실험적 연구)

  • Lee, Seung-Yeop;Yang, Hyun-Min;Lee, Han-Seung
    • Journal of the Korea Institute of Building Construction
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    • v.16 no.3
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    • pp.219-227
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    • 2016
  • Chloride ions ingress continuously in reinforced concrete through pores of it by $Cl^-$. Finally, it causes a localized corrosion of the rebar and then it generates cracks on concrete structures. Recently, new materials removing harmful anions have been developed. Layered double hydroxides(LDHs) has an excellent ability to remove harmful anions because various anions can be adsorbed in the interlayer space between divalent and trivalent cations. Thus, LDHs has been applied in various fields. Especially, LDHs is expected to be effective adsorbent binding chloride ions. In this study, $Ca/Al-NO_3$ and $Mg/Al-NO_3$ LDHs were prepared by using a co-precipitation method. $Ca/Al-NO_3$ and $Mg/Al-NO_3$ LDHs were compared and analyzed by using XRD, SEM analysis. Many nano size hexagonal crystals were observed by SEM. Experiments for binding chloride ions of LDHs were conducted by using potentiometric method. The experimental data were measured every 15 minutes. It was observed that the chloride ion content is reduced by increasing of LDHs mass fraction and the reaction rate of $Mg/Al-NO_3$ is faster than $Ca/Al-NO_3$. In future studies, binding chloride capacity in cement materials will be evaluated based on results of this study.

Synthesis of Polyester-diol and Exfoliation of Nanoclay through Esterification between Adipic Acid and Diethylene Glycol (Adipic Acid와 Diethylene Glycol의 에스테르 반응을 통한 나노점토의 박리와 폴리에스테르형 디올의 합성)

  • Kim, Byung-Ju;Lee, Sang-Ho
    • Elastomers and Composites
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    • v.44 no.4
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    • pp.447-454
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    • 2009
  • We synthesized polyester-diol containing Cloisite 30B which is exfoliated during the synthesis. First, esterification was conducted with excess adipic acids and two 2-hydroxyethyl groups of the tertiary ammonium tethered to Cloisite 30B silicate layer. Due to the small molecular size of adipic acid ($d{\approx}3.0\;{\AA}$, $L{\approx}9.3\;{\AA}$), it penetrated into the interlayer of Cloisite 30B, reacted with the 2-hydroxyethyl groups, and produced the tertiary ammonium that has the two ethyl-ester adipic acid groups, one methyl group, and one hydrogenated alkyl group. Through the esterification, the molecular size of the tertiary ammonium increased and as the result, the basal space of Cloisite 30B increased from $18.4\;{\AA}$ to more than $58.3\;{\AA}$. The produced ethyl-ester adipic acid and unreacted adipic acid reacted with excess diethylene glycol ([COOH]/[OH]${\approx}0.6$) to be polyester-diol. The COOH conversion calculated from the acid value of the reactant mixture was 94%. The number average molecular weight and PDI of the produced polyester-diol were 830 g/mol and 1.2, respectively.