• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.127.4-127
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• 2001

Inspection and shape measurement of three-dimensional objects are widely needed in industries for quality monitoring and control. A number of visual or optical technologies have been successfully applied to measure three dimensional surfaces. Especially, the shape measurement using an interferometric principle becomes a successful methodology. However, those conventional interferometric methods to measure surface profile have an inherent shortcoming, namely 2∏ ambiguity problem. The problem inevitably happens when the object to be measured has discontinuous shape due to the repetition of interferometric signal with phase period of 2∏. Therefore, in this paper, we choose as a shape measuring method, ...

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2009.10a
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• pp.343-344
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• 2009

• Transactions of the Korean Society of Mechanical Engineers A
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• v.22 no.1
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• pp.80-89
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• 1998

The measuring method of structural strain by a 3*3 passive-demodulated fiber optic interferometric sensor was developed to implement the real-time monitoring of structural status. A 3*3 fiber optic Michelson interferometric sensor was constructed to sense the value and the direction of structural strain. This sensor was applied on the cantilevered aluminum beam to experiment the sensing of the structural deformation. The digital signal processing was programmed by LabVIEW to determine the structural strain from the fiber optic signals. This program was verified by various simulated fiber optic signals. Finally, the structural was well determined by this developed program from real fiber optic signals.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.1
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• pp.40-45
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• 2004

Recently, aspheric optical lenses and mirrors, which are harder to manufacture and measure than the conventional spherical ones, are widely used, particularly in electronic fabrication process. Generally, interferometric optical method is used for the measurement of spherical optical surface. However, the interferometric method for aspheric surface measurement is difficult because it needs a precise null corrector and strict environmental conditions such as constant temperature, humidity and vibrations. We have been studied on the manufacturing of aspheric optics to improve the surface profile accuracy and productivity using a corrective polishing process. For the corrective polishing, a practical method of On-Machine Measurement (OMM) is required. For this purpose, an optical OMM system has been studied using the Shach-Hartmann test, which is very robust to the practical polishing environment. The wavefront has been reconstructed from the measured data using the primary aberration polynomial function by the least squares fitting. The measured result of the OMM system shows that the maximum deviation is less than 200 nm for the one of commercial Fizeau interferometer Wyko 6000.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.47 no.4
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• pp.20-25
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• 2010

An integrated Mach-Zehnder interferometric sensor operating at 632.8 nm was designed and fabricated by the technology of planar rib waveguides. Rib waveguide based on silica system ($SiO_2-SiO_xN_y-SiO_2$) was geometrically designed to have single mode operation and high sensitivity. It was structured by semiconductor fabrication processes such as thin film deposition, photolithography, and RIE (Reactive Ion Etching). With the power observation, propagation loss measurement by cut-back method showed about 4.82 dB/cm for rib waveguides. Additionally the chromium mask process for an etch stop was employed to solve the core damaging problem in patterning the sensing zone on the chip. Refractive index measurement of water/ethanol mixture with this device finally showed a sensitivity of about $\pi$/($4.04{\times}10^{-3}$).

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.686-689
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• 2003

Many technologies are applied to the measurement of elastohydrodynamic lubrication (EHL) film thickness. In particular, optical in-situ interferometric method has many advantages in making the actual contact behaviors realized with the experimental apparatus. Careful selection of incident lights greatly enhances the fringe resolution up to nanometer scale by using image processing technology. In this work, it is found that dichromatic incident light can provide much finer resolution of EHL film thickness than monochromatic incident light, because it has much more variables of color components to be discriminated among the wavelengths of colors according the variations of EHL film thickness. Some simulated interferometric images are shown how the film thickness is resolutionized in nanometer scale

• Journal of Sensor Science and Technology
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• v.14 no.2
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• pp.91-95
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• 2005

A fiber Fabry-Perot interferometric sensor for the measurement of current flowing into a small fuse have been studied. The proposed current sensor was fabricated with a fiber Fabry-Perot interferometer attached close to a fuse line inside a small fuse. The fiber Fabry-Perot interferometer used in the experiment had the 10 mm cavity length and the 3.5 % reflectance mirrors. The phase shift of the output signal of the current sensor was proportional to the square of current applied to the fuse and the sensitivity of the current sensor was 0.87 degree/$mA^{2}$. The experiment results show that this sensor can be used for measuring current flowing into the fuse.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.141-142
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• 2007

• Journal of Sensor Science and Technology
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• v.10 no.1
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• pp.9-15
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• 2001

The extrinsic Fabry-Perot interferometric (EFPI) optical fiber sensor shows good sensitivity and resolution, and has many advantages over optical fiber sensors of other types. However, this EFPI optical fiber sensor has a disadvantage that the distinction of measuring directions is difficult due to the measurement method by using only fringe counting. In this paper, the transmission-type extrinsic Fabry-Perot interferometric (TEFPI) optical fiber sensor was developed, which has been improved by the additional function and whose measuring system is different from that of the conventional EFPI optical fiber sensor. Then the application result of the TEFPI optical fiber sensor to the strain and temperature measurement was explained in detail.

• Journal of the Optical Society of Korea
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• v.5 no.2
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• pp.60-66
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• 2001

The authors discuss a prototype stylus profilometer designed to measure large optics. It consists of a low contact force type probe system, laser reference system, interferometric distance measurement system, and horizontal driving system. The probe contacts the surface ; the height and the horizontal distances of the measurement points are measured by the interferometer. The freely propagated laser beam provides the reference line during the measurement. The developed stylus profilometry shows only $\pm$60 nm of P-V error for the 157 mm diameter spherical mirror.